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http://dx.doi.org/10.3795/KSME-A.2010.34.11.1721

Fabrication of Carbon Microneedle Arrays with High Aspect Ratios and The Control of Hydrophobicity of These Arrays for Bio-Applications  

Lee, Jung-A (Center for Nano- and Quantum Science, Korea Institute of Standards and Science)
Lee, Seok-Woo (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
Lee, Seung-Seob (Dept. of Mechanical Engineering, Korea Advanced Institute of Science and Technology)
Park, Se-Il (Center for Nano- and Quantum Science, Korea Institute of Standards and Science)
Lee, Kwang-Cheol (Center for Nano- and Quantum Science, Korea Institute of Standards and Science)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.34, no.11, 2010 , pp. 1721-1725 More about this Journal
Abstract
This paper reports the fabrication of geometry-controlled carbon microneedles by a backside exposure method and pyrolysis. The SU-8 microneedles are a polymer precursor in a carbonization process, which geometries such as base diameter, spacing, and aspect ratio can be controlled in a photolithography step. Using this fabrication method, highly reproducible carbon microneedles, which have high aspect ratios of more than 10 and very sharp nanotips, can be realized. The quartz surface with carbon microneedles becomes very hydrophilic and its wettability is adjusted by carrying out the silane treatment. In the carbon microneedle array ($3\;{\mu}m{\times}3\;{\mu}m$), the contact angle is extremly enhanced (${\sim}180^{\circ}$); this will be advantageous in developing low-drag microfluidics and labs-on-a-chip as well as in other bio-applications.
Keywords
Carbon Nanotip; HAR Carbon Microneedle; MEMS; Hydrophobicity Control;
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