• 제목/요약/키워드: heat exchange

검색결과 766건 처리시간 0.031초

반도체 식각 공정용 냉각 시스템 구축을 위한 AMESim 모델 개발 (A Study on the Development of AMESim Model for Construction of Cooling System for Semiconductor Etching Process)

  • 김대현;김광선
    • 반도체디스플레이기술학회지
    • /
    • 제16권3호
    • /
    • pp.106-110
    • /
    • 2017
  • Due to the plasma applied from the outside, which acts as an etchant during the etching process, considerable heat is transferred to the wafer and a separate cooling process is performed to effectively remove the heat after the process. In this case, a direct cooling method using a refrigerant is suitable for cooling through effective heat exchange. The direct cooling method using the refrigerant using the latent heat exchange is superior to the cooling method using the sensible heat exchange. Therefore, in this paper, AMESim is used to design a direct refrigerant cooling system using latent heat exchange simulator was built.The constructed simulator is reliable compared with the actual experimental results. It is expected that this simulator will help to design and search for optimal process conditions.

  • PDF

식각 공정용 냉각시스템에서의 직접 냉각 방식과 간접 냉각 방식에 관한 연구 (A Study on Direct Cooling and Indirect Cooling in Etching Process Cooling System)

  • 장경민;김광선
    • 반도체디스플레이기술학회지
    • /
    • 제17권3호
    • /
    • pp.100-103
    • /
    • 2018
  • Due to the plasma applied from the outside, which acts as an etchant during the etching process, considerable heat is transferred to the wafer and a separate cooling process is performed to effectively remove the heat after the process. In this case, a direct cooling method using a refrigerant is suitable for cooling through effective heat exchange. The direct cooling method using the refrigerant using the latent heat exchange is superior to the cooling method using the sensible heat exchange. Therefore, in this paper, AMESim is used to design a direct refrigerant cooling system using latent heat exchange simulator was built.The constructed simulator is reliable compared with the actual experimental results. It is expected that this simulator will help to design and search for optimal process conditions.

CHP의 열거래 매커니즘 개발 (Development of CHP Heat Exchange Mechanism)

  • 김용하;이범;신형철;연준희;박정호;임현성
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 2007년도 제38회 하계학술대회
    • /
    • pp.125-126
    • /
    • 2007
  • This paper presents a CHP Heat Exchange Mechanism considering Economic Load Dispatch with Dynamic Programming. It calculates CHP heat generation cost and Heat load pattern. Also It presents CHP optimal operation through appliance of Heat Exchange Mechanism and investigates CHP optimal operation effects about connected two regions.

  • PDF

현장 열응답 시험을 통한 에너지파일의 열교환파이프 배열 방식에 따른 성능 비교 (Performance-based comparison of energy pile of various heat exchange pipe arrangement by in-situ thermal response test)

  • 민선홍;고형선;유재현;정경식;이영진;최항석
    • 한국신재생에너지학회:학술대회논문집
    • /
    • 한국신재생에너지학회 2011년도 춘계학술대회 초록집
    • /
    • pp.196.1-196.1
    • /
    • 2011
  • In this study, a test bed was constructed in order to evaluate thermal efficiency of the energy pile which carries out combined roles of a structural foundation and of a heat exchanger. The energy pile in this study is designed as a large-diameter drilled shaft equipped with the heat exchange pipes which configures a W-shape and an S-shape. The drilled shaft reached to the depth of 60 m whilst the heat exchange pipes were installed to about 30 m deep from the ground surface. The W-shaped and S-shaped heat exchange pipes were installed in the opposite sections of the same drilled shaft. In-situ thermal response tests were performed for both the shapes of heat exchange pipes. To avoid underestimating the thermal performance due to hydration heat of concrete inside the drilled shaft, the in-situ thermal response tests for the energy pile were performed after four weeks since the installation of the energy pile.

  • PDF

지중열 이동 시뮬레이션을 이용한 수평형 지열시스템의 채열성능 예측 (Prediction of the Heat Exchange Rate for a Horizontal Ground Heat Pump System Using a Ground Heat Transfer Simulation)

  • 남유진;채호병
    • 설비공학논문집
    • /
    • 제25권6호
    • /
    • pp.297-302
    • /
    • 2013
  • The ground source heat pump (GSHP) system has attracted attention, because of its stability of heat production, and the high efficiency of the system. However, there are few studies on the prediction method of the heat exchange rate for a horizontal GSHP system. In this research, in order to predict the performance of a horizontal GSHP system, coupled simulation with a ground heat transfer model and a heat exchanger circulation model was developed, and calculation of heat exchange rate was conducted by the developed tool. In order to optimally design the horizontal GSHP system, the flow rate of circulation water, and the depth and buried spaces of heat exchangers were considered by the case study. As a result, the temperature of circulation water and the heat exchange rate of the system were calculated in each case.

개량형 열회수 시스템의 열교환 성능 (Heat Exchange Performance of Improved Heat Recovery System)

  • 서원명;윤용철;권진근
    • 생물환경조절학회지
    • /
    • 제12권3호
    • /
    • pp.107-113
    • /
    • 2003
  • 본 연구에서는 온실의 온풍식 난방시스템 연통에 장착할 수 있는 폐열 회수기의 성능 개선을 목적으로 기 설계된 세 가지 열교환 장치와 기존의 장치에서 열교환 면적과 파이프의 두께 및 공기흐름 방향을 개량한 새 열교환 장치에 대해 열회수 성능을 실험적으로 비교 분석하였다. 그 결과 기존의 열 교환장치인 A형, B형 및 C형의 열회수 성능은 동일 송풍전입에서 각각 42.2%, 40.6% 및 54.4% 정도였으나 , 새로 개량된 D형은 69.2%로써 가장 현저히 높게 나타났다. 그러나 열회수용 공기의 흐름방향 변화에 따른 열회수 성능 개선효과 (A형 대비 B형)는 없는 것으로 나타나 적정 송풍기 용량이라면 직선형이 공기의 흐름방향 180${\circ}C$ 굴절시키는 헤어핀형보다 효과적인 것으로 판단된다. 결국 열회수 성능은 열회수 시스템의 열교환 면적과 열교환 파이프의 두께 및 풍속에 크게 좌우되는 것으로 나타났다. 따라서, 열교환 파이프의 내구성 등 을 고려하여 기능한 한 범위 내에서 열 교환면적을 증대시키거나 열교환 파이프의 두께를 앓게 하고 풍속을 증대시키는 것이 열회수 성능 개선효과와 직결됨을 알 수 있었다. 그리고 송풍기 용량이 필요이상으로 큰 경우, 소비전력이 많게 되는 등의 문제가 있기 때문에 적정용량 및 제품의 안정성을 고려하여 선택해야 할 것으로 판단되었다.

제 2종 LiBr-H2O 흡수식 히트펌프의 운전 변수에 따른 성능 특성 수치 해석 (Effects of Operation Conditions on the Performance of Type II LiBr-H2O Absorption Heat Pump)

  • 윤준성;권오경;차동안;배경진;김인관;김민수;박찬우
    • 설비공학논문집
    • /
    • 제29권1호
    • /
    • pp.7-14
    • /
    • 2017
  • This study carried out a numerical analysis of the effects of hot waste water supply on the performance of a Type II absorption heat pump. There are two types of hot waste water supply, regular series flow and reverse series flow. Also it investigated the interaction between each type of flow and heat exchange solutions. As the effectiveness of heat exchange solutions increase, the steam generation and (COP) increase as well. If the effectiveness of a heat exchange solution is lower than 0.566, the steam generation rate of the reverse flow is lower than that of the regular series flow. A high effectiveness of heat exchange solution is therefore required to make a larger amount of steam in reverse series flow than with ordinary series flow. The COP difference between the two types of flow decreases with the increasing effectiveness of the heat exchange solution. Thus, a reverse flow type absorption heat pump can match the high steam generation rate and COP of the ordinary flow type when a highly effective heat exchange solution is applied.

한국서해의 해양과 대기간 에너지의 효과 (Sea-air Energy Exchange in the Eastern Yellow Sea)

  • 이동영;장선덕
    • 수산해양기술연구
    • /
    • 제12권2호
    • /
    • pp.37-42
    • /
    • 1976
  • Each term of heat badget equation in the eastern Yellow Sea was calculated and the variation in relation to meteorological condition was shown for the period from September 1973 to February 1974, At Mal-do near Gunsan the maximum heat exchange occurred at the last ten days of December (--522 1y/day), while at Sunmi-do near Incheon it occurred at the middle ten days of November (--665 1y /day), The contribution of the sensible heat to total heat exchange increased rapidly, while the effect of cloudiness decreased to be negligible in winter. The values of the heat exchange fluctuated considerably with the periodic occurrence of the cold Siberiaa air mass. The mean evaporation heat estimated indirectly from the aerological data was 32 ly/day at the northern part and 269 ly/dlY at the southern part of the Yellow Sea in December 1973.

  • PDF

지중매설관 열교환장치의 성능분석(I) -연속운전실험에서의 온도특성 및 열교환성능- (Performance Analysis of an Earth Tube Heat Exchanger(I) -Temperature Variation Characteristics and Heat Exchange Performance on the Mode of Continuous Operation)

  • 김영복;백이
    • Journal of Biosystems Engineering
    • /
    • 제21권4호
    • /
    • pp.436-448
    • /
    • 1996
  • An earth tube soil air heat exchange system was designed, installed and operated as a single pass heat exchanger to utilize the geothermal energy as an natural energy source. This study was undertaken to investigate the potential of the heating and cooling, energy gain, heat exchange efficiency and coefficient of performance of the system. The system consisted of 30m in length and 30cm in diameter polyethylene pipes buried 2m deep in soil. Maximum heating and cooling performance were 2.51㎾ and 1.26㎾ at the air mass rate of 21cmm. Energy gain and coefficient of performance were the function of temperature difference between outside air and soil temperature. They were expressed as Q=0.33$ imes$$Delta T_{max}$+0.134(㎾) for energy gain and COP=0.44$ imes$$Delta T_{max}$+0.178 for coefficient of performance with correlation factor of 0.95. The mean of heat exchange efficiencies was 85.6%.

  • PDF

병렬 U형 현장타설 에너지파일의 열교환 효율 및 적용성 평가 (Evaluation of Heat Exchange Efficiency and Applicability for Parallel U-type Cast-in-place Energy Pile)

  • 박상우;김병연;성치훈;최항석
    • 대한토목학회논문집
    • /
    • 제35권2호
    • /
    • pp.361-375
    • /
    • 2015
  • 에너지파일은 기존의 수직밀폐형 지중열교환기를 경제적으로 대체할 수 있는 새로운 형태의 지중열교환기이다. 즉, 에너지파일은 건물의 기초 구조물과 지중열교환기의 역할을 동시에 수행하는 에너지 구조체로서, 말뚝 기초 내부에 열교환 파이프를 삽입하고 파이프를 통해 유체를 순환시켜 지반과의 열교환을 유도한다. 본 연구에서는 병렬 U형(5쌍, 8쌍, 10쌍)의 열교환 파이프를 대구경 현장타설 에너지파일에 삽입하여, 3본의 에너지파일을 실규모로 시공하였다. 또한 현장 열응답 시험(In-situ thermal response tests, TRTs)을 수행하고 시공된 현장타설 에너지파일과의 열교환 효율을 비교하기 위하여 30m 깊이의 수직밀폐형 지중열교환기를 별도로 시공하였다. 병렬 U형 현장타설 에너지파일에 대해서는 냉난방 부하를 인공적으로 주입하는 열교환 성능 평가시험을 수행하여 열교환 성능(heat exchange rate)을 평가하였다. 마지막으로 현장타설 에너지파일의 적용성 평가를 위해 산정된 상대 열교환 효율(relative heat exchange efficiency) 및 열교환 성능을 선행 연구 결과와 비교하였으며, 본 연구에서 시공된 현장타설 에너지파일은 안정적이고 효율적인 열성능을 보이는 것으로 나타났다.