Browse > Article

A Study on Direct Cooling and Indirect Cooling in Etching Process Cooling System  

Jang, Kyungmin (Graduate School of Mechanical Engineering of KOREATECH)
Kim, Kwangsun (School of Mechanical Engineering of KOREATECH)
Publication Information
Journal of the Semiconductor & Display Technology / v.17, no.3, 2018 , pp. 100-103 More about this Journal
Abstract
Due to the plasma applied from the outside, which acts as an etchant during the etching process, considerable heat is transferred to the wafer and a separate cooling process is performed to effectively remove the heat after the process. In this case, a direct cooling method using a refrigerant is suitable for cooling through effective heat exchange. The direct cooling method using the refrigerant using the latent heat exchange is superior to the cooling method using the sensible heat exchange. Therefore, in this paper, AMESim is used to design a direct refrigerant cooling system using latent heat exchange simulator was built.The constructed simulator is reliable compared with the actual experimental results. It is expected that this simulator will help to design and search for optimal process conditions.
Keywords
Etching; Heat transfer; Cooling system; AMESim;
Citations & Related Records
연도 인용수 순위
  • Reference
1 Foo Lam Woong, Radimin, Mary Teo, Charles Lee, "FEA Thermal Investigation on Plasma Etching Induced Heating during Wafer Thinning process", Electro packaging Technology Conference, 2006.
2 Li Tao, "Design analysis and optimization for the civil aircraft hydraulic supply system based on AMESim" 2016 IEEE International Conference on Aircraft Utility System, pp.890-894, 2016.
3 Svetlana B. Radovanov, Steven R. Walther, Edward Evans, John Ballou, Nicholas R. White, William Frutiger, "Wafer Cooling for a High Current Serial Ion Implantation System", IEEE, Vol.1, pp.634-637 1999.
4 Q. Zhang, W. Xiong, H. Wang, G. Guan, Z. Wang, Q. Xiong," Research on pressure characteristics of a vehicle shift hydraulic system based on AMESim", 2017 36th Chinese Control Conference (CCC), pp.10286-10489
5 Chaojun Wang, Boshu He, Shaoyang Sun, Ying Wu, Na Yan, Linbo Yan, Xiaohui Pei, "Application of a low pressure economizer for waste heat recovery from the exhaust flue gas in a 600 MW power plant", Energy, volume 48 issue 1, pp.196-202, December 2012   DOI
6 LMS, AMESim UserGuide(2016)