• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.53-53
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• 2011

As the dimension of Cu interconnects has continued to reduce, its resistivity is expected to increase at the nanoscale due to increased surface and grain boundary scattering of electrons. To suppress increase of the resistivity in nanoscale interconnects, alloying Cu with other metal elements such as Al, Mn, and Ag is being considered to increase the mean free path of the drifting electrons. The formation of Al alloy with a slight amount of Cu broadly studied in the past. The study of Cu alloy including a very small Al fraction, by contrast, recently began. The formation of Cu-Al alloy is limited in wet chemical bath and was mainly conducted for fundamental studies by sputtering or evaporation system. However, these deposition methods have a limitation in production environment due to poor step coverage in nanoscale Cu metallization. In this work, gap-filling of Cu-Al alloy was conducted by cyclic MOCVD (metal organic chemical vapor deposition), followed by thermal annealing for alloying, which prevented an unwanted chemical reaction between Cu and Al precursors. To achieve filling the Cu-Al alloy into sub-100nm trench without overhang and void formation, furthermore, hydrogen plasma pretreatment of the trench pattern with Ru barrier layer was conducted in order to suppress of Cu nucleation and growth near the entrance area of the nano-scale trench by minimizing adsorption of metal precursors. As a result, superconformal gap-fill of Cu-Al alloy could be achieved successfully in the high aspect ration nanoscale trenches. Examined morphology, microstructure, chemical composition, and electrical properties of superfilled Cu-Al alloy will be discussed in detail.

• 자원리싸이클링
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• 제12권2호
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• pp.11-20
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• 2003

폐석회석을 투수 콘크리트용 골재로 활용하여 콘크리트의 공극률, 연속공극률, 투수계수, 압축강도 및 휨강도 등을 측정하였으며,투수 콘크리트의 공극특성과 강도와의 관계에 대하여 고찰하였다. 투수 콘크리트의 공극 및 강도특성은 폐석회석 혼합률에 의한 영향 보다는 골재입자의 크기 및 골재입자 사이의 공극에 의한 영향이 크게 작용하였다. 투수 콘크리트의 공극률과 연속공극률과의 관계 및 공극특성과 강도와의 관계도 양호한 선형관계를 나타내었다. 또한, 폐석회석을 사용한 투수 콘크리트의 투수계수는 0.2cm/sec 이상의 양호한 결과로 보통골재에 비하여 투수성능이 우수하였으며, 강도결과와 종합해 보면 폐석회석을 보도용 콘크리트 또는 식생, 수자원 정화 콘크리트 등으로 활용될 수 있을 것으로 기대되었다.

• Geomechanics and Engineering
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• 제12권3호
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• pp.399-415
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• 2017

A series of direct shear tests were conducted to investigate the frictional properties of the interface between structures and the filling soil of Chongqing airport fourth stage expansion project. Two types of structures are investigated, one is low carbon steel and the other is the bedrock sampled from the site. The influence of soil water content, surface roughness and material types of structure were analyzed. The tests show that the interface friction and shear displacement curve has no softening stage and the curve shape is close to the Clough-Duncan hyperbola, while the soil is mainly shear contraction during testing. The interface frictional resistance and normal stress curve meets the Mohr-Coulomb criterion and the derived friction angle and frictional resistance of interface increase as surface roughness increases but is always lower than the internal friction angle and shear strength of soil respectively. When surface roughness is much larger than soil grain size, soil-structure interface is nearly shear surface in soil. In addition to the geometry of structural surface, the material types of structure also affects the performance of soil-structure interface. The wet interface frictional resistance will become lower than the natural one under specific conditions.

• 한국재료학회지
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• 제9권2호
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• pp.124-131
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• 1999

Copper film, which is expected to be used as interconnection material for 1 giga DRAM integrated circuits was deposited on hole and trench patterns by Metal Organic Chemical Vapor Deposition(MOCVD) method. After a reflow process, contact and L/S patterns were filled by copper and the characteristics of the Cu reflow process were investigated. When deposited Cu films were reflowed, grain growth and agglomeration of Cu have occurred in surfaces and inner parts of patterns as well as complete filling in patterns. Also Cu thin oxide layers were formed on the surface of Cu films reflowed in $O_2$ambient. Agglomeration and oxidation of Cu had bad influence on the electrical properties of Cu films especially, therefore, their removal and prevention were studied simultaneously. As a pattern size is decreased, preferential reflow takes place inside the patterns and this makes advantages in filling patterns of deep submicron size completely. With Cu reflow process, we could fill the patterns with the size of deep sub-micron and it is expected that Cu reflow process could meet the conditions of excellent interconnection for 1 giga DRAM device when it is combined with Cu MOCVD and CMP process.

• 대한금속재료학회지
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• 제49권2호
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• pp.104-111
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• 2011

An ultrafine grained Mg-9Al-1Zn magnesium alloy with the mean grain size less than $1{\mu}m$ was produced by using high-ratio differential speed rolling. The processed alloy exhibited excellent superplasticity at relatively low temperatures. The micro-forming tests were carried out using a micro-forging apparatus with micro V-grooved shaped dies made of silicon and the micro-formability was evaluated by means of micro-formability index, $R_f$ ($=A_f/A_g$, $A_f$: formed and inflowed area into the V-groove, $A_g$: area of the V-groove). The $R_f$ value increased with temperature up to $280^{\circ}C$ and then decreased beyond $300^{\circ}C$. The decrease of the $R_f$ value at $300^{\circ}C$ was attributed to the accelerated grain coarsening. Increasing the micro-forging pressure increased the $R_f$ values. At a given die geometry, die filling ability decreased as the die position moved away from the die center to the end. FEM simulation predicted this behavior and a method of improving this problem was proposed.

• 한국작물학회지
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• 제67권3호
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• pp.155-163
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• 2022

The tillering potential of panicle number type (PNT) rice greatly varies with planting density. Moreover, grain filling and ripening differ depending on the panicle position, which may further affect rice grain quality. The present study evaluated the grain quality of PNT rice sparsely planted to reduce production costs. The physicochemical characteristics of starch from the grains of PNT type rice 'Ilpum' planted at different densities (37, 50, 60, and 80 plants/3.3 m²) and at different positions of panicles (upper or lower on the culm) were determined. Overall, as the planting density decreased, the number of panicles increased but the starch content decreased, which further reduced the 1,000-grain weight. In particular, at the lowest density (37 plants/3.3 m²), protein content increased but particle size, enthalpy, and relative crystallinity decreased. The effects were more pronounced at lower than at upper panicle positions. These findings indicate that tillering potential differs with planting density, ultimately affecting the palatability of rice grains. Based on these findings, we propose restricting rice transplantation to a planting density of ≤37 plants/3.3 m² to achieve the best quality of grains at lower costs and with less labor.

• 한국콘크리트학회:학술대회논문집
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• 한국콘크리트학회 2004년도 춘계 학술발표회 제16권1호
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• pp.388-391
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• 2004

This research investigates how the fineness modulus of fine aggregates and the grain shape of coarse aggregates affects flow characteristics, packing characteristics and compressive strength characteristic. The experimental results, show that increase of the fine aggregate's fineness modulus improved concrete flow, but filling ability was high at over KS regulation extent due to segregation phenomena. It is considered that the improvement of 0.1 spherical rate was effective to concrete fluidity elevation by reducing about $6\%$ of fine aggregate ratio displays which the smallest gap rate of aggregate. Compressive strength was increased to about 0.6MPa everytime F.M. 0.1 of fine aggregate fineness is increased. However, it was decreased to about 9MPa at F.M. 3.5 compared to F.M. 3.0.

• 자원환경지질
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• 제20권4호
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• pp.223-234
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• 1987

This paper describes the mode of occurrence and mineralogical properties of electrum from the Namseong Gold-Silver deposits, for the purpose of obtaining data on the characteristics of the ore deposits and the behavior of gold and silver during the mineralization. The gangue minerals are quartz, calcite, fluorite. Ore minerals are mainly composed of pyrite, sphalerite, chalcopyrite and galena with minor amount of argentite, electrum, pyrargyrite, native silver and unidenfied mineral(Cu-Fe-Ag-S series). Three stage of mineralization recognized are, from early to later, (I) pyrite-electrum stage (II) sphalerite-chalcopyrite-galena-argentite-electrum stage (III) sulfosalts stage. The filling temperature of fluid inclusions in quartz ranges from $225^{\circ}$ to $335^{\circ}C$. The value of sulfur fugacity estimated by means of electrum-tarnish method ranges from $10^{-11.5}$ to $10^{-14}$ atm. The compositional heterogeneity within a single grain with respect to gold concentration is common in the Namseong electrums Chemical composition of electrum ranges generally between 25~45 atom% Au. Its gold content decreases in late stages of mineralization.

• 한국주조공학회지
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• 제37권5호
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• pp.148-156
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• 2017

The effects of minor additives on the casting properties of AC4A aluminum alloys were investigated. Measurements of the cooling curve and microstructure observations were conducted to analyze the effects of Ti-B and Sr minor elements during the solidification process. A fine grain size and an increase in the crystallization temperature for the ${\alpha}-Al$ solution were evident after the addition of 0.1wt% Al-5%Ti-1%B additive. The modification effect of the eutectic $Mg_2Si$ phase with the addition of 0.05% Al-10%Sr additive was prominent. A fine eutectic $Mg_2Si$ phase and a decrease in the growth temperature of the eutectic $Mg_2Si$ phase were evident. Fluidity, shrinkage and solidification-cracking tests were conducted to evaluate the castability of the alloy. The combined addition of Al-5%Ti-1%B and Al-10%Sr additives showed the maximum filling length owing to the effect of the fine ${\alpha}-Al$ grains. The macro-shrinkage ratio increased, while the micro-shrinkage ratio decreased with the combined addition of Al-5%Ti-1%B and Al-10%Sr additives. The macro-shrinkage ratio was nearly identical, while the micro-shrinkage ratio increased with the addition of the Al-10%Sr additive. The tendency of the occurrence of solidification cracking decreased owing to the effect of the fine ${\alpha}-Al$ grains and the modification of the $Mg_2Si$ phase with the combined addition of Al-5%Ti-1%B and Al-10%Sr additives.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.649-652
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• 2005

It is reported that semi-solid forming process takes many advantages over the conventional forming process, such as long die lift, good mechanical properties and energy saves. Rheology material has a thixotropic, pseudo-plastic and shear-thinning characteristic. Therefore, general plastic or fluid dynamic analysis is not suitable for the behavior of rheology material. So it is difficult for a numerical simulation of the rheology process to be performed because complicated processes such as the filling to include the state of the free surface and solidification in the phase transformation must be considered. Moreover, it is important to predict the deformation behavior for optimization of net shape forging process with semi-solid materials and to control liquid segregation for mechanical properties of materials. In this study, so, molecular dynamics simulation was performed for the control of liquid segregation in compression experiment as a part of study on analysis of rheology forming process.