• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.05a
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• pp.101-102
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• 2006

BTO ($BaTiO_3$) thin film is one of the high dielectric materials for high-density dynamic random access memories (DRAMs) due to its relatively high dielectric constant, It is generally known that BTO film is difficult to be etched by plasma etching, but high etch rate with good selectivity to pattern mask was required. The problem of sidewall angle also still remained to be solved in plasma etching of BTO thin film. In this study, we first examined the patterning possibility of BTO film by chemical mechanical polishing (CMP) process instead of plasma etching. The sputtered BTO film on TEOS film as a stopper layer was polished by CMP process with the sell-developed $BaTiO_3$- and $TiO_2$-mixed abrasives slurries (MAS). respectively. The removal rate of BTO thin film using the $BaTiO_3$-mixed abrasive slurry ($BaTiO_3$-MAS) was higher than that using the $TiO_2$-mixed abrasive slurry ($TiO_2$-MAS) in the same concentrations. The maximum removal rate of BTO thin film was 848 nm/min with an addition of $BaTiO_3$ abrasive at the concentration of 3 wt%.

• Bulletin of the Korean Chemical Society
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• v.34 no.11
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• pp.3307-3311
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• 2013

A new fiber optical sensor was developed for the determination of 2,4-dichlorophenol (DCP). The sensor was based on DCP oxidation by oxygen with the catalysis of iron(III) tetrasulfophthalocyanine (Fe(III)PcTs). The optical oxygen sensing film with $Ru(bpy)_3Cl_2$ as the fluorescence indicator was used to determine the consumption of oxygen in solution. A lock-in amplifier was used for detecting the lifetime of the oxygen sensing film by measuring the phase delay change of the sensor head. The different variables affecting the sensor performance were evaluated and optimized. Under the optimal conditions (i.e. pH 6.0, $25^{\circ}C$, Fe(III)PcTs concentration of 0.62 mg/mL), the linear detection range and response time of the sensor are $1.0{\times}10^{-6}-9.0{\times}10^{-6}$ mol/L and 250 s, respectively. The sensor displays high selectivity, good repeatability and stability, and can be used as an effective tool in analyzing DCP concentration in practical samples.

• Korean Journal of Materials Research
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• v.13 no.4
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• pp.266-270
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• 2003

We studied BCl$_3$ dry etching of GaAs in a planar inductively coupled plasma system. The investigated process parameters were planar ICP source power, chamber pressure, RIE chuck power and gas flow rate. The ICP source power was varied from 0 to 500 W. Chamber pressure, RIE chuck power and gas flow rate were controlled from 5 to 15 mTorr, 0 to 150 W and 10 to 40 sccm, respectively. We found that a process condition at 20 sccm $BCl_3$ 300 W ICP, 100 W RIE and 7.5 mTorr chamber pressure gave an excellent etch result. The etched GaAs feature depicted extremely smooth surface (RMS roughness < 1 nm), vertical sidewall, relatively fast etch rate (> $3000\AA$/min) and good selectivity to a photoresist (> 3 : 1). XPS study indicated a very clean surface of the material after dry etching of GaAs. We also noticed that our planar ICP source was successfully ignited both with and without RIE chuck power, which was generally not the case with a typical cylindrical ICP source, where assistance of RIE chuck power was required for turning on a plasma and maintaining it. It demonstrated that the planar ICP source could be a very versatile tool for advanced dry etching of damage-sensitive compound semiconductors.

• Bulletin of the Korean Chemical Society
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• v.31 no.6
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• pp.1496-1500
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• 2010

Sibutramine enantiomers were separated successfully by capillary zone electrophoresis using substituted cyclodextrins as chiral selectors. The effects of cyclodextrin concentration, pH, voltage, buffer type, and electrolyte concentration on the migration time and resolution of enantiomers were examined. Separation of sibutramine enantiomers on an unmodified fused silica capillary (total length, 54 cm; effective length, 45 cm) was achieved using a mixed buffer of 20 mM phosphate/10 mM citrate containing either 5 mM methyl-${\beta}$-cyclodextrin (pH 4.3) or 5 mM carboxymethyl-${\beta}$-cyclodextrin (pH 6.5). Samples were injected with a pressure of 50 mbar for 5 s and were detected at a wavelength of 223 nm. The established method showed good precision and accuracy, with intra- and inter-day variations of less than 2.9 and 4.7%, respectively, and recoveries of 95.7 - 103.8%. The stability constants of (R)- and (S)-sibutramine demonstrated that the resolution of sibutramine enantiomers was attributable primarily to the difference in stability constants. When this optimized method was applied to the determination of sibutramine enantiomers in commercial drug formulations, it proved to be economical and convenient, affording sufficient accuracy, precision, and reproducibility as well as sensitivity and selectivity.

• Journal of the Korean Chemical Society
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• v.53 no.2
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• pp.144-151
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• 2009

An optode for cadmium ion determination has been designed by immobilization of dithizone on triacetylcellose membrane. When the optode membrane is introduced into a real samples containing cadmium, there is a color change from green to red, making it possible to use the change in absorbance at 611 nm as the analytical signal. The sensor could be used in the range of 0.3-3 ${\mu}g\;ml^{-1}$ (2.67-26.67 ${\mu}M$) of $Cd^{2+}$ ions with a limit of detection of 0.025 ${\mu}g\;ml^{-1}$ (25 ng $ml^{-1}$). The response time of optode is within 15 min depending on the concentration of $Cd^{2+}$ ions. It can be easily and completely regenerated by dilute EDTA solution. The effect of different possible interfering species has been examined and was shown the optode has a good selectivity. The results obtained for the determination of cadmium ion in polluted soil and water samples using the proposed optode was found to be comparable with the well-established atomic absorption method.

• Journal of the Korean Chemical Society
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• v.36 no.3
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• pp.419-427
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• 1992

The performance of homemade thermal field-flow fractionation (ThFFF) and the optimization for separation are investigated in terms of retention parameters and selectivity using polystyrene standards. The ribbonlike channel was constructed by sandwiching two Mylar spacers between two highly polished copper bars which serve as channel walls. The hot bar was heated by two electrical cartridge heaters and the cold bar had holes through the entire length, allowing tap water as coolant to enter. It has been observed that the retention of polystyrenes increases as the temperature gradient increases. And the retention decreases as the cold wall temperature increases from 20 to $45^{\circ}C$. In comparison with size exclusion chromatography, ThFFF is more selective but has relatively low efficiency. It has been found that the plate height is proportional to the flow velocity and good estimates of polydispersities can be made directly from the ThFFF data.

• Journal of the Korean Chemical Society
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• v.55 no.4
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• pp.685-690
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• 2011

Novel acidic ionic liquids, 1-(${\omega}$-sulfonicacid)propyl-3-methylimidazolium bromide ([$HSO_3$pmim]Br)and 1-(${\omega}$-sulfonicacid)butyl-3-methylimidazolium bromide ([$HSO_3$bmim]Br), were prepared and used as brominating agents, catalysts and solvents in the synthesis of 1,7-dibromoheptane, respectively. 1,7-dibromoheptan with a yield of 95% was obtained at $100^{\circ}C$ for 2 h by simple phase separation. The acidic ionic liquid [$HSO_3$pmim]Br was recycled for 5 times and the yield of 1,7-dibromoheptane did not decrease remarkably, which indicates that catalysts still maintain good selectivity and activity after recycling. The structure of the acidic ionic liquid [$HSO_3$pmim]Br was characterized with IR, and it was found that [$HSO_3$pmim]Br had stronger acidity than other ionic liquid.

• Membrane Journal
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• v.6 no.1
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• pp.22-31
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• 1996

Pervaporation experiments of isopropanol-water mixtures through a polydimethytsiloxane(PDMS) membrane were carried out at 35$^{\circ}$C and the effect of isopropanol concentration on the separation characteristics was investigated. The total permeation rate showed the largest deviation from the ideal permeation rate at the isoprpanol volume fraction from 0.5 to 0.7, which resulted from the interaction effect between permeants. The plasticizing effect of isopropanol enhanced the permeation of water, while the existance of water resulted in the depression of isopropanol permeation. Both the permeation rate and the selectivity were predicted using Flory-Huggins thermodynamics and modified Maxwell-Stefan equation. The concentration-dependent diffusion coefficients were expressed by Vignes equation. The Flory-Huggins interaction parameter between isopropanol and water was calculated using excess Gibbs energy correlation and the interaction parameters between liquid and polymer membrane were determined by equilibrium swelling experiments. The predicted permeation rates were in accord with the experimental ones within maximum error range of 35 %. The predicted permeation selectivities were in good agreement with the experimental values.

• Journal of Electrochemical Science and Technology
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• v.9 no.1
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• pp.28-36
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• 2018

Metal-organic frameworks have recently been considered very promising modifiers in electrochemical analysis due to their unique characteristics among which tunable pore sizes, crystalline ordered structures, large surface areas and chemical tenability are worth noting. In the present research, $Cu(btec)_{0.5}DMF$ was electrodeposited on the surface of glassy carbon electrode at room temperature under cathodic potential and was initially used as the active materials for the detection of $H_2O_2$. The cyclic voltammogram of $Cu(btec)_{0.5}DMF$ modified GC electrode shows distinct redox peaks potentials at +0.002 and +0.212 V in 0.1 M phosphate buffer solution (pH 6.5) corresponding to $Cu^{(II)}/Cu^{(I)}$ in $Cu(btec)_{0.5}DMF$. Acting as the electrode materials of a non-enzymatic $H_2O_2$ biosensor, the $Cu(btec)_{0.5}DMF$ brings about a promising electrocatalytic performance. The high electrocatalytic activity of the $Cu(btec)_{0.5}DMF$ modified GC electrode is demonstrated by the amperometric response towards $H_2O_2$ reduction with a wide linear range from $5{\mu}M$ to $8000{\mu}M$, a low detection limit of $0.865{\mu}M$, good stability and high selectivity at an applied potential of -0.2 V, which was higher than some $H_2O_2$ biosensors.

• Journal of Sensor Science and Technology
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• v.5 no.5
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• pp.47-54
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• 1996

Highly sensitive $WO_{3}$ doped with $SnO_{2}$ and Pt thick-film sensors for NOx gas were fabricated. The sensors had a maximum sensitivity at operating temperature of $250^{\circ}C$, but the optimum operation temperature, considering recovery desorption time, was at $330^{\circ}C$. These sensors improved sensitivity, response and recovery time, selectivity and stability, as compared to $WO_{3}$ sensors. The good linearity of sensitivity as a function of the gas concentration exhibited the possibility to be used for concentration meter.