• Journal of the Korea Institute of Information and Communication Engineering
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• v.13 no.7
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• pp.1393-1398
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• 2009

Conventionally, etching is first considered for microelectronics fabrication process and is specially important in process of a-Si:H thin film transistor for LCD. In this paper, we stabilize properties of device by development of wet and dry etching process. The a-Si:H TFTs of this paper is inverted staggered type. The gate electrode is lower part. The gate electrode is formed by patterning with length of 8 ${\mu}$m${\sim}$16 ${\mu}$m and width of 80${\sim}$200 ${\mu}$m after depositing with gate electrode (Cr) 1500 ${\AA}$under coming 7059 glass substrate. We have fabricated a-SiN:H, conductor, etch-stopper and photo resistor on gate electrode in sequence, respectively. The thickness of these thin films is formed with a-SiN:H (2000 ${\mu}$m), a-Si:H(2000 ${\mu}$m) and n+a-Si:H (500 ${\mu}$m), We have deposited n-a-Si:H, NPR(Negative Photo Resister) layer after forming pattern of Cr gate electrode by etch-stopper pattern. The NPR layer by inverting pattern of upper gate electrode is patterned and the n+a-Si:H layer is etched by the NPR pattern. The NPR layer is removed. After Cr layer is deposited and patterned, the source-drain electrode is formed. In the fabricated TFT, the most frequent problems are over and under etching in etching process. We were able to improve properties of device by strict criterion on wet, dry etching and cleaning process.

• Applied Chemistry for Engineering
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• v.16 no.6
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• pp.742-748
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• 2005

Transparent conductive indium-tin oxide (ITO) films are widely used as transparent electrodes for flat panel displays. Many of the ITO films for practical use have been prepared by magnetron sputtering, chemical vapor deposition, electron beam evaporation, etc. An oxide target composed of 10 wt% $SnO_2$ and 90 wt% $In_2O_3$ has been deposited onto polycyclic olefin polymer (POP) substrate by electron beam evaporation. POP has a higher glass transition temperature ($Tg=330^{\circ}C$) than other conventional polymers. In this study, the effects of substrate temperature and the $O_2$ introduction flow rate were investigated in terms of physical, electrical and optical properties of deposited ITO films. We investigated the effects of processing variables such as substrate temperature and the oxygen introduction flow rate. The best electrical and optical properties of deposited ITO films obtained from this study were electrical resistivity value of ${\rho}=1.78{\times}10^{-3}{\Omega}{\cdot}cm$ and optical transmittance of about 85% at 8 sccm (Standard Cubic Centimeter per Minute) $O_2$ introduction flow rate, $5{\AA}/sec$ deposition rate, $1000{\AA}$ deposited ITO thickness and $200^{\circ}C$ substrate temperature.

• Applied Chemistry for Engineering
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• v.16 no.6
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• pp.809-814
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• 2005

In this work, the thermal properties of epoxy coating system on the liner plate in the containment structure of nuclear power plants had been examined by irradiation and design basis accident (DBA) conditions. The effect of immersion in hot water on adhesion strength of the coating system had been also studied. The glass transition temperature ($T_g$) and thermal stability of ET-5290/carbon steel A 32 epoxy coating systems were measured by DSC and TGA analyses, respectively. Contact angle measurements were used to determine the effect of immersion on the surface energetics of epoxy coating system, with a viewpoint of surface free energy. Adhesion tests were also executed to evaluate the adhesion strength at interfaces between carbon steel plate and epoxy resins. As a result, it was found that the irradiation led to an improvement of internal crosslinked structure in cured epoxy systems, resulting in significantly increasing the thermal stability, as well as the $T_g$. Also, the immersion in hot water made a role in the post-curing of epoxy resins and increased the mechanical interlocking of the network system, resulting in increasing the adhesion strength of the epoxy coating system.

• Applied Chemistry for Engineering
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• v.16 no.6
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• pp.822-826
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• 2005

Colloidal Silica (CS)/methyltrimethoxysilane (MTMS) and CS/MTMS/epoxysilane (ES) sol solutions were prepared using various synthesizing parameters such as reaction time and types of CS and silane. In order to understand their physical and chemical properties, sol-gel coating films on glass were fabricated. In the case of the CS/MTMS sol, the coating films had high contact angle and more enhanced flat surface than the CS/MTMS/ES sol. In the case of thermal stability, thermal degradation of the CS/MTMS and CS/MTMS/ES coating films did not occur up to $550^{\circ}C$ and $440^{\circ}C$, respectively. The coating films prepared from the CS/MTMS sol were thicker than those of the CS/MTMS/ES sol. In addition, the coating films prepared from single CS were thicker than those of mixed CS. Hardness of the coating films prepared from CS/MTMS increased by adding ES. In case of the mixed CS, the hardness decreased by adding ES.

• Restorative Dentistry and Endodontics
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• v.29 no.6
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• pp.520-531
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• 2004

The aim of this study was to investigate the effect of monomer and filler compositions on the rheological properties related to the handling characteristics of resin composites. Methods. Resin matrices that Bis-GMA as base monomer was blended with TEGDMA as diluent at various ratio were mixed with the Barium glass (0.7 um and 1.0 um), 0.04 um fumed silica and 0.5 um round silica. All used fillers were silane treated. In order to vary the viscosity of experimental composites, the type and content of incorporated fillers were changed, Using a rheometer, a steady shear test and a dynamic oscillatory shear test were used to evaluate the viscosity ($\eta$) of resin matrix, and the storage shear modulus (G'), the loss shear modulus (G"), the loss tangent ($tan{\delta}$) and the complex viscosity (${\eta}^*$) ofthe composites as a function of frequency ${\omega}{\;}={\;}0.1-100{\;}rad/s$. To investigate the effect of temperature on the viscosity of composites, a temperature sweep test was also undertaken. Results. Resin matrices were Newtonian fluid regardless of diluent concentration and all experimental composites exhibited pseudoplastic behavior with increasing shear rate. The viscosity of composites was exponentially increased with increasing filler volume%. In the same filler volume, the smaller the fillers were used, the higher the viscosities were. The effect of filler size on the viscosity was increased with increasing filler content. Increasing filler content reduced $tan{\delta}$ by increasing the G' further than the G". The viscosity of composites was decreased exponentially with increasing temperature.

• Polymer(Korea)
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• v.33 no.2
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• pp.144-152
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• 2009

The thermal and optical properties of poly {1-(cholesteryloxycarbonylalkanoyloxy) ethylene}s (PCALEn, n=2$\sim$8,10, the number of methylene units in the spacer) were investigated. All of the homologues formed monotropic cholesteric phases with left-handed helical structures. PCALEn with n=2 or 10, in constrast with PCALEn with $3{\leq}n{\leq}8$, did not display reflection colors over the full cholesteric range, suggesting that the helical twisting power of the cholesteryl group highly depends on the length of the spacer connecting the cholesteryl group to the polyethylene chain. The glass transition temperatures decreased with increasing n. The isotropic-cholesteric phase transition temperatures decreased with increasing n up to 7 and showed an odd-even effect. However it became almost constant when n is more than 7. This behavior is rationalized in terms of the change in the average shape of the side chain on varing the parity of the spacer. This rationalization also accounts for the observed variation of the entropy gain for the clearing transition. The thermal stability and degree of order in the mesophase and the temperature dependence of the optical pitch observed for PCALEn were significantly different from those reported for cellulose tri(cholesteryloxycarbonyl)alkanoates. The results were discussed in terms of the differences in the chemical structure and flexibility of main chain and the number of the mesogenic units per repeating unit.

• Korean Journal of Optics and Photonics
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• v.14 no.3
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• pp.343-348
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• 2003

Indium tin oxide (ITO) thin films (170 nm) were grown by DC magnetron sputtering deposition on Coming glass substrates without a post annealing. The electrical transport and optical properties of the films have been investigated as a function of deposition temperature $T_{s}$ (10$0^{\circ}C$$\leq$ $T_{s}$$\leq$35$0^{\circ}C$) and oxygen partial pressure $P_{o_{2}}$, (0 $P_{o_{2}}$ $\leq$ 10$^{-5}$ torr). Films were deposited from a high density (99% of theoretical density) ITO target (I $n_2$ $O_3$: Sn $O_2$= 90 wt% : 10 wt%) made of ITO nano powders. With an increase of $T_{s}$ the electrical resistivity p of ITO thin films was found to decrease, but the mobility $\mu$$_{H}$ was found to increase. The carrier density nu shows the maximum value of 6.6$\times$10$^{20}$ /㎤ at $T_{s}$ = 30$0^{\circ}C$. At fixed Is, with an increase of the oxygen partial pressure, $n_{H}$ and $\mu$$_{H}$ were found to decrease, but p was found to increase. The minimum resistivity and maximum mobility values of the ITO films were found to be 0.3 mΩ.cm and 39.3 $\textrm{cm}^2$/V.s, respectively. The visible transmittance of the ITO films was above 80%.. 80%..

• Clean Technology
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• v.25 no.2
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• pp.114-122
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• 2019

The synthesis of bio polyol from renewable resources has attracted attention in recent years. In particular, it is important to take advantage of bio polyols in the synthesis of polymers. In this study, a series of dimethylformamide (DMF) based polyurethanes were synthesized using polycarbonate polyol/bio polyol (PO3G: polytrimethylene ether glycol prepared from 1, 3-propanediol produced by fermentation from corn sugar), methylene diphenyl diisocyanate (MDI) and 1,4-butandiol (BD). The properties of prepared polyurethane films and the cell structure of wet type artificial leather were investigated. As the bio polyol content increased, the tensile strength of polyurethane films decreased, however, the elongation at break increased significantly. As a result of thermal characteristics analysis, the glass transition temperature of polyurethanes increased when increasing the content of polycarbonate polyol. As a result of comparing the cell characteristics of wet type artificial leathers prepared in this study, it was found that the number and uniformity of cells formed in the artificial leather samples increased when increasing the content of polycarbonate polyol in polycarbonate polyol/bio polyol. From these results, it was found that DMF-based polyurethane containing an appropriate amount of bio polyol could be used for wet type artificial leather. The bio textile analysis system according to ASTM standard was used to measure the bio carbon content of polyurethane. The content of bio carbon increased proportionally with the increase of bio polyol content used in polyurethane synthesis.

• Clean Technology
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• v.25 no.1
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• pp.7-13
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• 2019

Recently, attention has been paid to obtaining bio-polyols from renewable resources. Successful use of these natural ingredients successfully produced in the industry for the synthesis of various polyurethanes is a very important task. In this study, a series of dimethylformamide (DMF) based polyurethanes were synthesized from methylene diphenyl diisocyanate (MDI)/1, 4-butanediol and bio-polyol (polytrimethylene ether glycol based on 1, 3-propanediol : B-POL)/polyester polyol (polyadipate diol based on 1,4-butandiol : H-PET). The effect of different ratio of bio-polyol (B-POL)/polyester polyol (H-PET) on the physical properties of polyurethane was investigated. As the B-POL content in B-POL/H-PET mixture increased, the glass transition of soft segment (Tgs) and tensile strength of polyurethane decreased, however, the elongation at break and tear strength increased. On the other hand, artificial leather was produced by wet process using synthesized DMF-based polyurethanes. It was found that there was almost no difference in the effect of the B-POL/H-PET composition on the average size and density (the number of cells per unit volume) of the porous cells formed in artificial leather. These results show that there is no problem in using bio-polyol (B-POL) based polyurethane for artificial leather produced by wet process.

• Journal of the Microelectronics and Packaging Society
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• v.25 no.4
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• pp.95-99
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• 2018

High thermal conductivity films with electrically insulating properties have a great potential for the effective heat transfer as substrate and thermal interface materials in high density and high power electronic packages. There have been lots of studies to achieve high thermal conductivity composites using high thermal conductivity fillers such alumina, aluminum nitride, boron nitride, CNT and graphene, recently. Among them, hexagonal-boron nitride (h-BN) nano-sheet is a promising candidate for high thermal conductivity with electrically insulating filler material. This work presents an enhanced heat transfer properties of ceramic/polymer composite films using h-BN nano-sheets and PVA polymer resins. The h-BN nano-sheets were prepared by a mechanical exfoliation of h-BN flakes using organic media and subsequent ultrasonic treatment. High thermal conductivities over $2.8W/m{\cdot}K$ for transverse and $10W/m{\cdot}K$ for in-plane direction of the cast films were achieved for casted h-BN/PVA composite films. Further improvement of thermal conductivity up to $13.5W/m{\cdot}K$ at in-plane mode was achieved by applying uniaxial compression at the temperature above glass transition of PVA to enhance the alignment of the h-BN nano-sheets.