• 한국전기전자재료학회논문지
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• 제25권11호
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• pp.922-925
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• 2012

Single crystalline Au nanowires were successfully synthesized in a tube-type furnace. The Au nanowires were grown by vapor phase synthesis technique using solid-liquid-solid (SLS) mechanism on substrates of corning glass and Si wafer. Prior to Au nanowire synthesis, Au thin film served as both catalyst and source for Au nanowire was prepared by sputtering process. Average length of the grown Au nanowires was approximately 1 ${\mu}m$ on both the corning glass and Si wafer substrates, while the diameter and the density of which were dependent on the thickness of the Au thin film. To induce a super-saturated states for the Au particle catalyst and Au molecules during the Au nanowire synthesis, thickness of the Au catalyst thin film was fixed to 10 nm or 20 nm. Additionally, synthesis of the Au nanowires was carried out without introducing carrier gas in the tube furnace, and synthesis temperature was varied to investigate the temperature effect on the resulting Au nanowire characteristics.

• Current Optics and Photonics
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• 제3권2호
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• pp.135-142
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• 2019

We report the precipitation of ZnO nanocrystals, Ag-clusters, and Ag nanoparticles in Ag/Er/Yb doped borate glasses by furnace annealing and $CO_2$ laser annealing. The XRD analysis revealed the precipitation of ZnO and Ag phases. The absorption spectra, the TEM and energy dispersive spectroscopy (EDS) revealed the incorporation of Er and Yb ions into ZnO nanocrystals formed by a laser technique and showed the surface plasmon band of Ag nanoparticles. The down-converted blue emission intensity of $Er^{3+}$ ions obtained under 365 nm excitation was enhanced by more than a hundred times in the glass treated by furnace annealing, mainly due to the energy transfer from Ag-clusters. Moreover, we discussed the contribution of Ag nanoparticles and defects to emission characteristics in the glasses treated by two annealing techniques. Up-conversion emissions of the $Er^{3+}$ ions under 980 nm excitation were enhanced due to the incorporation of $Er^{3+}$ and $Yb^{3+}$ ions into ZnO nanocrystals after thermal treatments.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.208.1-208.1
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• 2015

최근, 차세대 투명 디스플레이 구동소자로서 산화물 반도체를 이용한 Transparent Amorphous Oxide Semiconductor (TAOS) 기술이 큰 주목을 받고 있다. 산화물 반도체는 기존의 a-Si에 비해 우수한 전기적인 특성과 낮은 구동전압 그리고 넓은 밴드 갭으로 인한 투명성의 장점들이 있다. 그리고 낮은 공정 온도에서도 제작이 가능하기 때문에 유리나 플라스틱과 같은 다양한 기판에서도 박막 증착이 가능하다. 하지만 기존의 furnace를 이용한 열처리 방식은 낮은 온도에서 우수한 전기적인 특성을 내기 어려우며, 공정 시간이 길어지는 단점들이 있다. 따라서 본 연구에서는 산화물 반도체중 In-Ga-Zn-O (IGZO)와 In-Sn-O(ITO)를 각각 채널 층과 게이트 전극으로 이용하였다. 또한 마이크로웨이브 열처리 기술을 이용하여 기존의 열처리 방식에 비해 에너지 전달 효율이 높고 짧은 시간동안 저온 공정이 가능하며 우수한 전기적인 특성을 가지는 투명 박막 트랜지스터를 구현 하였다. 본 실험은 glass 기판위에서 진행되었으며, RF sputter를 이용하여 ITO를 150 nm 증착한 후, photo-lithography 공정을 통하여 하부 게이트 전극을 형성하였다. 이후에 RF sputter를 이용하여 SiO2 와 IGZO 를 각각 300, 50 nm 증착하였고, patterning 과정을 통하여 채널 영역을 형성하였다. 또한 소자의 전기적인 특성 향상을 위해 마이크로웨이브 열처리를 1000 Watt로 2 분간 진행 하였고, 비교를 위하여 기존 방식인 furnace 를 이용하여 N2 분위기에서 $400^{\circ}C$로 30분간 진행한 소자도 병행하였다. 그 결과 마이크로웨이브를 통해 열처리한 소자는 공정 온도가 $100^{\circ}C$ 이하로 낮기 때문에 glass 기판에 영향을 주지 않고 기존 furnace 열처리 한 소자보다 전체적으로 전기적인 특성이 우수한 것을 확인 하였다.

• 한국진공학회지
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• 제6권4호
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• pp.326-336
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• 1997

트랜지스터의 소오스/드레인 접합 특성에 가장 큰 영향을 미치는 인자는 이온 주입 시 발생한 실리콘 내에 발생한 결합이라는 사실에 착안하여, 기존 소오스/드레인 접합 형성 공정과 다른 새로운 방식을 도입하여 이온 주입에 의해 생긴 결함의 제어를 통해 고품질 초 저접합 $p^+$-n접합을 형성하였다. 기존의 $p^+$소오스/드레인 접합 형성 공정은 $^{49}BF_2^+$ 이온 주입 후 층간 절연막들인 TEOS(Tetra-Ethyl-Ortho-Silicate)막과 BPSG(Boro-Phospho-Silicate-Glass)막을 증착 후 BPSG막 평탄화를 위한 furnace annealing 공정으로 진행된다. 본 연구에서는 이러한 기존 공정과는 달리 층간 절연막 증착 전 저온 RTA첨가 방법, $^{49}BF_2^+$와 $^{11}B^+$ 을 혼합하여 이온 주입하는 방법, 그리고 이온 주입 후 잔류 산화막을 제거하고 MTO(Medium temperature CVD oxide)를 증착하는 방법을 제시하 였으며, 각각의 방법은 모두 이온 주입에 의한 실리콘 내 결합 농도를 줄여 기존의 방법보 다 더 우수한 양질의 초 저접합을 형성할 수 있었다.

• Fibers and Polymers
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• 제7권1호
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• pp.36-41
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• 2006

PVC and SAN are often mixed to compensate for the disadvantages of each polymer. Miscibility and thermal stability of PVC/SAN blend were investigated in this study by blending SAN polymer having 20, 24, 28, 32 % of acrylonitrile contents. Two polymers were mixed using a melt blending method with a single screw extruder. DSC thermogram was used to evaluate miscibility of the two polymers. SAN having 24 % of acrylonitrile showed the best miscibility with PVC. In order to evaluate degradation behavior, blended polymer was heat treated in DSC furnace and glass transition temperature was measured consecutively. Glass transition temperature increased continuously with annealing time due to degradation and cross-linking of polymer chains. Melt index of blended polymer was always higher than that of PVC.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 1999년도 추계 기술심포지움 논문집
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• pp.111-115
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• 1999

The $Li_2O-MgO-MgF_2-SiO_2$glasses with addition of $B_2O_3$ were investigated in order to make glass-ceramics for low temperature firing substrate. Glasses were made by melting at $1450^{\circ}C$ in the electronic furnace and crystallized at $750^{\circ}C$. After the crystallization, crystal phases and microstructure were observed. The crystal phases were polycrystalline of lithium boron fluorphlogopite and lithium fluorhectorite. The crystal shape was changed to grande type from needle type with the increase in $B_2O_3$ contents. Average particle size of the glass-ceramics aftar water swelling was $3.77{\mu}{\textrm}{m}$. The optimum sintering temperature and sintering shrinkage of the substrate were $900^{\circ}C$ and 13.4vol%, respectively.

• 한국응용과학기술학회지
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• 제25권1호
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• pp.15-22
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• 2008

The effects of fillers on the mechanical and thermal properties of glass/novolac composites have been studied. The matrix polymer and reinforcement were novolac type phenolic resin and milled glass fiber, respectively. Three different fillers, such as calcium carbonate, aluminum oxide, and wood powder were used for glass fiber reinforced plastic(GFRP) manufacture. Gravity, moisture content, tensile and flexural strength were measured to analyze the mechanical properties of GFRP and the final composites was burned in the electronic furnace at $1000^{\circ}C$ to confirm thermal properties GFRP containing aluminium oxide shows the highest thermal stability with 32% of weight loss at $1000^{\circ}C$ for one hour. GFRP containing calcium carbonate shows the maximum flexural strength (146 MPa), but that containing wood powder dose the highest tensile strength (65 MPa). Conclusively, we found that the characteristics of final composites strongly depend on several factors, such as types of materials, contents and chemical affinity of fillers. Therefore, it is very important to set up the combination of fillers for GFRP manufacturing to improve both mechanical and thermal properties at the same time.

• 한국세라믹학회지
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• 제43권2호
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• pp.136-141
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• 2006

The stabilizing behavior of heavy metals in the silicate glass containing Electric Arc Furnace dust (EAF dust) were studied by the Toxic Characterization Leaching Procedure (TCLP) test, and the change of crystalline phase and glass network structure were investigated as a function of EAF dust content added. The glass containing EAF dust of $30\;wt\%$ an oxygen/network former ratio(R) of $2\~3$ allowing a fairly stable network structure thus showed much lower heavy metal leaching concentration than that for containing EAF dust above $50\;wt\%$ at TCLP test. For the glass containing EAF dust $50\~60\;wt\%$, however, the R was over 3, which weakened the glass network structure and increased the heavy metals leachate. Adding the EAF dust to a glass decreased the degree of Si-O-Si symmetry and increased the number of non-bridging oxygen, which decreased the chemical durability of glasses. When the dust content in a glass was over $70\;wt\%$, the Zn and Fe ions reacted to form the spinel crystal rather than to bind to network structure of glass and leaching concentration of those ions from the specimen decreased, so the spinel phase could be attributed to lowering a heavy metal leaching.

• 대한전자공학회논문지SD
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• 제39권5호
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• pp.16-22
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• 2002

본 논문에서는 선비정질화 이온주입과 BPSG(boro-phosphosilicate glass)를 위한 FA(furnace anneal) 공정이 적용된 양질의 p/sup +/-n 박막 접합을 형성하는 공정 조건을 제시하였다. 단결정 실리콘 기판을 As과 Ge 이온으로 45keV와 3×10/sup 14/cm/sup -2/로 주입하여 선비정질화 하였으며, p형 이온으로는 BF₂ 이온을 20keV, 2×10/sup 15/cm/sup -2/로 주입하였다. 고온 열처리는 furnace와 급속 열처기로 수행하였으며, 급속 열처리 온도는 950∼1050℃이며 FA는 BPSG 공정을 위해 850℃/4O분간 수행하였다. 박막 접합의 특성을 고려하기 위해 접합깊이, 면저항 및 다이오드 누설 전류를 측정 ·분석하였다. Ge 이온으로 선비정질화 하였을 경우 As 이온보다 대부분의 접합 특성에서 우수한 결과를 나타내었다. Ge으로 선비정질화하고 1000℃의 RTA를 수행한 경우에 가장 양호한 특성을 나타내었으며, FA를 포함한 경우에는 RTA 1050℃+FA의 열처리 조건에서 Ge 이온으로 선비정질화 했을 때 면저항과 접합깊이의 곱 및 누설 전류에서 양호한 특성을 나타내었다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1091-1096
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• 2007

This paper describes the development of a small lens molding system for manufacturing the small lens like lens of a cellular phone, a small digital camera and so on. In order to manufacture a small lens, firstly, the raw material for lens with spherical shape should be manufactured by processing a glass, secondly, the mold inserted the raw material for lens should be heated till its molding temperature in the electric furnace, finally, the small lens is manufactured by applying the force using pressuring control system. In this paper, the small lens molding system with the function of force control and velocity control was developed. It is composed of a electric furnace and its temperature control system, a pressuring control system, a body, and so on. The temperature characteristic test of the electric furnace, and the force and velocity characteristic test of the pressuring control system were carried out. It was confirmed that the developed system had good functions for manufacturing a small lens.