Simultaneous Measurement of Geometrical Thickness and Refractive index of a Silicon Wafer by using Femtosecond Pulse Laser (펨토초 펄스 레이저를 이용한 실리콘 웨이퍼 두께 및 굴절률의 동시측정)
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- Proceedings of the Korean Society of Precision Engineering Conference
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- 2012.05a
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- pp.807-808
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- 2012