• 센서학회지
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• 제20권6호
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• pp.428-433
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• 2011

We report on the building of a micro sensor array based on typical semiconductor fabrication processes aimed at monitoring selectively a specific gas in ambient of other gases. Chemical sensors can be applied for an electronic nose and/or robots using this technique. Microsensor array was fabricated on the same chip using 0.6${\mu}m$ CMOS technology, and unique gas sensing patterns were obtained by principal component analysis from the array. $SnO_2$/Pt sensor for CO gas showed a high selectivity to buthane gas and humidity. $SnO_2$ sensor for hydrogen gas, however, showed a low selectivity to CO and buthane gas. We can obtain more distinguishable patterns that provide the small sensing deviation(the high seletivity) toward a given analyte in the response space than in the chemical space through the specific parameterization of raw data for chemical image formation.

• 대한기계학회논문집B
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• 제30권6호
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• pp.531-537
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• 2006

A lever type $NO_2$ micro gas sensor was fabricated by MEMS technology. In order to heat up the gas sensing material to a target temperature, a micro heater was built on the gas sensor. The sensing material laid on the heater and electrodes and did not contact with the silicon base to minimize the heat loss to the silicon base. The electric power to heat up the gas sensor to a target temperature was measured. The temperature distribution of micro gas sensor was analyzed by a CFD program. The predicted electric power of micro heater to heat up the sensing material to the target temperature showed a good agreement with the measured data. The design of micro gas sensor could be modified to show more uniform temperature distribution and to consume less electric power by optimizing the layout of micro heater and electrodes.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제55권5호
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• pp.278-285
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• 2006

A micro hotplate for micro gas sensor was fabricated by MEMS technology. In order to heat up the gas sensing material to a target temperature, a micro hotplate was built on the gas sensor. The sensing material was deposited on the heater and electrodes, and did not contact with the silicon base to minimize the heat loss to the silicon base. The electric power to heat up the gas sensor was measured. The temperature distribution of micro gas sensor was analyzed by a CFD program. The predicted electric power to heat up th sensing material showed a good agreement with the measured data. The design of micro gas sensor could be modified to increase the temperature uniformity and to decrease the electric power consumption by optimizing the layout of micro hotplate and electrodes.

• 전기전자학회논문지
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• 제23권3호
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• pp.1033-1037
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• 2019

GaN-based sensors have been widely investigated thanks to its potential in detecting the presence of hydrogen. In this study, we fabricated hydrogen gas sensors with AlGaN/GaN heterojunction and investigated how the sensing performance to be affected by SiN surface passivation. The gas sensor employed a high electron mobility transistors (HEMTs) with 30 nm platinum catalyst as a gate to detect the hydrogen presence. SiN layer was deposited by inductively-coupled chemical vapor deposition as post-passivation. The sensors with SiN passivation exhibited hydrogen sensing characteristics with various gas flow rates and concentrations of hydrogen in inert background gas at $200^{\circ}C$ similar to the ones without passivation. Aside from quick response time for both sensors, there are differences in sensitivity and recovery time because of the existence of the passivation layer. The results also confirmed the dependence of sensing performance on gas flow rate and gas concentration.

• 한국표면공학회지
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• 제47권6호
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• pp.297-302
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• 2014

ZnS nanowires were synthesized in order to investigate $NO_2$ gas sensing properties. They were grown on the sapphire substrate using ZnS powders. SEM (scanning electron microscopy) showed the diameter and length of the ZnS nanowires were approximately in the range of 50 - 100 nm and a few $10s\;{\mu}m$, respectively. They were also found to be composed of Wurtzite- structured single crystals from TEM (transmission electron microscopy) analysis. $NO_2$ gas sensing performance of the ZnS nanowire was measured with electrical resistance changes caused by $NO_2$ gas with a concentration of 1-5ppm. The sensor was UV treated with an intensity of $1.2mW/cm^2$ to facilitate charge carrier transfer. The responses of the ZnS nanowires to the $NO_2$ gas at room temperature, treated with UV of two different wavelengths of 365 nm and 254 nm, are measured to be 124.53 - 206.87 % and 233.97 - 554.83%, respectively. In the current work, the effect of UV treatment on the gas sensing performance of the ZnS nanowires was studied. And the underlying mechanism for the electrical resistance changes of the ZnS nanowires by $NO_2$ gas was also discussed.

• 한국재료학회지
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• 제22권5호
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• pp.237-242
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• 2012

We report on the NO gas sensing properties of Al-doped zinc oxide-carbon nanotube (ZnO-CNT) wire-like layered composites fabricated by coaxially coating Al-doped ZnO thin films on randomly oriented single-walled carbon nanotubes. We were able to wrap thin ZnO layers around the CNTs using the pulsed laser deposition method, forming wire-like nanostructures of ZnO-CNT. Microstructural observations revealed an ultrathin wire-like structure with a diameter of several tens of nm. Gas sensors based on ZnO-CNT wire-like layered composites were found to exhibit a novel sensing capability that originated from the genuine characteristics of the composites. Specifically, it was observed by measured gas sensing characteristics that the gas sensors based on ZnO-CNT layered composites showed a very high sensitivity of above 1,500% for NO gas in dry air at an optimal operating temperature of $200^{\circ}C$; the sensors also showed a low NO gas detection limit at a sub-ppm level in dry air. The enhanced gas sensing properties of the ZnO-CNT wire-like layered composites are ascribed to a catalytic effect of Al elements on the surface reaction and an increase in the effective surface reaction area of the active ZnO layer due to the coating of CNT templates with a higher surface-to-volume ratio structure. These results suggest that ZnO-CNT composites made of ultrathin Al-doped ZnO layers uniformly coated around carbon nanotubes can be promising materials for use in practical high-performance NO gas sensors.

• 마이크로전자및패키징학회지
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• 제6권2호
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• pp.63-68
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• 1999

가스 감지막의 미세구조와 비화학량론 구조의 변화에 따른 응답특성의 거동을 고찰하기 위하여 소성 조건을 변화시키면서 $WO_3$후막형 가스센서를 제조하였다. 소자는 감지물질인 $WO_3$분말과 유기 용제를 균일하게 혼합한 페이스트를 Au전극과 $RuO_2$발열체가 입혀진 알루미나 기판 위에 스크린 프린팅 방법으로 제조하였다. 소성 조건을 변화시키기 위하여 600-$800^{\circ}C$ 온도범위하에서 1시간 동안 열처리 하였고, Ar과 $O_2$가스의 비율을 변화시키면서 $700^{\circ}C$에서 1시간 재열처리하였다. 열처리 결과, 소성 온도 $700^{\circ}C$에서 제조된 $WO_3$가스센서 소자가 가스감도 210, 응답속도 2초로 가장 좋은 특성을 보였으며 Ar과 $O_2$가스의 비율이 40-50%의 소성 분위기에서 가스 감도가 가장 높게 나타났다.

• 한국재료학회지
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• 제6권7호
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• pp.716-722
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• 1996

박막 형 가스 센서의 막 두께가 가스 감지 특성에 미치는 영향을 단순화된 모델로부터 수식으로 유도하여 해석하였고, 그것을 ${SnO}_{2}$와 CuO-${SnO}_{2}$ 박막의 ${H}_{2}S$ 감응 특성에 대한 실험 결과에 적용하였다. 유도된 수식으로부터 박막 가스 센서의 가스 감지 특성은 가스의 박막 안으로의 확산성에 크게 의존하며, 그 가스 확산성은 박막의 두께, 가스의 센서 재료의 반응성, 작동 온도 등에 의해서 결정됨을 알 수 있었다. 또한 이 수식은 CuO-${SnO}_{2}$ 박막의 ${H}_{2}S$ 감응 특성에 대한 실험 결과와 비교적 잘 일치하였고, CuO-${SnO}_{2}$ 박막과 ${SnO}_{2}$ 박막의 서로 판이한 ${H}_{2}S$ 감응 특성에 대한 설명에 적용되었다. 이로부터, 일반적인 산화물 반도체식 가스 센서의 가스 감지 특성이 가스 확산성에 의해서 어떻게 지배되는가를 구체적으로 제안하였다.

• 한국재료학회지
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• 제32권10호
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• pp.435-441
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• 2022

We report the synthesis and gas sensing properties of bare and ZnO decorated TeO₂ nanowires (NWs). A catalyst assisted-vapor-liquid-solid (VLS) growth method was used to synthesize TeO₂ NWs and ZnO decoration was performed using an Au-catalyst assisted-VLS growth method followed by a subsequent heat treatment. Structural and morphological analyses using X-ray diffraction (XRD) and scanning/transmission electron microscopies, respectively, demonstrated the formation of bare and ZnO decorated TeO₂ NWs with desired phase and morphology. NO₂ gas sensing studies were performed at different temperatures ranging from 50 to 400 ℃ towards 50 ppm NO₂ gas. The results obtained showed that both sensors had their best optimal sensing temperature at 350 ℃, while ZnO decorated TeO₂ NWs sensor showed much better sensitivity towards NO₂ relative to a bare TeO₂ NWs gas sensor. The reason for the enhanced sensing performance of the ZnO decorated TeO₂ NWs sensor was attributed to the formation of ZnO (n)/ TeO₂ (p) heterojunctions and the high intrinsic gas sensing properties of ZnO.

• 한국재료학회지
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• 제18권12호
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• pp.655-659
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• 2008

The NO gas sensing properties of ZnO-carbon nanotube (ZnO-CNT) composites fabricated by the coaxial coating of single-walled CNTs with ZnO were investigated using pulsed laser deposition. Upon examination, the morphology and crystallinity of the ZnO-CNT composites showed that CNTs were uniformly coated with polycrystalline ZnO with a grain size as small as 5-10 nm. Gas sensing measurements clearly indicated a remarkable enhancement of the sensitivity of ZnO-CNT composites for NO gas compared to that of ZnO films while maintaining the strong sensing stability of the composites, properties that CNT-based sensing materials do not have. The enhanced gas sensing properties of the ZnO-CNT composites are attributed to an increase in the surface adsorption area of the ZnO layer via the coating by CNTs of a high surface-to-volume ratio structure. These results suggest that the ZnO-CNT composite is a promising template for novel solid-state semiconducting gas sensors.