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http://dx.doi.org/10.3795/KSME-B.2006.30.6.531

A Study of Thermal Performances for Micro Gas Sensor  

Joo Young-Cheol (순천향대학교 기계공학과)
Kim Chang-Kyo (순천향대학교 정보기술공학부)
Publication Information
Transactions of the Korean Society of Mechanical Engineers B / v.30, no.6, 2006 , pp. 531-537 More about this Journal
Abstract
A lever type $NO_2$ micro gas sensor was fabricated by MEMS technology. In order to heat up the gas sensing material to a target temperature, a micro heater was built on the gas sensor. The sensing material laid on the heater and electrodes and did not contact with the silicon base to minimize the heat loss to the silicon base. The electric power to heat up the gas sensor to a target temperature was measured. The temperature distribution of micro gas sensor was analyzed by a CFD program. The predicted electric power of micro heater to heat up the sensing material to the target temperature showed a good agreement with the measured data. The design of micro gas sensor could be modified to show more uniform temperature distribution and to consume less electric power by optimizing the layout of micro heater and electrodes.
Keywords
Gas Sensor; Heat Transfer; MEMS; Numerical Analysis;
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1 Low, H.M., Tse, M.S. and Chiu, M.M., 1998, 'Thermal Induced Stress on the Memberane in Integrated Gas Sensor with Micro-heater,' Electron Devices Meeting 1998, Hong Kong, 29 August, pp. 140-143
2 Hagen, K. D., 1999, Heat Transfer with Applications, Prentice Hall, pp. 337-371
3 Incropera, F. P. and DeWitt, D. P., 2002, Fundamentals of Heat and Mass Transfer, 5th ed., John Wiley and Sons
4 Ali, S.Z., Gonzalez, W., Gardner, J.W. and Udrea, F., 2004, 'Analysis of High Temperature SOI Microhotplates,' CAS 2004 Proceedings International Semiconductor Conference, Vol. 2, Sinai, Romania, 4-6, October, pp. 351-354   DOI
5 Sayago, I., Gutierre, J., Ares, L., RobIa, J. I., Horrillo, M. C., Getino, J., Rino, J. and Agapito, J. A., 1995, 'The Effect of Additive in Tin Oxide on the Sensitivity and Selectivity to $NO_x$ and CO,' .Sensors and Actuators B, Vol. 26-27, pp. 19-23   DOI   ScienceOn
6 Cantalini, C., Valentini, L., Lozzi, L., Armentano, I., Kenny, J. M. and Santucci, S.; 2003, '$NO_2$ Gas Sensitivity of Carbon Nanotubes Obtained by Plasma' Enhanced Chemical Vapor Deposition,' Sensors and Actuators B, Vol. 93, pp. 333-337   DOI   ScienceOn
7 Cardinali, G.C., Dori, L., Fiorini, M., Maccagnani, P. and Liberali, V., 1997, 'An Integrated Microstructure with Temperature Control for Gas Sensors,' 21st International Conference on Microelectronics, Vol. 2, Nis, Yugoslavia, 14-17, September, pp. 515-518   DOI
8 Dernirci, T., Guney, D., Bozkurt, A. and Gurbuz, Y., 2001, 'Electro-thermal Simulations and Modeling of Micromachined Gas Sensor,' Microelectromechanical System Conference 2001, Berkeley, California, U.S.A., 24-26 August, pp. 99-102   DOI
9 Bechtold, T., Hildenbrand, J., Wollenstein, J., and Korvink, J.G., 2004, 'Model Order Reduction of 3D Electro-thermal Model for a Novel Micromachined Hotplate Gas Sensor,' 5th Int. Conf. on Thermal and Mechanical Simulation and Experiments in Micro-electronics and MicroSystems, EuroSimE2004, Brusseles, Belgium, 10-12 May, pp. 263-267   DOI
10 Wollenstein, J., Plaza, J. A, Cane, C., Min, Y., Bottner, H. and Tuller, H. L., 2003, 'A Novel Single Chip Thin Film Metal Oxide Array,' Sensors and Actuators B, Vol. 93, pp. 350-355   DOI   ScienceOn
11 Miura, N., Honishi, H., Matsumoto, T. and Ippomatsu, M., 1993, 'Development of High-performance Solid-electrolyte Sensors for NO and $NO_2$,' Sensors and Actuators B, Vol. 13-14, pp. 387-390   DOI   ScienceOn