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A Study on Thermal Performances of Micro Gas Sensor with Micro Hotplate  

Joo, Young-Cheol (순천향대학교 기계공학과)
Im, Jun-Hyoung (순천향대학교 기계공학과)
Lee, Joon-Hun (순천향대학교 정보기술공학부)
Kim, C.K. (순천향대학교 정보기술공학부)
Publication Information
The Transactions of the Korean Institute of Electrical Engineers C / v.55, no.5, 2006 , pp. 278-285 More about this Journal
Abstract
A micro hotplate for micro gas sensor was fabricated by MEMS technology. In order to heat up the gas sensing material to a target temperature, a micro hotplate was built on the gas sensor. The sensing material was deposited on the heater and electrodes, and did not contact with the silicon base to minimize the heat loss to the silicon base. The electric power to heat up the gas sensor was measured. The temperature distribution of micro gas sensor was analyzed by a CFD program. The predicted electric power to heat up th sensing material showed a good agreement with the measured data. The design of micro gas sensor could be modified to increase the temperature uniformity and to decrease the electric power consumption by optimizing the layout of micro hotplate and electrodes.
Keywords
Gas Sensor; Heat Transfer; MEMS; Micro Hotplate; Numerical Analysis;
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