• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.262.2-262.2
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• 2014

Plasma processing is an essential process for pattern etching and thin film deposition in nanoscale semiconductor device fabrication. It is necessary to maintain plasma chamber in steady-state in production. In this study, we determined plasma chamber state with residual gas analysis with self-plasma optical emission spectroscopy. Residual gas monitoring of fluorocarbon plasma etching chamber was performed with self-plasma optical emission spectroscopy (SPOES) and various chemical elements was identified with a SPOES system which is composed of small inductive coupled plasma chamber for glow discharge and optical emission spectroscopy monitoring system for measuring optical emission. This work demonstrates that chamber state can be monitored with SPOES and this technique can potentially help maintenance in production lines.

• Journal of information and communication convergence engineering
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• v.9 no.4
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• pp.401-404
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• 2011

Considerations for green house gas (GHG) monitoring over next generation network (NGN) are regarded as a green convergence service for the successful reduction of GHG emission leading to resolve global warming issue in that NGN is expected to provide secure connections to fixed-and-mobile converged (FMC) features. Model-based scenario approach is an appropriate way to standardize and actualize the desired service. This paper first describes the service scenario of GHG monitoring service over NGN.

• Archives of Pharmacal Research
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• v.15 no.2
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• pp.109-114
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• 1992

For the risk assessment of human exposure to volatile halogenated hydrocarbons, a dynamic purge trap/on-column cryofocusing method using capillary gas chromatograph-$^{63}Ni$ electron capture detector and thermal desorption unit was applied to analyze the free forms, metabolites of 1, 1, 2-trichloroethylene and 1, 1, 2, 2-tetrachloroethylene. The urine sample was diluted with distilled water, hydrolyzed and sealed. Then the inert gas was infused to purge out free 1, 1, 2-trichloroethylene, free 1, 1, 2, 2-tetrachloroethylene and urichloroethanol. These compounds were trapped to $Tenax^R$ / GC-gas trap device throughout clean up tube. Being undertectable to gas chromatograph directly, trichloroacetic acid was methyl esterificated and trapped in the manner above mentioned. The optimal incubation time to get best recovery of methyl ester was 4 hours at $60^circ$C. The concentrations of free volatile halogenated hydrocarbons and their metabolites in urine were obtained of free volatile halogenated hydrocarbons and their metabolites in urine were obtained from 5 healthy volunteers. This analytical method is expected to make the biological monitoring more precise and convenient.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2008.03a
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• pp.84-88
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• 2008

The UAV propulsion system that will be operated for long time at more than 40,000ft altitude should have not only fuel flow minimization but also high reliability and durability. If this UAV propulsion system may have faults, it is not easy to recover the system from the abnormal, and hence an accurate diagnostic technology must be needed to keep the operational reliability. For this purpose, the development of the health monitoring system which can monitor remotely the engine condition should be required. In this study, a fuzzy trend monitoring method for detecting the engine faults including mechanical faults was proposed through analyzing performance trends of measurement data. The trend monitoring is an engine conditioning method which can find engine faults by monitoring important measuring parameters such as fuel flow, exhaust gas temperatures, rotational speeds, vibration and etc. Using engine condition database as an input to be generated by linear regression analysis of real engine instrument data, an application of the fuzzy logic in diagnostics estimated the cause of fault in each component. According to study results, it was confirmed that the proposed trend monitoring method can improve reliability and durability of the propulsion system for a long endurance UAV to be operated at medium altitude.

• Journal of Sensor Science and Technology
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• v.32 no.2
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• pp.75-81
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• 2023

The significance of gas sensors has been emphasized in various industries and applications, owing to the growing significance of environmental, social, and governance (ESG) management in corporate operations. In particular, the monitoring of hazardous gas leakages and detection of fugitive emissions have recently garnered significant attention across several industrial sectors. As industrial workplaces evolve to ensure the safety of their working environments and reduce greenhouse gas emissions, the demand for high-performance gas sensors in industrial sectors dealing with toxic substances is on the rise. However, conventional gas-sensing systems have limitations in monitoring fugitive gas leakages at both critical and subcritical concentrations in complex environments. To overcome these difficulties, recent studies in the field of gas sensors have employed techniques such as mobile robotic olfaction, remote optical sensing, chemical grid sensing, and remote acoustic sensing. This review highlights the significant progress made in various technologies that have enabled accurate and real-time mapping of gas distribution and localization of hazardous gas sources. These recent advancements in gas-sensing technology have shed light on the future role of gas-detection systems in industrial safety.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.29 no.6
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• pp.306-315
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• 2017

This study introduces a software for real-time assessment of combustion stability for utility gas turbines. The software was written with LabView, and implemented the time-domain kurtosis as a parameter to proactively access the instantaneous combustion stability during operation of the industrial gas turbine. The simple time-domain assessment algorithm incorporated in the software is advantageous over conventional frequency-domain signal processing of dynamic pressure signal since it reduces the computational cost, thereby making the algorithm more appropriate for real-time monitoring of combustion stability. Benchmark data obtained from a model gas turbine combustor were used for the reproducibility test of the software. The assessment obtained from the software agreed well with previously published results, indicating that incorporation of the software could enhance the performance of systems monitoring the combustion stability for gas turbines during power generation.

• Journal of the Korean Institute of Gas
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• v.22 no.6
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• pp.8-15
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• 2018

worker-centered safety management for hazardous areas in the plant is required. The causes of gas accidents in the past five years are closely related to the behavior of the operator, such as careless handling of the user, careless handling of the suppliers, and intentional, as well as equipment failure and accident of thought. In order to prevent such accidents, real-time monitoring of hazardous areas in the plant is required. However, when installing a camera in a work space for real-time monitoring, problems such as human rights abuse occur. In order to prevent this, an infrared camera with low resolution with low exposure of the operator is used. In real-time monitoring, image analysis is performed using CNN algorithm, not human, to prevent human rights violation.

• Journal of Institute of Control, Robotics and Systems
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• v.14 no.1
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• pp.49-53
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• 2008

A fuzzy inference logic system is proposed for gas turbine engine fault isolation. The gas path measurements used for fault isolation are exhaust gas temperature, low and high rotor speed, and fuel flow. The fuzzy inference logic uses rules developed from a model of performance influence coefficients to isolate engine faults while accounting for uncertainty in gas path measurements. Inputs to the fuzzy inference logic system are measurement deviations of gas path parameters which are transferred directly from the ECM(Engine Control Monitoring) program and outputs are engine module faults. The proposed fuzzy inference logic system is tested using simulated data developed from the ECM trend plot reports and the results show that the proposed fuzzy inference logic system isolates module faults with high accuracy rate in the environment of high level of uncertainty.

• Journal of the Korean Institute of Gas
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• v.15 no.6
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• pp.1-7
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• 2011

The Measurement of risk parameter in city-gas equipments have been measured and confirmed by human, and evolved into remote monitoring system using wireless communication. Furthermore, domestic and international industry increase the efficiency of management, which can develop remote monitoring and control system using wireless communication. However, Those wireless system might be decrease the efficiency and ease because of connecting PDA and lap-top using wire-cable when data have checked immediately from outside. This paper is able to improve efficiency of safety management on city-gas equipments by developing mobile city-gas safety management system on AR.

• Journal of the Korea Convergence Society
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• v.9 no.10
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• pp.61-67
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• 2018

This study covers the results obtained after three years of development work of real - time gas safety monitoring app. In order to reduce the risk of accidents in the gas workplace, it is essential to provide information so that operators can recognize the location of dangerous substances, dangerous facilities, safety procedures, and the temperature and humidity of the workplace. Therefore, this study was conducted to develop a monitoring app that allows the main system to efficiently receive the information in the field where the information is continuously updated. As a result of quantitative and qualitative research and analysis on app scenarios based on the research done in the past and web screen of the main system, it was modified and improved in terms of ease of use, readability, and intuitiveness. Especially, we made many improvements at low depth, which is a sub-area of ease of use. As a result of conducting a user satisfaction survey on the finally derived app scenarios, the average score of 98.5 was obtained in terms of functionality, convenience and readability.