• Title/Summary/Keyword: gas mass spectrometer

Search Result 225, Processing Time 0.023 seconds

Thermal CVD of Silica Thin Film by Organic Silane Compound (유기 실란화합물을 이용한 SiO2 박막의 열CVD)

  • Kim, Byung-Hoon;Ahn, Ho-Geun;Imaishi, Nobuyuki
    • Applied Chemistry for Engineering
    • /
    • v.10 no.7
    • /
    • pp.985-989
    • /
    • 1999
  • Silica($SiO_2$) thin film was synthesized by a low pressure metal organic chemical vapor deposition(LPMOCVD) using organic silane compound. Triethyl orthosilicate was used as a source material. Operation pressure was 1~100 torr at outlet of the reactor and deposition temperature was $600{\sim}900^{\circ}C$. The experimental results showed that the high reaction temperature and high source gas concentration led to higher growth rate of $SiO_2$. The step coverage of films on micro-scale trenches was fairly good, which resulted from the phenomena that the condensed oligomers flow into the trenches. We estimated a reaction path that the source gas polymerizes and produces oligomers (dimer, trimer, tetramer, etc.), which diffuse and condense on the solid surface. The chemical species in the gas phase at the outlet of reactor tube were analyzed by quadrapole mass spectrometer. The peaks, assigned to be monomer, dimer of source gas and geavier molecules, were observed at 650 or $700^{\circ}C$. At higher temperature($900^{\circ}C$), the peaks of the heavy molecules disappeared, because almost all the source gas and intermediate(polymerized oligomer) molecules were oxidized or condensed on colder tube wall.

  • PDF

A comparative analysis of volatile organic compound levels in field samples between different gas chromatographic approaches (분석기법의 차이에 따른 현장시료의 VOC 분석결과 비교연구: 분석오차의 발생 양상과 원인)

  • Ahn, Ji-Won;Pandey, Sudhir Kumar;Kim, Ki-Hyun
    • Analytical Science and Technology
    • /
    • v.23 no.5
    • /
    • pp.465-476
    • /
    • 2010
  • In this study, a number of volatile organic compounds (VOCs) including benzene, toluene, p-xylene, styrene, and methyl ethyl ketone were analyzed from samples collected in ambient air and under the field conditions. These samples were analyzed independently by two different set-ups for VOC analyses, i.e., between [1] gas chromatography/flame ionization detector with tube sampling - (F-T system) and [2] gas chromatography/mass spectrometer with bag sampling (M-B system). The analytical results derived by both systems showed fairly similar patterns in relative sense but with moderately large differences in absolute sense. The results of M-B system were high relative to F-T system with the F-T/M-B ratio below 1. If the relative biases of the two measurement techniques are derived in terms of percent difference (PD) in concentration values, the results were generally above 35% on average. A student t-test was applied to investigate the statistical significance of those differences between the systems. The results of both analytical systems were different at 95% confidence level for toluene, p-xylene, styrene, and methyl ethyl ketone (P < 0.043). However, F-T and M-B systems showed strong correlations for toluene and p-xylene. The observed bias is explained in large part by such factors as the differences in standard phases used for each system and the chemical loss inside the bag sampler.

A Study on the Emission of VOCs in Parking Lot Floor Coating (주차장 바닥 코팅제의 휘발성유기화합물 배출에 관한 연구)

  • Lee, Seung-Chan;Yoon, Gil-Ho;Park, Yong-Soon;Kil, Bae-Su;Yoon, Hyun-Do
    • Journal of the Korea institute for structural maintenance and inspection
    • /
    • v.23 no.4
    • /
    • pp.152-158
    • /
    • 2019
  • Measure the type and content of VOCs for A-company epoxy coating and B-company floor coating(Type A, B), which are used as flooring materials for parking lots. Than the VOCs used gas detectors to measure gas emissions, assuming the worst environment to reduce errors in external environments in the formaldehyde, toluene and xylene harmful to workers and tenants. As a result, A-company epoxy coating has the largest amount of VOCs, and compared to A-company epoxy coating, B-company floor coating of A type represented about 79% less and B type about 96% less. In addition, A-company epoxy coating was also the highest in gas emission measurement for formaldehyde, toluene and xylene using gas detector after 1 hour and 8 hours in closed environment conditions. B-company floor coating A type was less than A-company epoxy coating, which was about 42.3% less measured. And type B satisfied all TWA even in closed environment conditions.

Determination of geosmin and 2-MIB in Nakdong River using headspace solid phase microextraction and GC-MS (HS-SPME-GC/MS를 이용한 낙동강 수계 하천수 중 조류기원성 냄새물질 분석)

  • Lee, Injung;Lee, Kyoung-Lak;Lim, Tae-Hyo;Park, Jeong-Ja;Cheon, Seuk
    • Analytical Science and Technology
    • /
    • v.26 no.5
    • /
    • pp.326-332
    • /
    • 2013
  • Geosmin and 2-methylisoborneol (2-MIB) are volatile organic compounds responsible for the majority of unpleasant taste and odor events in drinking water. Geosmin and 2-MIB are byproducts of blue-green algae (cyanobacteria) with musty and earthy odors. These compounds have odor threshold concentration at ng/L levels. It is needed to develop a sensitive method for determination of geosmin and 2-MIB to control the quality of drinking water. In this study, geosmin and 2-MIB in water samples were determined by gas chromatography-mass spectrometry (GC-MS) with headspace-solid phase microextraction (HS-SMPE). The detection limits of this method were 1.072 ng/L and 1.021 ng/L for geosmin and 2-MIB, respectively. Good accuracy and precision was also obtained by this method. Concentrations of the two compounds were measured in raw waters from Nakdong River in the cyanobacterial blooming season. Water bloom formed by cyanobacteria has been occurred currently in Nakdong River. It is needed to investigate the concentrations of geosmin and 2-MIB to control the quality of drinking water from Nakdong River. Both geosmin and 2-MIB were detected in raw waters from Nakdong River at concentrations ranging from 4 to 24 ng/L and 6 to 16 ng/L, respectively.

Screening of GLA (γ-Linolenic Acid) from Fungi by Gas Chromatography and Mass Spectroscopy (Gas Chromatograph-Mass Spectrometer를 이용한 γ-Linolenic Acid(GLA) 생성 균주탐색 및 확인)

  • Kim, Jung-Bong;Kim, Kyung-Hwan;Hong, Seung-Beom;Park, Jong-Sug;Lee, Jong-Yeoul;Kim, Sam-Sun;Bae, Shin-Chul;Cho, Kang-Jin;Lee, Dong-Jin
    • The Korean Journal of Mycology
    • /
    • v.35 no.2
    • /
    • pp.96-100
    • /
    • 2007
  • In order to select ${\gamma}-Linolenic$ acid (GLA)-producing fungi, a total of forty-four strains of 4 genera such as Phytophthora, Pythium, Mucor and Rhizopus were obtained from Koran Agricultural Culture Collection (KACC) and then analysed by using GC-FID and GC-MS. GLA was detected on 39 fungal strains, and the highest rate of GLA was found as 24.8% of total fatty acids on Mucor hiemalis f. sp. hiemalis KACC 40264. Total GLA content of Zygomycota was comparatively high - Mucor (14.2%) and Rhizopus (14.3%), whereas that of Oomycetes was low - Phytophthora (3.3%) and Pythium (3.0%). Moreover, total fatty acids of the Zygomycota fungi such as Mucor (15.4 mg/100 ml) and Rhizopus (7.1 mg/100 ml) were higher compared with the Oomycetes such as Phytophthora (2.6 mg/100 ml) and Pythium (4.5 mg/100 ml). Thus, two genera such as Mucor and Rhizopus have higher potential as an useful microbial resource. The total fatty acid content varies even within the strains of the same genus e.g. Mucor. M. blumbeus KACC 40935 showed the highest values on productivity (18.2%) of GLA and total fatty acid contents (50.8 mg/100 ml liquid medium).

A Correlation Study between the Environmental, Personal Exposures and Biomarkers for Volatile Organic Compounds (대기 중 휘발성유기오염물질의 환경, 개인 및 인체 노출의 상관성 연구)

  • Jo, Seong-Joon;Shin, Dong-Chun;Chung, Yong;Breysse, Patrick N.
    • Environmental Analysis Health and Toxicology
    • /
    • v.17 no.3
    • /
    • pp.197-205
    • /
    • 2002
  • Volatile organic compounds (VOCs) are an important public health problem throughout the world. Many important questions remain to be addressed in assessing exposure to these compounds. Because they are ubiquitous and highly volatile, special techniques must be applied in the analytical determination of VOCs. Personal exposure measurements are needed to evaluate the relationship between microenvironmental concentrations and actual exposures. It is also important to investigate exposure frequency, duration, and intensity, as well as personal exposure characteristics. In addition to air monitoring, biological monitoring may contribute significantly to risk assessment by allowing estimation of absorbed doses, rather than just the external exposure concentrations, which are evaluated by environmental and personal monitoring. This study was conducted to establish the analytic procedure of VOCs in air, blood, urine and exhaled breath and to evaluate the relationships among these environmental media. The subjects of this study were selected because they are occupationally exposed to high levels of VOCs. Environmental, personal, blood, urine and exhalation samples were collected. Purge & trap, thermal desorber, gas chromatography and mass selective detector were used to analyze the collected samples. Analytical procedures were validated with the“break through test”, 'quot;recovery test for storage and transportation”,“method detection limit test”and“inter-laboratory QA/QC study”. Assessment of halogenated compounds indicted that they were significantly correlated to each other (p value < 0.01). In a similar manner, aromatic compounds were also correlated, except in urine sample. Linear regression was used to evaluate the relationships between personal exposures and environmental concentrations. These relationships for aromatic and halogenated are as follows: Halogen $s_{personal}$ = 3.875+0.068Halogen $s_{environmet}$, ($R^2$= .930) Aromatic $s_{personal}$ = 34217.757-31.266Aromatic $s_{environmet}$, ($R^2$= .821) Multiple regression was used to evaluate the relationship between exposures and various exposure deter-minants including, gender, duration of employment, and smoking history. The results of the regression model-ins for halogens in blood and aromatics in urine are as follows: Halogen $s_{blood}$ = 8.181+0.246Halogen $s_{personal}$+3.975Gender ($R^2$= .925), Aromatic $s_{urine}$ = 249.565+0.135Aromatic $s_{personal}$ -5.651 D.S ($R^2$ = .735), In conclusion, we have established analytic procedures for VOC measurement in biological and environmental samples and have presented data demonstrating relationships between VOCs levels in biological media and environmental samples. Abbreviation GC/MS, Gas Chromatography/Mass Spectrometer; VOCs, Volatile Organic Compounds; OVM, Organic Vapor Monitor; TO, Toxic Organicsapor Monitor; TO, Toxic Organics.

A Study on the etching mechanism of $CeO_2$ thin film by high density plasma (고밀도 플라즈마에 의한 $CeO_2$ 박막의 식각 메커니즘 연구)

  • Oh, Chang-Seok;Kim, Chang-Il
    • Journal of the Institute of Electronics Engineers of Korea SD
    • /
    • v.38 no.12
    • /
    • pp.8-13
    • /
    • 2001
  • Cerium oxide ($CeO_2$) thin film has been proposed as a buffer layer between the ferroelectric thin film and the Si substrate in Metal-Ferroelectric-Insulator-Silicon (MFIS) structures for ferroelectric random access memory (FRAM) applications. In this study, $CeO_2$ thin films were etched with $Cl_2$/Ar gas mixture in an inductively coupled plasma (ICP). Etch properties were measured for different gas mixing ratio of $Cl_2$($Cl_2$+Ar) while the other process conditions were fixed at RF power (600 W), dc bias voltage (-200 V), and chamber pressure (15 mTorr). The highest etch rate of $CeO_2$ thin film was 230 ${\AA}$/min and the selectivity of $CeO_2$ to $YMnO_3$ was 1.83 at $Cl_2$($Cl_2$+Ar gas mixing ratio of 0.2. The surface reaction of the etched $CeO_2$ thin films was investigated using x-ray photoelectron spectroscopy (XPS) analysis. There is a Ce-Cl bonding by chemical reaction between Ce and Cl. The results of secondary ion mass spectrometer (SIMS) analysis were compared with the results of XPS analysis and the Ce-Cl bonding was monitored at 176.15 (a.m.u). These results confirm that Ce atoms of $CeO_2$ thin films react with chlorine and a compound such as CeCl remains on the surface of etched $CeO_2$ thin films. These products can be removed by Ar ion bombardment.

  • PDF

Simultaneous determination of aromatic material causing allergic in children's products by Gas Chromatography (어린이 제품 중 가스 크로마토그래피를 이용한 알러지 유발 방향성 물질의 동시분석법)

  • Ko, Kyeong Mok;Rhu, Chan Joo;Kim, Jong Won;Lee, Seok Ki
    • Analytical Science and Technology
    • /
    • v.31 no.1
    • /
    • pp.23-30
    • /
    • 2018
  • Twenty-two allergy-induced aromatics in children were analyzed using a gas chromatography flame ionization detector (GC-FID) and gas chromatography mass spectrometer (GC-MSD). Analytes were extracted using an automatic Soxhlet extractor and centrifuged for 10 min in a fast freezing centrifuge, and the supernatant was transferred into a 2 mL vial and injected in split mode. Under the established conditions, the calibration curve showed linearity with a correlation coefficient of 0.996 or more. A wide range of sensitivity of 6.7 to 1,859,839 depending on the device characteristics and detector used was shown. The detection limit of the device was 0.0032 to $0.0335{\mu}g/mL$, and the maximum detection limit was less than $0.1{\mu}g/mL$. The detection limit of the method ranged from 0.0033 to $0.1161{\mu}g/mL$. In addition, the limit of quantification ranged from 0.0100 to $0.5422{\mu}g/mL$, with a level of precision ranging from 0.21 % to 4.89 % and a degree of accuracy ranging from 89 % to 111 %. The analytical method developed in this study was applied to commercial products.

Accumulation and Characterization of Polycyclic Aromatic Hydrocarbons in Seafood from the Coastal Areas of Korea

  • Moon Hyo-Bang;Choi Hee-Gu;Kim Sang-Soo;Lee Pil-Yong
    • Fisheries and Aquatic Sciences
    • /
    • v.5 no.2
    • /
    • pp.127-135
    • /
    • 2002
  • Twenty seafood samples, which are common edible species and commercially important items in Korea, were purchased at the local fisheries markets and were analyzed for polycyclic aromatic hydrocarbons (PAHs) using gas chromatography coupled to mass spectrometer detector (GC/MSD). The levels of sixteen PAHs in seafood from Korean coasts were 161 to 2,243 pg/g wet weight. The highest concentration was found at saury (Coloabis saira) and the lowest level was found at jacopever (Sebastes schlegeli). The concentrations of potentially carcinogenic PAHs of six species were in the range of 9 to 123 pg/g wet weight. The residues of PAHs in fishes from Korean coasts were slightly low or relatively moderate to other countries. There was no correlation between PAH residues and lipid contents in seafood samples. The predominant contributors in fish samples were lower-molecular-weight two and three ring aromatic PAHs such as naphthalene, acenaphthene, fluorene and phenanthrene. Filter-feeding organisms like shrimp, crab and topshell were dominated by three- and four-ring aromatic PAHs. The PAH profiles in marine sediments, bivalves, fishes, shrimp, crab and topshell according to exposure pathway were compared through factor analysis. The PAH profiles were clearly classified by the difference of species or environmental matrices. This result suggests that most of PAHs within the same samples behave identically in marine environment.

Study on Timely Characteristics of Forest Phytoncide in Ulsan Metropolitan Trails (시간변화에 따른 울산지역 산책로의 피톤치드 특성연구)

  • Park, Heung Jai;Yu, Bong Gwan;Park, Sun Ho;Lee, Jin Yeol;Hahm, Yoo Sik;Jeong, Seong Wook;Byeon, Ki Yeong;Lee, Hyun Hee;Choi, Seung Hoon;Son, Ji Min;Lee, Mi Lim
    • Journal of Environmental Science International
    • /
    • v.22 no.11
    • /
    • pp.1451-1456
    • /
    • 2013
  • This study was conducted to investigate the timely characteristics of phytoncide in forest trail of Ulsan Metropolitan. Air samples were collected from July to October 2011. The phytoncide were detected and quantified using a Gas Chromatograph Mass Spectrometer(GC/MSD). This study are summarized as follows ; The highest levels of phytoncide concentration of August is higher than other months in Munsu Mt. and Samho Mt.(town mountains). The higher phytoncide emission rates found in the morning and in the evening. The concentration of phytoncide was understanded to be greatly influenced by environment change of day time.