Selective Chemical Vapor Deposition of $\beta$ -SiC on Si Substrate Using Hexamethyldisilane/HCl/$H_2$ Gas System
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- 한국결정성장학회:학술대회논문집
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- 한국결정성장학회 1998년도 PROCEEDINGS OF THE 15TH KACG TECHNICAL MEETING-PACIFIC RIM 3 SATELLITE SYMPOSIUM SESSION 4, HOTEL HYUNDAI, KYONGJU, SEPTEMBER 20-23, 1998
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- pp.91-95
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- 1998