• Title/Summary/Keyword: gas laser

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Visualization of Laser-Produced, Xe Gas Plasma in EUV Light Sources for the Lithography (EUV 리소그라피 광원용 레이저 생성 Xe 가스 플라즈마의 가시화)

  • Jin Yun-Sik;Jeong Sun-Sin;Kim Jong-Uk;Kim Chang-Beom;Kim Yong-Ju
    • Proceedings of the Optical Society of Korea Conference
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    • 2002.07a
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    • pp.106-107
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    • 2002
  • Extreme ultraviolet (EUV) radiation of wavelength $\lambda$~10 nm or photon energy hv~100 eV is presently a blank region in the electromagnetic spectrum where applications are concerned. This is because no powerful sources were available until when intense-laser-produced plasmas are available. Both a new laboratory-sized source of EUV radiation and its new applications in lithography of semiconductor devices have been developed. (omitted)

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Process Control of Gas Metal Arc Welding Using Neural Network (신경회로망을 이용한 GMA 용접의 공정제어)

  • 조만호;양상민;조택동;김옥현
    • Proceedings of the KWS Conference
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    • 2002.05a
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    • pp.68-70
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    • 2002
  • A CCD camera with a laser strip was applied to realize the automation of welding process in GMAW. The Hough transformation was used to extract the laser stripe and to obtain specific weld points. In this study, a neural network based on the generalized delta rule algorithm was adapted for the process control of GMA, such as welding speed, arc voltage and wire feeding speed.

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Improving the efficiency in discharge pumped excimer laser (방전여기 엑시머 레이저의 고효율화 방안)

  • Lee Young-Woo
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2006.05a
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    • pp.368-370
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    • 2006
  • 자외선영역에서 발진하는 엑시머 레이저 장치의 가스 장수명화에 의한 고효율화 방안을 제안하였다. 가스수명에 대하여 불소$(F_2)$의 감소와 불순물 발생에 의한 출력 변화의 이론적 해석 결과를 보고한다.

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Nanophase Iron Clusters Produced by CO₂Laser Multiphoton-Decomposition of $Fe(CO)_5$ : Their Generation and Characterization

  • Lee, G. H.;Huh, S. H.;Jung, H. I.
    • Bulletin of the Korean Chemical Society
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    • v.17 no.8
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    • pp.686-688
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    • 1996
  • We have produced nanophase iron clusters inside a gas cell by decomposing iron pentacarbonyls from the mixture of ~20 Torr Fe(CO)5/~3 Torr SF6 with a pulsed CO2 laser. The product displayed a black tint. Its composition was identified to be mostly iron from an inductively coupled plasma (ICP) atomic emission spectrum. The X-ray diffraction (XRD) pattern indicates a body-centered cubic structure for the cluster. A transmission electron micrograph proves that their diameter ranges between 50 and 70 Å and their average diameter is 60 Å.

A study on development of plasma-arc cutting system with computer-numerical control (컴퓨터수치제어(CNC) 플라즈마 아아크 절단장치 개발에 관한 연구)

  • 노태정;나석주;나규환
    • Journal of Welding and Joining
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    • v.8 no.3
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    • pp.60-69
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    • 1990
  • Plasma arc cutting is a fusion cutting process in which a gas-constricted arc is employed to produce a high-temperature, high-velocity plasma jet on the workpiece. This process provides some advantages such as increased cutting velocity, excellent working accuracy and the ability to cut special materials (widely used stainless steels and Al-alloys, for example), when compared with iconventional oxyfuel gas cutting. From the view point of price and reliability of the power source, plasma arc cutting has also some distinct advantages over laser beam cutting. High-speed machines with NC or CNC systems are needed for the plasma arc or laser beam cutting process, while for oxyfuel gas cutting, low-speed machines with copying templates or optical-shape tracking sensors can be applied. The low price and high flexibility of the microprocessor arc contributing more and more the application of CNC system in the plasma arc cutting process, as in other manufacturing fields. From these points of view, a microprocessor-based plasma arc cutting system was developed by using a reference-pulse system, and its performance was tested. The interpolating routines were programmed in the assembly language for saving the memory volume and improving the compouting speed, which has an intimate relationship with the available cutting velocity.

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A Study on the Characteristics of Laser Deposition Surface and Cross-section for Metal Powder (금속 분말의 레이저 적층 시 표면 및 단면 특성에 관한 연구)

  • Hwang, Jun-Ho;Shin, Seong-Seon;Jung, Gu-In;Kim, Sung-Wook;Kim, Hyun-Deok
    • Journal of Welding and Joining
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    • v.34 no.4
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    • pp.17-22
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    • 2016
  • In this study, we compared the physical and chemical properties evaluation for each size in the SUS316L metal powder produced by water atomization and gas atomization. and we analyzed the experimental data in order to find the basis of a suitable metal powder (SUS316L) for DED (Direct Energy Deposition) processing. Also it evaluated the properties of each layered surface and cross section according to the number of deposition and deposition speed. In the result of optical microscopy measurements, the metal powder by water atomization was the crack generated between the deposition layer, the deposition layer was poor quality. However, metal powder by gas atomization was obtained a relatively good deposition results than metal powder by water atomization.

Three-dimensional accuracy of different correction methods for cast implant bars

  • Kwon, Ji-Yung;Kim, Chang-Whe;Lim, Young-Jun;Kwon, Ho-Beom;Kim, Myung-Joo
    • The Journal of Advanced Prosthodontics
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    • v.6 no.1
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    • pp.39-45
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    • 2014
  • PURPOSE. The aim of the present study was to evaluate the accuracy of three techniques for correction of cast implant bars. MATERIALS AND METHODS. Thirty cast implant bars were fabricated on a metal master model. All cast implant bars were sectioned at 5 mm from the left gold cylinder using a disk of 0.3 mm thickness, and then each group of ten specimens was corrected by gas-air torch soldering, laser welding, and additional casting technique. Three dimensional evaluation including horizontal, vertical, and twisting measurements was based on measurement and comparison of (1) gap distances of the right abutment replica-gold cylinder interface at buccal, distal, lingual side, (2) changes of bar length, and (3) axis angle changes of the right gold cylinders at the step of the post-correction measurements on the three groups with a contact and non-contact coordinate measuring machine. One-way analysis of variance (ANOVA) and paired t-test were performed at the significance level of 5%. RESULTS. Gap distances of the cast implant bars after correction procedure showed no statistically significant difference among groups. Changes in bar length between pre-casting and post-correction measurement were statistically significance among groups. Axis angle changes of the right gold cylinders were not statistically significance among groups. CONCLUSION. There was no statistical significance among three techniques in horizontal, vertical and axial errors. But, gas-air torch soldering technique showed the most consistent and accurate trend in the correction of implant bar error. However, Laser welding technique, showed a large mean and standard deviation in vertical and twisting measurement and might be technique-sensitive method.

Pulse Stretching Effect in XeCl Excimer Laser (XeCl 엑시머 레이저에서의 Pulse Stretching 효과)

  • Chu, Hong;Kim, Dong-Hwan;Lee, Soo-Man;John, Young-Min;Choi, Sang-Sam;Park, Dae-Yoon
    • Korean Journal of Optics and Photonics
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    • v.4 no.4
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    • pp.447-451
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    • 1993
  • Long pulse XeCl excimer laser with 150 ns (FWHM) pulse duration is developed using a simple capacitor-charge transfer circuit. We measured the laser pulse width varying the gas mixture ratio and capacitance ratio, which dominantly affect the pulse width. In this way we can easily stretch the pulse width from short pulse to long pulse. The pulse width was stretched by 120 ns as the partial pressure of HC1 and Xe gas was reduced under constant gas mixture ratio ([Xe]/[HCl]= 15), and by varying the capacitance ratio (Cm/Cp) under fixed pressure, the pulse width was stretched by 60 ns.

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Laser absorption spectroscopy of ternary gas mixture of He-Ne-Xe in External Electrode Fluorescent Lamp (EEFL) (레이저 흡수 분광법을 이용한 He-Ne-Xe 상종가스의 외부전곡 램프의 $1s_4$ 공명준위와 $1s_5$ 준안정준위의 제논 원자 밀도에 대한 연구)

  • Jeong, S.H.;Oh, P.Y.;Lee, J.H.;Cho, G.S.;Choi, E.H.
    • Journal of the Korean Vacuum Society
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    • v.15 no.6
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    • pp.576-580
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    • 2006
  • Mercury-free lamp, external electrode fluorescent lamp (EEFL) which includes the xenon gas, is now going on the research for the replacement of mercury lamp. The densities of excited xenon atom in the $1s_4$ resonance state and the $1s_5$ metastable state are investigated in the EEFL by a laser absorption spectroscopy under various gas pressures. We have measured the absorption signals for both $1s_4$ resonance and the $1s_5$ metastable state in the EEFL by varying the discharge currents for a given pressure. This basic absorption characteristic is very important for improvement of the VUV luminous efficiency of the EEFL as well as plasma display panel.