• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.10
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• pp.1406-1418
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• 2002

The direct simulation Monte Carlo(DSMC) method is employed to calculate the etch rate on Al wafer. The etchant is assumed to be Cl$_2$. The etching process of an Al wafer in a helicon plasma etcher is examined by simulating molecular collisions of reactant and product. The flow field inside a plasma etch reactor is also simulated by the DSMC method fur a chlorine feed gas flow. The surface reaction on the Al wafer is simply modelled by one-step reaction: 3C1$_2$+2Allongrightarrow1 2AIC1$_3$. The gas flow inside the reactor is compared for six different nozzle locations. It is found that the flow field inside the reactor is affected by the nozzle locations. The Cl$_2$ number density on the wafer decreases as the nozzle location moves toward the side of the reactor. Also, the present numerical results show that the nozzle location 1, which is at the top of the reactor chamber, produces a higher etch rate.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.4
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• pp.305-310
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• 2008

Deep trench etching of silicon was investigated as a function of RF source power, DC bias voltage, $C_4F_8$ gas flow rate, and $O_2$ gas addition. On increasing the RF source power from 300 W to 700 W, the etch rate was increased from $3.52{\mu}m/min$ to $7.07{\mu}m/min$. The addition of $O_2$ gas improved the etch rate and the selectivity. The highest etch rate is achieved at the $O_2$ gas addition of 12 %, The selectivity to PR was 65.75 with $O_2$ gas addition of 24 %. At DC bias voltage of -40 V and $C_4F_8$ gas flow rate of 30 seem, We were able to achieve etch rate as high as $5.25{\mu}m/min$ with good etch profile.

• Nuclear Engineering and Technology
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• v.13 no.3
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• pp.121-129
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• 1981

Three most outstanding maximum flow rate formulas are identified from many existing models. Outlines of the three limiting mass flow rate models are given along with computational procedures to estimate approximate amount of fission products released from a containment to environment for a given characteristic hole size for containment-isolation failure and containment pressure and temperature under a loss of coolant accident. Sample calculations are performed using the critical ideal gas flow rate model and the Moody's graphs for the maximum two-phase flow rates, and the results are compared with the values obtained from the mass leakage rate formula of CONTEMPT-LT code for converging nozzle and sonic flow. It is shown that the critical ideal gas flow rate formula gives almost comparable results as one can obtain from the Moody's model. It is also found that a more conservative approach to estimate leakage rate from a containment under a LOCA is to use the maximum ideal gas flow rate equation rather than tile mass leakage rate formula of CONTEMPT-LT.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.27 no.10
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• pp.520-526
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• 2015

The characteristics of gas-liquid Taylor (Slug) flow in a square micro-channel of $600{\sim}600{{\mu}m}$ were investigated experimentally in this paper. The test fluids were nitrogen and water. The liquid and gas superficial velocities were 0.01~3 m/s and 0.1~3 m/s, respectively. Bubble and liquid slug length, bubble velocity, and frequency were measured by analyzing optical images using a high speed camera. Bubble length decreased with higher liquid flow rate, which increased dramatically with higher gas flow rate. However, slug length did not vary with changes in inlet liquid conditions. Additionally, bubble velocities and frequencies increased with higher liquid and gas flow rates. It was found that measured bubble lengths were in good agreement with the empirical models in the existing literature, but slug lengths were not.

• Analytical Science and Technology
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• v.8 no.1
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• pp.69-77
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• 1995

The instrumentation and operating characteristics of a gas-jet assisted radio frequency glow discharge atomic absorption spectrometry(RF-GDAAS) are studied. The roles of discharge power, pressure as well as gas flow rate on the sample loss rate and absorbance are described in this paper. Results show that the optimum discharge conditions depend on pressure and discharge power as well as on the gas flow rate. The gas flow rate plays as an important parameter in RF-GDAAS. Absorbance increases as the gas flow rate increase up to 600ml/min., and the optimum absorbance is obtained at the pressure of 3 mbar. The absorbance increases when the discharge power increases as expected, however, the instability of the system due to the heat might be the trade off factor. The linear calibration curves of Ni and Cr in stainless steel(BAS 461-468) and brass (KSS 1121-1126) are obtained with RF-GDAAS.

• The KSFM Journal of Fluid Machinery
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• v.6 no.3 s.20
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• pp.36-43
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• 2003

Operating performance of industrial gas turbines in combined cycle power plants depends upon atmospheric conditions. Compressor fouling caused by airborne particles in the atmosphere and their adhesions on compressor blades is one of critical phenomena related to the performance degradation of industrial gas turbines. Compressor fouling provokes increase of pressure loss in inlet duct, decrease of mass flow rate of intake air and decrease of compressor stage efficiency. In this study, impacts of compressor fouling on the performance of an industrial gas turbine operating at design point condition are investigated analytically. As results, it is found that the reduction of produced power with decreased mass flow rate of intake air caused by narrowed flow area by the adhesion of airborne particles on compressor blades is the most dominant impact on the gas turbine performance by the compressor fouling phenomena.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.17-17
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• 2010

This paper address technical issues in calibrating discharge coefficients of sonic nozzles used to measure the volume flow rate of low vacuum dry pumps. The first challenging issue comes from the technical limit that their calibration results available from the flow measurement standard laboratories do not fully cover the low vacuum measurement range although the use of sonic nozzles for precision measurement of gas flow has been well established in NMIs. The second is to make an ultra low flow sonic nozzlesufficient to measure the throughput range of 0.01 mbar-l/s. Those small-sized sonic nozzles do not only achieve the noble stability and repeatability of gas flow but also minimize effects of the fluctuation of down stream pressures for the measurement of the volume flow rate of vacuum pumps. These distinctive properties of sonic nozzles are exploited to measure the pumping speed of low vacuum dry pumps widely used in the vacuum-related academic and industrial sectors. Sonic nozzles have been standard devices for measurement of steady state gas flow, as recommended in ISO 9300. This paper introduces two small-sized sonic nozzles of diameter 0.03 mm and 0.2 mm precisely machined according to ISO 9300. The constant volume flow meter (CVFM) readily set up in the Vacuum center of KRISS was used to calibrate the discharge coefficients of the machined nozzles. The calibration results were shown to determine them within the 3% measurement uncertainty. Calibrated sonic nozzles were found to be applicable for precision measurement of steady state gas flow in the vacuum process. Both calibrated sonic nozzles are demonstrated to provide the precision measurement of the volume flow rate of the dry vacuum pump within one percent difference in reference to CVFM. Calibrated sonic nozzles are applied to a new 'in-situ and in-field' equipment designed to measure the volume flow rate of low vacuum dry pumps in the semiconductor and flat display processes.

• Journal of Hydrogen and New Energy
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• v.29 no.4
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• pp.370-377
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• 2018

Ball valve has been widely used in the field of high-pressure gas pipeline as an important component because of its low flow resistance and good leakage performance. The present paper focuses on the flow nature at the downstream of the ball valve used for gas pipelines according to valve opening rates. Steady 3-D RANS equations, SC/Tetra, have been introduced to analyze the flow characteristics inside the ball valve. Numerical boundary conditions at the inlet and outlet of the valve system are imposed by mass flow-rate and pressure, respectively. Velocity distributions obtained by numerical simulation are compared with respect to the valve opening rates of 30, 50, and 70%. Cavity distributions, asymmetry flow velocity and the flow stabilization point at each opening rate are also compared. When the valve opening rates are 30 and 50%, the flow stabilization requires the sufficient length of 10D or more due to the influence of the recirculation flow at the downstream of the valve.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.2
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• pp.204-210
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• 2010

The inner structure of the triangular separate bar (TSB) was improved to enhance the productivity of the TSB flow meter by simplifying the machining process for making the flow meter. The cross section of upstream and downstream pressure chamber in the TSB was changed from triangle to circle, which make it possible to substitute the wire cutting by drilling in the process of machining the pressure chamber. The flow rate characteristics of the flow meters was calibrated with a laminar flow meter. Six kinds of flow meters whose diameters of pressure tap for measuring pressure of both upsteam and downstream pressure chamber were different one another were made. The effects of the pressure tap diameter on the flow rate characteristics of the TSB flow meter was little. The mass flow rate characteristics of the flow meters with increasing a non-dimensional parameter which includes the gas temperature, exhaust gas pressure and differential pressure at the flow meters and atmospheric pressure shows nearly linear relationship with a correlation coefficient of R=0.998.

• Journal of the Korean Institute of Gas
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• v.22 no.3
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• pp.7-12
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• 2018

Thermal NOx is generated in a high temperature environment in a combustion facilities. Exhaust gas recirculation method is widely used among various methods for reducing nitrogen oxides in combustion devices. In the present study, the computational fluid dynamic analysis was accomplished to elucidate the cold flow characteristics in the flue gas recirculation burner with both outlets opening. Because the reciculation pipes is installed toward the tangential direction, the swirling flow is formulated in the burner and the phenomenon of the reverse flow creation is detected at the center area of circular burner. We are confirmed that this is the similar trend with the burner with one side outlet closed. From the present study, it was seen that the recirculated inflow from both recirculated burner outlets increased by about 5% compared to the burner with one side outlet opening. At the outlet located at the exhaust gas recirculation pipe inlet(gas exit 1), the inlet flow was formed in the entire region. At the opposite outlet(gas exit 2), the total flow was discharged, but the center part of the burner was observed to have a reverse flow. The flow rate at the gas exit 2 was 3 ~ 5 times larger than the flow rate at the gas exit 1.