• 제목/요약/키워드: gas film

검색결과 2,507건 처리시간 0.023초

Synchronous Vibration Control of a Rigid Rotor System using Active Air Bearing

  • Kwon, Tae-Kyu;Qiu, Jin-Hao;Tani, Jun-Ji;Lee, Seong-Cheol
    • International Journal of Precision Engineering and Manufacturing
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    • 제3권2호
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    • pp.87-94
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    • 2002
  • This paper presents the synchronous vibration control of a rotor system using an Active Air Bearing(AAB). In order to suppress the synchronous vibration, it is necessary to actively control the air film pressure or the air film thickness. In this study, active pads are used to control the air film thickness. Active pads are supported by the pivots containing piezoelectric actuators and their radial positions can be actively controlled by applying voltage to the actuators. Disturbances and various kinds of external forces can cause the shaft vibration as well as the change of the air film thickness. The dynamic behaviors of a rotary system supported by two tilting-pad gas bearings and its active stabilization using the tilting-pads as actuators are investigated numerically. The PID controller is applied to the tilting-pad gas bearing system with three pads, two of which contain piezoelectric actuators. To test the validity of the theoretical method, the performance of this control method is evaluated through experiments. The experimental results show the effectiveness of the control system for suppressing the unbalanced response of the rigid modes.

HFCVD법에 의한 ${CH_3}OH/{H_2}O$ 혼합기체의 다이아몬드 박막성장에 관한 연구 (Diamond Film Growth by Vapor Activation Method Using ${CH_3}OH/{H_2}O$ Gas)

  • 이권재;고재귀
    • 한국재료학회지
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    • 제11권12호
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    • pp.1014-1019
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    • 2001
  • The diamond thin film was deposited on Si(100) substrate from$CH_3OH/H_2O$mixtured gas using a hot filament chemical vapor deposition(HFCVD) method. The deposition condition for samples has been varried with the$CH_3OH/H_2O$composition. Scanning electron microscopy(SEM) and Raman spectroscopy has been employed for the sample analysis. The diamond sample has been obtained below 20Pa with$CH_3OH/H_2O$mixtured gas. The crystallinity of diamond film improved as the composition $CH_3OH$decreases from 60Vol% to 52Vol%, and the sample structure changed from the cauliflower to the diamond structure. But the sample structure was becomes cauliflower at 50Vol% of in$CH_3OH$ in the $CH_3OH/H_2O$. It was shown that the$CH_3OH$ has threshold composition.

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능동 공기 베어링에 의한 로터계 동기진동의 PID제어 (PID Control of a Synchronous Rotor System Vibration with Active Air Bearing)

  • 권대규;이영춘;이성철
    • 한국정밀공학회지
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    • 제18권8호
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    • pp.32-39
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    • 2001
  • This paper presents the synchronous vibration control of a rotor system using an Active Air Bearing(AAB). In order to suppress the synchronous vibration, it is necessary to actively control the air film pressure or the air film thickness. In this study, active pads are used to control the air film thickness. Active pads are supported by the pivots containing piezoelectric actuators and their radial positions can be actively controlled by applying voltage to the actuators. Disturbances and various kinds of external force can cause the shaft vibration as well as the change of the air film thickness. The dynamic behaviors of a rotary system supported by two tilting-pad gas bearings and its active stabilization using the tilting-pads as actuators are investigated numerically. The PID controller is applied to the tilting-pad gas bearing system with three pads, two of which contain piezoelectric actuators. To test the vapidity of the theoretical method, the performance of this control method is evaluated through experiments. The experimental results show the effectiveness of the control system for suppressing the unbalanced response of the rigid modes.

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교류 플라즈마 표시기 방전 시 발생하는 불순물 종의 분석 (An analysis on the impurities generated by discharge in AC plasma display panel)

  • 김광남;김중균;양진호;황기웅;이석현
    • 한국진공학회지
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    • 제8권4A호
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    • pp.482-489
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    • 1999
  • AC PDP(P1asma Display Pane1)s use the mixture of inert gases to generate a discharge inside the display pixels. Impurities such as CO, $CO_2$ and OH inside discharge region may deteriorate the characteristics of PDP operation during long life time of PDP. Electro-negative gas such as CO can cause the sustain pulse amplitude to rise by attaching electrons which will play an important role in the earlier stage of the discharge. MgO film is used to protect the dielectric layer in AC PDP, and is in contact with the free space of display pixel where it is filled with the inert gas mixture. So, MgO film can be a main source of impurities. In this experiment, we observed the change of impurity generation of various MgO films which were deposited by different methods, by using QMS. (quadropole mass spectrometer) The main impurites were $H_2$, CO and $CO_2$. And with the comparison of the TPD (temperature programmed desorption) result, it can be understood that impurity gases are generated by sputtering of MgO surface not by outgassing. Deposition method had effects on the characteristics of the impurity generation. The MgO film manufactured by e-beam evaporation generated more amount of impurity gases than the MgO films manufactured by sputtering or ion-plating. And also heat treatment of MgO film after deposition decreased the magnitude of impurity gas generation.

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RF 마그네트론 스퍼터링에 의한 NiO 박막 증착시 산소 유량비가 박막의 결정 배향성에 미치는 영향 (Effects of Oxygen Flow Ratio on the Crystallographic Orientation of NiO Thin Films Deposited by RE Magnetron Sputtering)

  • 류현욱;최광표;노효섭;박용주;박진성
    • 한국세라믹학회지
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    • 제41권2호
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    • pp.106-110
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    • 2004
  • NiO 산화물 타겟을 이용한 RF 마그네트론 스퍼터로 상온에서 Si(100) 기판 위에 NiO 박막을 증착시켜, 스퍼터 가스의 산소 유량비가 NiO 박막의 결정 배향성과 표면 형상에 미치는 영향을 조사하였다. Ar 가스에서 증착된 NiO 박막은 높은결정화도와 (100)면의 우선 배향성을 나타내었으나, $O_2$ 가스에서 증착된 경우에는 (111)면의 우선 배향성을 보였으며 그 증착속도도 감소하였다. 스퍼터 가스의 $O_2$ 함량에 따른 NiO 박막의 결정성과 우선배향성 변화에 대한 요인을 고찰하였으며, 박막의 표면 형상과 거칠기의 변화를 조사하였다.

Formation of hydrophilic polymer films by DC-plasma of monomer and reactive gases

  • Kim, Ki-Hwan;Park, Sung-Chang;doo-Jin choi;Jung, Hyung-Jin;Koh, Seok-Keun
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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    • pp.161-161
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    • 1999
  • In the field of material science, the interests and efforts to modify the surface of materials in agreement with the need of usage have been extensively increasing. he modification to improve the wettability of surface is very important is terms of adhesion, printing, etc. It is very difficult to modify metal surface into hydrophilic one. therefore, surfactant coating has been generally used in many cases. However, surfactant has disadvantages such as environmental problem, soluble in water. in this study, hydrophilic polymer films as alternative of surfactant were deposited on metal substrate by DC plasma polymerization. Hydrophilic polymer films deposited by DC plasma show many merits such as good wettability, stone adhesion to substrate, high resistance to most chemicals. Monomer gas and reactive gas were used as source plasma polymerization. Plasma polymerized films were fabricated with process parameters of deposition time, ratio of gas mixture, current, pressure, etc. Effects of these variables on wettability of plasma polymer films will be discussed. With XPS and FT-IR analyses of plasma polymeric films, the relation between wettability and chemical state of polymer films by DC plasma was investigated.

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Inhibition of Hydrogen Formation with Calcium Hydroxide on Zinc Electrode of Film-type Manganese Battery

  • Yun, Je-Jung;Kim, Nam-In;Hong, Chang Kook;Park, Kyung Hee
    • Transactions on Electrical and Electronic Materials
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    • 제16권3호
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    • pp.135-138
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    • 2015
  • A manganese dioxide (MnO2) layer and zinc (Zn) layer are used as the cathode and the anode to develop filmtype manganese battery, in which a stack of a MnO2 layer, gel electrolyte, and Zn layer are sandwiched between two plastic layers. This paper describes the chemical equation of swelling control upon the film-type manganese battery. We examined the reduction of hydrogen formation, by using calcium hydroxide Ca(OH)2 as an additive in the electrolyte of film-type manganese battery. The phenomena or an effect of reduced hydrogen gas was proven by cyclic voltammogram, X-ray photoelectron spectra (XPS), and volume of hydrogen formation. The amount of H2 gas generation in the presence of Ca2+ ion was reduced from 4.81 to 4.15 cc/g-zinc (14%), and the corrosion of zinc electrode in the electrolyte was strongly inhibited as time passed.

HDSM-CuPc LB막의 $NO_2$ 가스특성에 관한 연구 (A Study of The $NO_2$ Gas Detect Properties of Tetra-3-hexadecyl-sulphamoylcopperphthalocyanine(HDSM-CuPc) Langmuir-Blodgett Film.)

  • 한영재;김형석;유병호;이창희;김영관;김정수
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1994년도 추계학술대회 논문집 학회본부
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    • pp.237-239
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    • 1994
  • The $NO_2$ gas-detection characteristics were investigated using the functional organic Langmuir-Blodgett(LB) film of Tetra-3-hexadecyl-sulphamoylcopperphthalocyanine(HDSM-CuPc). A surface pressure of 30mN/m was obtained as a proper one for a film deposition. A deposited film status was confirmed by electrical and optical methods such as UV/visible absorption spectra and current-voltage(I-V) characteristics. The $NO_2$ gas response experiments under 200ppm concentration show that there is not increment of electrical conductivity in room temperature and is identified by UV/visible absorption spectra. But There are some increments of electrical conductivity in $160^{\circ}C$.

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Effect of Packaging Conditions on the Fruit Quality of Chinese Quince

  • An, Duck-Soon;Lee, Dong-Sun
    • Food Science and Biotechnology
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    • 제15권5호
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    • pp.683-687
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    • 2006
  • The respiration rate of Chinese quince was measured at 0, 5, 10, and $20^{\circ}C$ to determine its tolerable range of storage temperatures. Based on the measured respiration rates, plastic films covering a wide range of gas permeabilities were used for packaging and storing individual Chinese quince at 0 and $10^{\circ}C$. Chinese quince can be categorized as low respiration fruit. Higher respiratory quotients were observed at higher temperature suggesting that the tolerable temperature range for storage is $0-10^{\circ}C$. Packages containing Chinese quince wrapped in highly gas-permeable polyolefin film PD 941 attained, with progressive decreases in volume, 9.5-10.2% $O_2$ and 1.3-1.8% $CO_2$ at $0^{\circ}C$, 8.1% $O_2$ and 2.4% $CO_2$ at $10^{\circ}C$. At these levels, PD 941 could preserve the fruit at acceptable quality levels for 152 and 50 days at 0 and $10^{\circ}C$, respectively. Less gas-permeable packages built up high $CO_2$ concentrations (above 15.8%) and low $O_2$ concentrations (less than 1.8%) causing free volume expansion and eventual dark discoloration of the fruit. The storage life realized by packaging with polyolefin film PD 941 could facilitate the availability of Chinese quinces in winter and spring for medicinal or ornamental purposes in the fresh state.

Preparation Method of Plan-View Transmission Electron Microscopy Specimen of the Cu Thin-Film Layer on Silicon Substrate Using the Focused Ion Beam with Gas-Assisted Etch

  • Kim, Ji-Soo;Nam, Sang-Yeol;Choi, Young-Hwan;Park, Ju-Cheol
    • Applied Microscopy
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    • 제45권4호
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    • pp.195-198
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    • 2015
  • Gas-assisted etching (GAE) with focused ion beam (FIB) was applied to prepare plan-view specimens of Cu thin-layer on a silicon substrate for transmission electron microscopy (TEM). GAE using $XeF_2$ gas selectively etched the silicon substrate without volume loss of the Cu thin-layer. The plan-view specimen of the Cu thin film prepared by FIB milling with GAE was observed by scanning electron microscopy and $C_S$-corrected high-resolution TEM to estimate the size and microstructure of the TEM specimen. The GAE with FIB technique overcame various artifacts of conventional FIB milling technique such as bending, shrinking and non-uniform thickness of the TEM specimens. The Cu thin film was uniform in thickness and relatively larger in size despite of the thickness of <200 nm.