Preparation Method of Plan-View Transmission Electron Microscopy Specimen of the Cu Thin-Film Layer on Silicon Substrate Using the Focused Ion Beam with Gas-Assisted Etch |
Kim, Ji-Soo
(Gyeongbuk Science & Technology Promotion Center, Gumi Electronics & Information Technology Research Institute)
Nam, Sang-Yeol (Gyeongbuk Science & Technology Promotion Center, Gumi Electronics & Information Technology Research Institute) Choi, Young-Hwan (Department of Science of Cultural Properties, Chung-Ang University) Park, Ju-Cheol (Gyeongbuk Science & Technology Promotion Center, Gumi Electronics & Information Technology Research Institute) |
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