• Journal of the Korean Institute of Gas
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• v.24 no.5
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• pp.74-81
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• 2020

In general, when manufacturing a semiconductor, a number of hazardous and dangerous substances such as flammability, toxic, and corrosiveness are used. In particular, semiconductors are manufactured using specialty gas in processes such as CVD and etching. The specialty gas is filled in a container in the state of compressed or liquefied gas, and a gas cylinder cabinet is used as a facility for supplying this specialty gas to the semiconductor manufacturing process. When a accident occurs in the gas supply system, gas is released through a pressure release device installed in the gas cylinder to secure the safety of the supply system. In this case, the gas released inside the gas cabinet, there is a risk of leaking to the outside. After that, by analyzing the gas flow in the gas cabinet, it is intended to identify the risk associated with leak and to provide measures to prevent accidents.

• Journal of the Korean Institute of Gas
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• v.26 no.1
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• pp.34-40
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• 2022

Gas cylinder cabinets have risks such as cylinder explosion and scattering of debris when a fire occurs. These risks are likely to cause gas spills and cause secondary damage. In order to reduce damage, it is very important to secure the fire resistance performance of the gas cylinder cabinet. In foreign countries, NFPA codes in the United States and EN-14470-2 in Europe stipulate fire resistance test standards for gas cylinder cabinets to protect internal cylinders for a certain period of time in a situation where gas cylinder cabinets are exposed to flames. However, in Korea, only internal pressure performance and airtight performance standards are specified, and the target is limited to piping, and research and regulations for the fire resistance performance of gas cylinder cabinets are insufficient compared to overseas. Therefore, in this study, finite element analysis was used to establish fire resistance standards for domestic gas cylinder cabinets. In the event of a fire, optimal conditions are derived in terms of structure and material.

• Journal of the Korean Institute of Gas
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• v.20 no.6
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• pp.80-88
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• 2016

A fire station and scuba have operated filling facilities for respiratory high-pressure cylinder without getting authority or reporting according to High-Pressure Gas Safety Control Act. They need facility improvement and special management to make provision for the time of accident during filling process. The Government have strived to correct illegal operations and suggested an alternative, establishing and operating the safety cabinet. It insures a safety being distance from danger caused by overpressure and a safety provoked by the protective wall equals or superiors. The safety cabinet is required to have an internal structure that smoothly distribute overpressure at the time of rupture. Plus, it needs to minimize fragments. It is also equipped with the performance of protective wall that makes overpressure to outside vent on the place where there is no person (top or bottom). This study calculated the consequence of physical explosion damage and built a prototype of safety cabinet. In addition, through the gas burst test, it derives for the ways to mitigate the physical explosion damage.

• Journal of the Korea Safety Management & Science
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• v.12 no.4
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• pp.93-98
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• 2010

본 연구에서는, 반도체, LCD 공정에서 금속막을 증착하기 위하여 PECVD장비에 화재, 폭발 위험성과 독성을 가진 Silane가스를 사용하게 되는 장비인 gas cabinet, pipeline, VMB(Valve manifold box), MFC(mass flow controller)장비 등, 전반적인 시스템에 대하여 영국 HES의 ALARP개념을 도입하여 위험성 평가를 실시하여 문제점을 도출하고 대책을 강구 하는데 목적이 있고, 여러 가지 문제점중 절대적으로 수용 할 수 없는 Critical Risk로는 Gas Cylinder를 사용하여 Silane을 공급하고자 할 때에는 필히 Gas Cabinet을 사용하여 공급하여야 하고, Tube Trailer를 사용하여 공급하고자 할 때에는 필수적으로 Purge System을 갖추어 공급하여야 한다. 선택적으로 수용할 수 있는 High, Medium Risk로는 Gas Cylinder 또는 Tube Trailer를 사용하여 Silane을 공급하고자 할 때는 Inlet 부분에 RFO(Resticted Flow Orifice)를 설치하여 사용하고 Gas Supply Room에는 CO2소화설비를 적용하지 말고 Water Mist등 물 분무설비를 적용하여야한다.

• Journal of the Semiconductor & Display Technology
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• v.5 no.4 s.17
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• pp.23-27
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• 2006

Semiconductor industry has been dramatically developed with the information era of 21C, and the trend now is to consider that the technology of management system of the computer utility that has a high efficiency is important. This study investigated the intelligent decision system for residual gas purge process to effectively remove the residual gas in the tube after replacing the cylinder that is used for the gas cabinet or BSGS(Bulk Specialty Gas Supply System) of the semiconductor process. It was suggest from this study that it is possible to decide the type, frequency and volume of purge gas using various toxic gases which is necessary for each process. Also, this result will be utilized for operating the system, increasing the efficiency of management and saving energy.