A Study on the As Low As Reasonably Practicable (ALARP)-Concept Risk Assessment of Silane in Semiconductor and LCD Process
|
|
Lee, Joong-Hee
(Department of Safety Engineering, University of Incheon)
Hwang, Seong-Min (Department of Safety Engineering, University of Incheon) Woo, In-Sung (Department of Safety Engineering, University of Incheon) |
| 1 | HSE Report UK, "Reducing Risks Protection ALARP" 2007. |
| 2 | SEMI Code, Appendix 9-SEMI Standards |
| 3 | Alastair R Brown C.Eng, "RCL ARB 061122 Silane Safety Guideline_v2.1" 2007. |
| 4 | CCPS, "Guidelines for Evaluating the Characteristics of Vapor Cloud Explosion, Flash Fire, and BLEVEs" 1994. |
| 5 | Geoff Wells, "Hazard Identification and Risk Assessment" 1996 |
| 6 | LG Electronics, "EESH Training Textbook"1995 |
| 7 | Rushbrook Consulting․ngineers, "Safety Guideline for Storage, Distribution Handling of Silane" 2007 |
| 8 | Silane Guideline-V.1, "Silane Guideline for Storage, Distribution and Handling of Silane" 2007. |
 |
Korea Institute of Science and Technology Information
Gwahangno, Yuseong-gu, Daejeon, 305-806, Korea TEL : +82-42-869-1752
Copyright (c) 2009 KISTI. All Rights Reserved. For more information mail to
webmaster
