• Korean Journal of Materials Research
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• v.9 no.5
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• pp.503-508
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• 1999

We have investigated the physical and diffusion barrier property of Ti-Si-N film for Cu metallization. The ternary compound was deposited by using reactive rf magnetron sputtering of a TiSi$_2$target in an Ar/$N_2$gas mixture. Resistivities of the films were in range of 358$\mu$$\Omega$-cm, to 307941$\mu$$\Omega$-cm, and tended to increase with increasing the $N_2$/Ar flow rate ratio. The crystallization of the Ti-Si-N compound started to occur at 100$0^{\circ}C$ with the phases of TiN and Si$_3$N$_4$identified by using XRD(X-ray Diffractometer). The degree of the crystallization was influenced by the $N_2$/Ar flow ratio. The diffusion barrier property of Ti-Si-N film for Cu metallization was determined by AES, XRD and etch pit by secco etching, revealing the failure temperature of 90$0^{\circ}C$ in 43~45at% of nitrogen content. In addition, the very thin compound (10nm) with 43~45at% nitrogen content remained stable up to $700^{\circ}C$. Furthermore, thermal treatment in vacuum at $600^{\circ}C$ improved the barrier property of the Ti-Si-N film deposited at the $N_2$(Ar+$N_2$) ratio of 0.05. The addition of Ti interlayer between Ti-Si-N films caused the drastic decrease of the resistivity with slight degradation of diffusion barrier properties of the compound.

• Journal of the Korean Ceramic Society
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• v.32 no.11
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• pp.1241-1245
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• 1995

Ultrathin oxynitride (SiOxNy) films, 8nm thick, were formed on Si(100) in furnace using O2 and N2O as reactant gas. Compared with conventional furnace grown oxide, oxynitride dielectrics show better characteristics of Qbd and I-V, and less flat-band voltage shift. Excellent diffusion barrier property to dopant (BF2) is also confirmed.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.5
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• pp.425-430
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• 2009

$ZrO_2$ film was deposited by facing target sputtering (FTS) system on polyethylene naphthalate (PEN) substrate as a gas barrier layer for flexible organic light emitting devices (FOLEDs), In order to control the heat of the FTS system caused by the ion bombardment in the cathode compared with the conventional sputtering system, the process characteristics of the FTS apparatus are investigated under various sputtering conditions such as the distance between two targets ($d_{TT}$), the distance between the target and the substrate ($d_{TS}$), and the deposition time. The $ZrO_2$ film by the FTS system can reduce the damage on the films because the ion bombardment with high-energy particles like gamma-electrons, Moreover, the $ZrO_2$ film with optimized condition ($d_{TT}$=140 mm) as a function of the distance from center to edge showed a very uniform thickness below 5 % for a deposition time of 3 hours, which can improve the interface property between the anode and the plastics substrate for flexible displays, It is concluded that the $ZrO_2$ film prepared by the FTS system can be applied as a gas barrier layer or an interlayer between the anode and the plastic substrate with good properties of an uniform thickness and a low deposition-temperature.

• Proceedings of KOSOMES biannual meeting
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• 2017.11a
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• pp.36-36
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• 2017

• KOREAN JOURNAL OF PACKAGING SCIENCE & TECHNOLOGY
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• v.23 no.2
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• pp.67-74
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• 2017

In this work, the effects of nano $TiO_2$ on functionality and stability of low density polyethylene (LDPE) composite films were investigated for food packaging application. LDPE-nano $TiO_2$ composite films were prepared with various $TiO_2$ contents (0, 0.5, 1.0, 3.0 and 5.0wt%) by melt-extrusion and their basic properties such as crystallinity, chemical bonds and surface morphology were examined by XRD, FTIR and SEM. Ultraviolet (UV) light barrier property of as-prepared LDPE-nano $TiO_2$ composite films was also studied and the presence of nano $TiO_2$ resulted in significant improvement of UV light barrier compared to the pure LDPE film. To evaluate influence of nano $TiO_2$ on LDPE properties required as packaging material, thermal, mechanical, gas barrier and optical properties of LDPE-nano $TiO_2$ composite films were characterized with various analytical techniques including TGA, UTM, OTR, WVTR and UV-vis spectroscopy. As a result, except optical property of LDPE, no significant effects were found in other properties. Opacity of pure LDPE was greatly increased with increasing concentration of nano $TiO_2$.

• Membrane Journal
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• v.14 no.4
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• pp.320-328
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• 2004

Ionomer-Clay hybrid membranes were prepared by melt intercalation method with twin extruder. MMT was intercalated or exfoliated by the ionomer and it was confirmed by X-ray diffraction method. D-spacing of the characteristic peak from MMT plate in WAXD was moved and diminished. Gas permeability, mechanical properties and thermal properties of the ionomer-clay hybrid membranes were investigated. Gas permeability through the ionomer-clay hybrid membranes decreased due to increased tortuosity made by intercalation of clay in Ionomer.

• Membrane Journal
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• v.15 no.1
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• pp.62-69
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• 2005

SEBS-clay hybrid membranes were prepared by melt intercalation method with internal mixer. In the hybrid, the amount of clay content was fixed to 5 phr. MMT was intercalated or exfoliated by the ionomer and it was confirmed by X-ray diffraction method. D-spacing of the characteristic peak from MMT plate in SAXD was moved and diminished. Gas permeability, mechanical properties and thermal properties of the SEBS-clay hybrid membranes were investigated. Gas permeability through the SEBS-clay hybrid membranes decreased due to increased tortuosity made by intercalation of clay in SEBS.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.236-236
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• 2011

Silicon oxynitride (SiON) was deposited for gas barrier film on polyethylene terephthalate (PET) using octamethylycyclodisiloxane (Si4O4C8H24, OMCTS) precursor by plasma enhanced chemical vapor deposition (PECVD) at low temperature. The ion flux and substrate temperature were measured by oscilloscope and thermometer. The chemical bonding structure and barrier property of films were characterized by Fourier transform infrared (FT-IR) spectroscopy and the water vapor transmission rate (WVTR), respectively. The deposition rate of films increases with RF bias and nitrogen dilution due to increase of dissociated precursor and nitrogen ion incident to the substrate. In addition, we confirmed that the increase of nitrogen dilution and RF bias reduced WVTR of films. Because, on the basis of FT-IR analysis, the increase of the nitrogen gas flow rate and RF bias caused the increase of the C=N stretching vibration resulting in the decrease of macro and nano defects.

• Journal of the Korean institute of surface engineering
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• v.54 no.6
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• pp.331-339
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• 2021

Environmental barrier coatings(EBCs) are applied to the SiC/SiC ceramic matrix composites(CMCs) in order to protect CMCs from being corroded with water vapor by combustion gas in gas turbine engines. Ytterbium silicates, such as ytterbium monosilicate and ytterbium disilicate, are ones of the candidate materials for EBCs due to their excellent resistance to water vapor corrosion as well as thermal-expansion match with SiC. In this study, ytterbium silicates are fabricated with 2-step solid-state synthesis targeting ytterbium disilicate. After synthesizing ytterbium monosilicate, the mixtures of ytterbium monosilicate and SiO₂ are heat-treated and densified by using pressureless sintering or hot pressing with a variety of heating conditions. The phase formation, thermal expansion, and oxidation behavior are examined with fabricated specimens. The final densified bodies are found to be composites between ytterbium monosilicate and ytterbium disilicate with different ratios, which results in 4.43 to 6.72×10^-6/K range of coefficients of thermal expansion. The probability of these ytterbium silicates for EBC applications is also discussed.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.2989-2994
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• 2007

Gas hydrates are ice-like crystalline compounds that form under low temperature and elevated pressure conditions. Although hydrate formation can pose serious flow-assurance problems in the gas pipelines or facilities, gas hydrates present a novel means for natural gas storage and transportation with potential applications in a wide variety of areas. An important property of hydrates that makes them attractive for use in gas storage and transportation is their very high gas-to-solid ratio. In addition to the high gas content, gas hydrates are remarkably stable. The main barrier to development of gas hydrate technology is the lack of an effective method to mass produce gas hydrate in solid form. The first objective of this study is investigating the characteristics of gas hydrate formation related to several factors such as pressure, temperature, water-to-storage volume ratio, concentration of SDS, heat transfer and whether stirred or not respectively. And the second objective is clarifying the relation between the formation efficiency and each factor in order to find the proper way or direction to improve the formation performance.