• Title/Summary/Keyword: forming gas

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CuO 세라믹스의 소결 온도 및 분위기에 따른 미세구조와 수축거동 변화 (Effect of the Sintering Temperature and Atmosphere on the Microstructural Evolution and Shrinkage Behavior of CuO Ceramics)

  • 송주현;이정아;이준형;허영우;김정주
    • 한국세라믹학회지
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    • 제49권6호
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    • pp.528-534
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    • 2012
  • In this study, the densification behavior and microstructural evolution of CuO were examined when this material was sintered at different temperatures in $O_2$, air and Ar atmospheres. The CuO samples maintained their phases even after prolonged sintering at $900-1100^{\circ}C$ in an oxygen atmosphere. When sintering in air, the densification was faster than it was when sintering in oxygen. However, when the samples were sintered at $1100^{\circ}C$, large pores were observed in the sample due to the phase transformation from CuO to $Cu_2O$ which accompanies the generation of oxygen gas. The pore channels in the sample became narrower as the sintering time increased, eventually undergoing a Rayleigh breakup and forming discrete isolated pores. On the other hand, CuO sintering in Ar did not contribute to the densification, as all CuO samples underwent a phase transformation to $Cu_2O$ during the heating process.

유류오염의 미생물학적 제어 (Bioremedation of petrolium pollution)

  • 이상준;차미선;이근희
    • 한국지하수토양환경학회:학술대회논문집
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    • 한국지하수토양환경학회 2001년도 제3회 부산.경남지부 심포지엄
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    • pp.14-28
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    • 2001
  • As basic study for purpose bioremedation in oil-contaminated environment, Primarily, we isolated biosurfactant producer- strains utilized of oil-agar plate, and measured surface tension and emulsifying activity. We investigated in oil-contaminated soil and sea water. In this laboratory, Pseudomonas sp. EL-012S strain isolated from oil-contaminated soil was able to product novel biosurfactant under the optimal culture condition. Its condition was n-hexadecane 2.0%, NH$_4$NO$_3$0.4%, Na$_2$HPO$_4$0.6%, KH$_2$PO$_4$0.4%, MgSO$_4$.7$H_2O$ 0.02%, CaCl$_2$.2$H_2O$ 0.001%, FeSO.7$H_2O$ 0.001%, initial pH 7.0 and aeration at 3$0^{\circ}C$, respectively. This biosurfactant was produced in both late-exponential and early-stationary phase. The biosurfactant from Pseudomonas sp. EL-012S was composed of carbohydrate, lipid and protein. The purified-biosurfactant was examined two (biosurfactant type I, II) with the silica gel G60 column chromatography and the purified biosurfactant confirmed thin layer chromatography, high performed liquid chromatography and gas chromatography. The biosurfactant type I involved in carbohydrate-lipid-protein characteristics lowered surface tension of water to 27dyne/cm and interfacial tension 4.5dyne/cm aginst to n-hexadecane and the biosurfactant type B involved in carbohydrate lipid characteristics lowered surface tension of water to 30dyne/cm and interfacial tension 8dyne/cm against to n-hexadecane. Specially type I had the properties such as strong emulsifying activity, emulsion stability, pH-stability, thermo-stability, high cleaning activity and forming ability.

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Heat treatment effect of high-k HfO2 for tunnel barrier memory application

  • 황영현;유희욱;김민수;이영희;조원주
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.218-218
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    • 2010
  • 기존의 비휘발성 메모리 소자는 터널 절연막으로 $SiO_2$ 단일 절연막을 이용하였다. 그러나 소자의 축소화와 함께 비휘발성 메모리 소자의 동작 전압을 낮추기 위해서 $SiO_2$ 단일 절연막의 두께도 감소 시켜야만 하였다. 하지만 $SiO_2$ 단일 절연막의 두께 감소에 따라, 메모리의 동작 횟수와 데이터 보존 시간의 감소등의 문제점들로 인해 기술적인 한계점에 이르렀다. 이러한 문제점들을 해결하기 위한 연구가 활발히 진행되고 있는 가운데, 최근 high-k 물질을 기반으로 하는 Tunnel Barrier Engineered (TEB) 기술이 주목 받고 있다. TBE 기술이란, 터널 절연막을 위해 서로 다른 유전율을 갖는 유전체를 적층함으로써 쓰기/지우기 속도의 향상과 함께, 물리적인 두께 증가로 인한 데이터 보존 시간을 향상 시킬 수 있는 기술이다. 따라서, 본 연구에서는 적층된 터널 절연막에 이용되는 $HfO_2$를 FGA (Forming Gas Annealing)와 RTA (Rapid Thermal Annealing) 공정에 의한 열처리 효과를 알아보기 위해, 온도에 따른 전기적인 특성을 MIS-Capacitor 제작을 통하여 분석하였다. 이를 위해 먼저 Si 기판 위에 $SiO_2$를 약 3 nm 성장시킨 후, $HfO_2$를 Atomic Layer Deposition (ALD) 방법으로 약 8 nm를 증착 하였고, Aluminum을 약 150 nm 증착 하여 게이트 전극으로 이용하였다. 이를 C-V와 I-V 특성을 이용하여 분석함으로 써, 열처리 공정을 통한 $HfO_2$의 터널 절연막 특성이 향상됨을 확인 하였다. 특히, $450^{\circ}C$ $H_2/N_2$(98%/2%) 분위기에서 진행한 FGA 공정은 $HfO_2$의 전하 트랩핑 현상을 줄일 뿐 만 아니라, 낮은 전계에서는 낮은 누설 전류를, 높은 전계에서는 높은 터널링 전류가 흐르는 것을 확인 하였다. 이와 같은 전압에 대한 터널링 전류의 민감도의 향상은 비휘발성 메모리 소자의 쓰기/지우기 특성을 개선할 수 있음을 의미한다. 반면 $N_2$ 분위기에서 실시한 RTA 공정에서는, 전하 트랩핑 현상은 감소 하였지만 FGA 공정 후 보다는 전하 트랩핑 현상이 더 크게 나타났다. 따라서, 적층된 터널 절연막은 적절한 열처리 공정을 통하여 비휘발성 메모리 소자의 성능을 향상 시킬 수 있음이 기대된다.

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Pt 또는 Ir 계열의 상부전극을 갖는 (Pb, La) (Zr, Ti)$O_3$ (PLZT) 박막의 누설전류특성에 미치는 수소 열처리의 효과 (Effect of Hydrogen on leakage current characteristics of (Pb, La) (Zr, Ti )$O_3$(PLZT) thin film capacitors with Pt or Ir-based top electrodes)

  • 윤순길
    • 한국재료학회지
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    • 제11권2호
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    • pp.151-154
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    • 2001
  • 상부전극, Pt, Ir, 그리고 $IrO_2$, 에 따라 수소 열처리전과 후, 그리고 회복열처리시 누설전류특성을 고찰하였다. Pt/PLZT/Pt 케페시터는 수소열처리 후에 다시 회복열처리를 수행하면 완전히 이력곡선의 회복을 보이며 또한 피로특성도 거의 회복 된다. Pt과 IrO$_2$ 상부전극의 경우의 진 누설전류 특성은 열처리조건에 관계없이 강한 시간 의존성을 갖는 space-charge influenced injection모델에 적합하다. 반면에 Ir 상부전극의 경우는 Ir과 PLZT 사이의 계면에 헝성된 전도성 상인 $IrO_2$로 인해 높은 누설전류 밀도를 보이면서 relaxation current 영역이 없이 steady state 영역을 보이는, 주로 Schottky barrier 모델에 의해 설명된다.

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용융알루미늄 도금 강판 상에 스퍼터링법으로 형성된 마그네슘 코팅막에 의한 내식성 향상 (Improvement of Corrosion Resistance by Mg Films Deposited on Hot Dip Aluminized Steel using a Sputtering Method)

  • 박재혁;김순호;정재인;양지훈;이경황;이명훈
    • 한국표면공학회지
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    • 제51권4호
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    • pp.224-230
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    • 2018
  • In this study, Mg films were prepared on hot dip aluminized steel (HDA) by using a sputtering method as a high corrosion resistance coating. The corrosion resistance of the Mg films was improved by controlling the morphology and the crystal structure of films by adjusting the Ar gas pressure during the coating process. Anodic polarization measurement results confirm that the corrosion resistance of the Mg films was affected by surface morphology and crystal structure. The corrosion resistance of the Mg coated HDA specimen increased with decreasing crystal size of the Mg coating and it was also improved by forming a film with denser morphology. The crystal structure oriented at Mg(101) plane showed the best corrosion resistance among crystal planes of the Mg metals, which is attributed to its relatively low surface energy. Neutral salt spray test confirmed that corrosion resistance of HDA can be greatly improved by Mg coating, which is superior to that of HDG (hot dip galvanized steel). The reason for the improvement of the corrosion resistance of Mg films on hot dip aluminized steel was due to the barrier effect by the Mg corrosion products formed by the corrosion of the Mg coating layer.

연속주조용 Porous Nozzle의 기공율이 내구성에 미치는 영향 (Effects of Porosity on Durability in a Porous Nozzle for Continuous Casting)

  • 윤상현;조문규;정두화;이희수
    • 대한금속재료학회지
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    • 제48권7호
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    • pp.625-629
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    • 2010
  • This study investigates the effects of porosity on the thermal stability and the thermal shock resistance of a porous nozzle used for blowing an inert gas. The samples of $Al_2O_3-SiO_2-ZrO_2$ system, which had the apparent porosity of 16~30% and bulk density of $2.6{\sim}3.2g/cm^3$, were prepared by adding different graphite contents (5, 10, 20 wt%) as a pore-forming agent. The thermal shock test was conducted at ${\Delta}T=500$, 1000, and $1400^{\circ}C$ also and the thermal stability was also carried out at 1550, 1600, and $1650^{\circ}C$ for 5 hrs. The specimen contained 10 wt% graphite had uniform pore size distribution, whereas the specimen with 20 wt% graphite showed non-uniform pore size distribution. As a result of thermal shock test, the specimen containing 10 wt% graphite appears to have higher mechanical strength than the other specimens (5, 20 wt% graphite). Both the 5 wt% and 20 wt% graphite specimens developed a non-uniform pore size distribution and cracks that were generated by intensive thermal stress.

Superhard SiC Thin Films with a Microstructure of Nanocolumnar Crystalline Grains and an Amorphous Intergranular Phase

  • Lim, Kwan-Won;Sim, Yong-Sub;Huh, Joo-Youl;Park, Jong-Keuk;Lee, Wook-Seong;Baik, Young-Joon
    • Corrosion Science and Technology
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    • 제18권5호
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    • pp.206-211
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    • 2019
  • Silicon carbide (SiC) thin films become superhard when they have microstructures of nanocolumnar crystalline grains (NCCG) with an intergranular amorphous SiC matrix. We investigated the role of ion bombardment and deposition temperature in forming the NCCG in SiC thin films. A direct-current (DC) unbalanced magnetron sputtering method was used with pure Ar as sputtering gas to deposit the SiC thin films at fixed target power of 200 W and chamber pressure of 0.4 Pa. The Ar ion bombardment of the deposited films was conducted by applying a negative DC bias voltage 0-100 V to the substrate during deposition. The deposition temperature was varied between room temperature and $450^{\circ}C$. Above a critical bias voltage of -80 V, the NCCG formed, whereas, below it, the SiC films were amorphous. Additionally, a minimum thermal energy (corresponding to a deposition temperature of $450^{\circ}C$ in this study) was required for the NCCG formation. Transmission electron microscopy, Raman spectroscopy, and glancing angle X-ray diffraction analysis (GAXRD) were conducted to probe the samples' structural characteristics. Of those methods, Raman spectroscopy was a particularly efficient non-destructive tool to analyze the formation of the SiC NCCG in the film, whereas GAXRD was insufficiently sensitive.

Xylanase를 생산하는 호알칼리성 균주의 분리 및 동정 (Isolation and Identification of Alkalophilic Microorganism Producing Xylanase)

  • 최지휘;배동훈
    • 산업식품공학
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    • 제14권3호
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    • pp.263-270
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    • 2010
  • Xylanase를 생산하는 호알칼리성 균주를 토양으로부터 분리하여 동정하였다. 토양으로부터 분리한 호알칼리성 균주 3000여종 중 xylanase 활성이 가장 높은 균주인 strain DK-2386 균주를 선별하였다. Gram 염색과 SEM을 통한 형태학적 특성을 관찰하였으며, Methods for General and Molecular Bacteriology와 Bergey's manual of systematic bacteriology, 그리고 Biochemical tests for identification of medical bacteria에 준하여 생화학적 특성을 확인한 결과 배양액의 색은 붉은 빛을 나타내었으며, Gram양성 간균, 내생포자형성, catalase 양성, oxidase 양성, 혐기성 양성, glucose로부터 gas 형성 양성, casein 가수분해 양성, starch 가수분해 양성, CMC 가수분해 양성, xylan 가수분해 양성, nitrate 환원능 양성이며 10% NaCl 농도에서도 생육하는 것을 확인하였다. 균체의 지방산 조성 분석 결과 $C_{15:0\;ISO}$ 27.35%와 $C_{15:0\;ANTEISO}$ 31.54%, $C_{16:0}$ 9.70%로 이루어져 Bacillus속으로 동정되었으며, 16S rDNA 염기서열 분석결과 B. agaradhaerens와 100%의 유사성을 갖는 것을 확인하였다. (사)한국종균협회로부터 분양받은 Bacillus agaradhaerens 40952, B. alcalophilus와 strain DK-2386 균주사이의 생화학적 특성을 비교한 결과 B. agaradhaerens와 속과 종이 같으나 미세하게 특성이 다른 균주로 판단되어 B. agarad haerens DK-2386이라 명명하였다.

매립지 메탄 및 악취 배출 저감을 위한 바이오커버 및 바이오필터의 현장적용 평가 연구 (Evaluation of field application of biocover and biofilter to reduce landfill methane and odor emissions)

  • 채정석;전준민;오경철;류희욱;조경숙;김신도
    • 실내환경 및 냄새 학회지
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    • 제16권2호
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    • pp.139-149
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    • 2017
  • In order to reduce odor and methane emission from the landfill, open biocovers and a closed biofilter were applied to the landfill site. Three biocovers and the biofilter are suitable for relatively small-sized landfills with facilities that cannot resource methane into recovery due to small volumes of methane emission. Biocover-1 consists only of the soil of the landfill site while biocover-2 is mixed with the earthworm casts and artificial soil (perlite). The biofilter formed a bio-layer by adding mixed food waste compost as packing material of biocover-2. The removal efficiency decreased over time on biocover-1. However, biocover-2 and the biofilter showed stable odor removal efficiency. The rates of methane removal efficiency were in order of biofilter (94.9%)>, biocover-1(42.3%)>, and biocover-2 (37.0%). The methane removal efficiency over time in biocover-1 was gradually decreased. However, drastic efficiency decline was observed in biocover-2 due to the hardening process. As a result of overturning the surface soil where the hardening process was observed, methane removal efficiency increased again. The biofilter showed stable methane removal efficiency without degradation. The estimate methane oxidation rate in biocover-1 was an average of 10.4%. Biocover-2 showed an efficiency of 46.3% after 25 days of forming biocover. However, due to hardening process efficiency dropped to 4.6%. After overturn of the surface soil, the rate subsequently increased to 17.9%, with an evaluated average of 12.5%.

원자층 증착법으로 증착된 MoOx를 적용한 전하 선택 접합의 이종 접합 태양전지 (Heterojunction Solar Cell with Carrier Selective Contact Using MoOx Deposited by Atomic Layer Deposition)

  • 정민지;조영준;이선화;이준신;임경진;서정호;장효식
    • 한국재료학회지
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    • 제29권5호
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    • pp.322-327
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    • 2019
  • Hole carrier selective MoOx film is obtained by atomic layer deposition(ALD) using molybdenum hexacarbonyl[$Mo(CO)_6$] as precursor and ozone($O_3$) oxidant. The growth rate is about 0.036 nm/cycle at 200 g/Nm of ozone concentration and the thickness of interfacial oxide is about 2 nm. The measured band gap and work function of the MoOx film grown by ALD are 3.25 eV and 8 eV, respectively. X-ray photoelectron spectroscopy(XPS) result shows that the $Mo^{6+}$ state is dominant in the MoOx thin film. In the case of ALD-MoOx grown on Si wafer, the ozone concentration does not affect the passivation performance in the as-deposited state. But, the implied open-circuit voltage increases from $576^{\circ}C$ to $620^{\circ}C$ at 250 g/Nm after post-deposition annealing at $350^{\circ}C$ in a forming gas ambient. Instead of using a p-type amorphous silicon layer, high work function MoOx films as hole selective contact are applied for heterojunction silicon solar cells and the best efficiency yet recorded (21 %) is obtained.