Superhard SiC Thin Films with a Microstructure of Nanocolumnar Crystalline Grains and an Amorphous Intergranular Phase |
Lim, Kwan-Won
(Department of Materials Science and Engineering, Korea University)
Sim, Yong-Sub (Department of Materials Science and Engineering, Korea University) Huh, Joo-Youl (Department of Materials Science and Engineering, Korea University) Park, Jong-Keuk (Center for Electronic Materials, Korea institute of Science and Technology) Lee, Wook-Seong (Center for Electronic Materials, Korea institute of Science and Technology) Baik, Young-Joon (Center for Electronic Materials, Korea institute of Science and Technology) |
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