• Title/Summary/Keyword: form removal

Search Result 589, Processing Time 0.031 seconds

Cu dry etching by the reaction of Cu oxide with H(hfac) (Cu oxide의 형성과 H(hfac) 반응을 이용한 Cu 박막의 건식식각)

  • Yang, Hui-Jeong;Hong, Seong-Jin;Jo, Beom-Seok;Lee, Won-Hui;Lee, Jae-Gap
    • Korean Journal of Materials Research
    • /
    • v.11 no.6
    • /
    • pp.527-532
    • /
    • 2001
  • Dry etching of copper film using $O_2$ plasma and H(hfac) has been investigated. A one-step process consisting of copper film oxidation with an $O_2$ plasma and the removal of surface copper oxide by the reaction with H(hfac) to form volatile Cu(hfac)$_2$ and $H_2O$ was carried but. The etching rate of Cu in the range from 50 to 700 /min was obtained depending on the substrate temperature, the H(hfac)/O$_2$ flow rate ratio, and the plasma power. The copper film etch rate increased with increasing RF power at the temperatures higher than 215$^{\circ}C$. The optimum H(hfac)/O$_2$ flow rate ratio was 1:1, suggesting that the oxidation process and the reaction with H(hfac) should be in balance. Cu patterning using a Ti mask was performed at a flow rate ratio of 1:1 on 25$0^{\circ}C$\ulcorner and an isotropic etching profile with a taper slope of 30$^{\circ}$was obtained. Cu dry patterning with a tapered angle which is necessary for the advanced high resolution large area thin film transistor liquid-crystal displays was thus successfully obtained from one step process by manipulating the substrate temperature, RF power, and flow rate ratio.

  • PDF

The Effect of Pre-Treatment Methods for the Life Time of the Insoluble Electrodes (불용성 전극의 전처리 방법이 전극의 수명에 미치는 영향)

  • Park, Mi-Jung;Lee, Taek-Soon;Kang, Meea;Han, Chi-Bok
    • Journal of Korean Society of Environmental Engineers
    • /
    • v.38 no.6
    • /
    • pp.291-298
    • /
    • 2016
  • Electrochemical water treatment process as a useful treatment method for the removal of non-degradable matter has been consistently studied for several decades. Key process of electrochemical water treatment are oxidation reaction from an anode and reduction from a cathode. In this study, the effect of pre-treatment methods in the insoluble electrode manufacturing process for the water treatment has been evaluated for the life time of electrode The results of this study showed that pre-treatment methods of a base metal such as surface roughness, clean method and interlayer formation influenced to life time of electrode when the same condition (catalyst electrode layer coating method and material system) was applied for pre-treatment methods. This study was conducted by using $IrO_2/Ti$ electrode In the test of sand-blasting process, an electrode manufactured by using sanding media of different sizes resulted in the most effective electrode life time when the size of alumina was used for $212{\sim}180{\mu}m$ praticle size (#80). The most effective method was considered using arc plasma in the additional roughness control and cleaning process, sputtering method to form Ta type interlayer formation process.

A Study on the Development of Non-PC High-Early-Strength Concrete Without Steam Curing (증기양생이 불필요한 PC부재용 조강형 콘크리트 개발에 관한 연구)

  • Jun, Woo-Chul;Lee, Ji-Hwan;Park, Hee-Gon;Lee, Jae-Sam;Kim, Kyung-Min;Cho, In-Sung
    • Journal of the Korea Institute of Building Construction
    • /
    • v.14 no.2
    • /
    • pp.156-162
    • /
    • 2014
  • This study aims to develop a rapidly hardening type of concrete to achieve the removal of form intensity (more than 10MPa) using the method of curing at room temperature in order to solve some economic environmental problems by omitting the steam curing process involved in producing PC (Precast Concrete). Therefore, this study evaluated a rapidly hardening cement containing a high amunt of C3S, which is very responsive in expressing early intensity, and a rapidly hardening type of concrete which uses some hardening accelerator to increase thehydration reaction of $C_3S$. The results of the experiment on concrete using some hardening accelerator are asfollows. In the slump flow experiment for identifying the liquidity and the air test, the desired values were met. The compression strength showed rapid expression response by 12 hours, and met the desired value within 6~9 hours. Its drying shrinkage value and Autogenous shrinkage value were measured as below ($-754.5{\times}10^{-6}$),and satisfied the requirements. In addition, in the Semi-Adiabatic Temperature Test, it was found that the concrete rose to its peak temperature within 24 hours and then its temperature dropped.

Biological Characteristics and Control of Annual Bluegrass (Poa annua) (Annual Bluegrass의 생물학적 특성과 방제)

  • Lee, Sang-Kook
    • Weed & Turfgrass Science
    • /
    • v.2 no.2
    • /
    • pp.122-130
    • /
    • 2013
  • The object of this study is to review the current states of the characteristics and strategies to control annual bluegrass to apply information to the circumstance of South Korea. Annual bluegrass is one of the most widespread turfgrass species which has great ability to produce seedhead and shoot growth. It also has ability to tolerate low mowing height and to form uniformity of turfgrass when it is established. Annual bluegrass is well-known as weak turfgrass for high and low temperature. High rate of nitrogen and phosphorus improves growth of annual bluegrass. To control annual bluegrass, deep and infrequent irrigation is more effective than light and frequent irrigation. Clipping removal is more effective than clipping return to control annual bluegrass. Prodiamine, bensulide, and dithiopyr are applied as pre-emergence herbicide, and ethofumesate and bisbyribac-sodium are used as post-emergence herbicide. Paclobutrazol and flurprimidol are used as plant growth regulator. Trinexapac which is one of the most popular plant growth regulators (PGRs) in South Korea is not proper to control annual bluegrass because it accelerates improve growth of annual bluegrass in summer. Although chemical control is mainly used in South Korea, combination of cultural and chemical control may be the strategy to maximize effectiveness to control annual bluegrass.

Effect of Aotomatic Scale Removal System for Piping in Refrigeration & Air Conditioning System (냉동·공조기 배관내 스케일 자동제거장치의 효과)

  • Kim, Jong-Ryeol
    • Journal of the Korean Applied Science and Technology
    • /
    • v.34 no.4
    • /
    • pp.908-914
    • /
    • 2017
  • In this study, we developed a system that automatically removes the scale in the piping by using electrolysis principle in order to solve the cooling performance of the refrigeration and air conditioning system by acting as heat resistance in the heat transfer process by forming the scale in the heat exchanger for refrigeration air conditioning. We want to check the performance through experiments. Therefore, by circulating the treated water using the principle of electrolysis without stopping the system, Ca, Mg and $SiO_2$ are precipitated in the form of solids and discharged to the outside of the pipe system, thereby preventing scale formation in the pipe and removing the scale. Thereby maintaining the heat transfer performance of the pipe. As a result of the experiment, the heat transfer rate of the scaled pipe was 86.66% when the heat transfer rate of the new pipe was 100, and the heat transfer rate was recovered to 90.5% when the scaled pipe was operated for 1 month. The heat transfer rate recovered to 97.86% when driving for two months and to 98.72% for three months. It was confirmed that the scaling effect of the scale formed in the piping was understood in a relatively short experiment period, and the heat transfer performance was also influenced.

Comparative assessment of urban stormwater low impact strategies equipped with pre-treatment zones (침강지 시설이 조성된 LID 시설의 환경적 영향평가)

  • Yano, K.A.V.;Reyes, N.J.D.G.;Jeon, M.S.;Kim, L.H.
    • Journal of Wetlands Research
    • /
    • v.21 no.2
    • /
    • pp.181-190
    • /
    • 2019
  • Recently, Low impact development techniques, a form of nature-based solutions (NBS), were seen cost-efficient alternatives that can be utilized as alternatives for conventional stormwater management practices. This study evaluated the effectiveness of an infiltration trench (IT) and a small constructed wetland (SCW) in treating urban stormwater runoff. Long-term monitoring data were observed to assess the seasonal performance and cite the advantages and disadvantages of utilizing the facilities. Analyses revealed that the IT has reduced performance during the summer season due to higher runoff volumes that exceeded the facility's storage volume capacity and caused the facility to overflow. On the other hand, the pollutant removal efficiency of the SCW was impacted by the winter season as a result of dormant biological activities. Sediment data also indicated that fine and medium sand particles mostly constituted the trapped sediments in the pretreatment and media zones. Sediments in SCW exhibited a lower COD and TN load due to the phytoremediation and microbiological degradation capabilities of the system. This study presented brief comparison LID facilities equipped with pre-treatment zones. The identified factors that can potentially affect the performance of the systems were also beneficial in establishing metrics on the utilization of similar types of nature-based stormwater management practices.

Characteristics of Filtration Treatment Using Diatomite Filter Aids for Sewage Water Reuse (하수처리수 재이용을 위한 가압식 규조토 여과의 처리성능평가)

  • Lim, Byung Ran;Kim, Hee Seo;Go, Yeon Sil;Kim, Hyun Kab;Kim, Jong Hak;Lee, Tae Jin
    • Journal of Korean Society on Water Environment
    • /
    • v.35 no.2
    • /
    • pp.145-151
    • /
    • 2019
  • The purpose of this study was to investigate treatment characteristics of diatomite filtration, that would allow water recovery from biologically-treated effluent for reuse. Diatomite, Celpure 100, and acid clay were used as filter-aids, with a support filter manufactured from polyethylene (PE), and polypropylene (PP). This pre-coating process using diatomite filter-aids, is used in the filtration range of pressure filters, and has consistently provided high-quality separation. The results showed that variations in average removal efficiency of SS, and T-P from biologically treated effluent by the diatomite-coated PE filter, were approximately 82.2 ~ 88.9 % and 4.8 ~ 21.1 %, respectively. T-P treatment efficiency of the PP filter pre-coated with diatomite and $Celpure^{(R)}100$ at $57.64g/m^2$, was approximately $24{\pm}10%$ and $40{\pm}15%$ on average, respectively. Particle size distribution of secondary effluent varied from 0.05 to $200{\mu}m$, and $d_{50}$ value was $20.76{\mu}m$. The size distribution of particles in the diatomite filtrate ranged from 1.26 to $101.1{\mu}m$ when pre-coated with diatomite filter-aid, at a content of $57.64g/m^2$. Diatomite filter aids, i.e., the particles that form the pre-coating layer, capture very fine particles as well as macromolecules, owing to their complex structure with numerous fine microscopic pores, and surface properties. The filtration process using diatomite and $Celpure^{(R)}100$ as filter aids, has been successfully applied, to recover water from sewage for reuse. The disadvantage of the process, is that the particle size of the filter-aid is spent, because of pressurization.

Analysis of Dry Process Products for Recycling of Spent Secondary Batteries (폐 이차전지 리사이클링을 위한 건식공정 생성물 분석)

  • Kim, Jinhan;Kim, Yongcheol;Oh, Seung Kyo;Jeon, Jong-Ki
    • Clean Technology
    • /
    • v.27 no.2
    • /
    • pp.139-145
    • /
    • 2021
  • The purpose of this study is to recover valuable metals from spent batteries using a dry process. We focused on the effect of the smelting temperature on the composition of recovered solid and liquid products and collected gaseous products. After removal of the cover, the spent battery was left in NaCl solution and discharged. Then, the spent battery was made into a powder form through a crushing process. The smelting of the spent battery was performed in a tubular electric furnace in an oxygen atmosphere. For spent lithium-ion batteries, the recovery yield of the solid product was 80.1 wt% at a reaction temperature of 850 ℃, and the final product had 27.2 wt% of cobalt as well as other metals such as lithium, copper, and aluminum. Spent nickel-hydrogen batteries had a recovery yield of 99.2 wt% at a reaction temperature of 850 ℃ with about 37.6 wt% of nickel and other metals including iron. For spent nickel-cadmium batteries, the yield decreased to 65.4 wt% because of evaporation with increasing temperature. At 1050 ℃, the recovered metals were nickel (41 wt%) and cadmium (12.9 wt%). Benzene and toluene, which were not detected with the other secondary waste batteries, were detected in the gaseous product. The results of this study can be used as basic data for future research on the dry recycling process of spent secondary batteries.

Planting Patterns and Landscape Redevelopement of Pilam Seowon in Jangseong-Gun (장성 필암서원(筆巖書院)의 식재현황과 정비방안)

  • Lee, Won-Ho
    • Journal of the Korean Institute of Traditional Landscape Architecture
    • /
    • v.29 no.1
    • /
    • pp.131-141
    • /
    • 2011
  • This study, as a purpose of base study for landscape redevelopement of Seowon, pointed out problems of planting patterns in each sector and suggested an alternative through analyzing old literature, complete enumeration survey in each sector and taking aerial images. the conclusions drawn from this study are as follows. A Pilam Seowon(historic site no 242) is located in a Pyungya-Sanrok(plain and mountain) district in Jangsung-gun and has Junhak-Humyo(Study room in the front and Shirne in the back) type. 23 taxonomic group of arbor, 6 taxonomic group of shrub and 5 taxonomic group of flowers are planted high-densitily in limited flat surface. It can be classified into being planted by family and being planted through landscape redevelopement in 1980s. Korean traditional trees are planted in this area like Pinus densiflora, Juniperus chinensis L., Thuja orientalis L., Zelkova serrato Makino, Sophora japonica L., Lagerstroemia indica, Prunus mume include Ginkgo biloba which is old big tree and is registered in Jangsung-gun as protected trees. The tea tree in this area was introduced from wild tea plantation in Yonhwa moutain and was planted. From now on, we have to pay consideration a form management of planted trees in the historical area, rearrangement of plant density due to over planting, removal of alien trees like Pinus bungeana and Canna generalisa, prevention a dwarfishness of main area due to over planting in outside facilities, recovery a alienation among each planting area, and planting concept from plants drawings on wall of buildings can be suggested. The implications of this case study is that introduction of over planting can make more problems like losing sense of place. Therefore, we must do a actual state survey on traditional landscape area like Seowon from preservation point of view.

Gingival pigmentation treatment using Er;YSGG laser (Er;YSGG 레이저를 이용한 치은 색소침착 제거 증례보고)

  • Kim, Hyunjong
    • Journal of the Korean Academy of Esthetic Dentistry
    • /
    • v.30 no.2
    • /
    • pp.53-58
    • /
    • 2021
  • The attractiveness of the gingiva is determined by its color, shape, and the shape and location of the boundary between the teeth and the gingival tissue. The standards beauty, balance, and health of the gingiva are all different, but the general public would agree that a coral pink gingiva is more beautiful than black or brown gingiva. Hence, one would be able to smile more confidently in public if he or she receives a gingival pigmentation removal surgery that changes the color of black or brown gums to a beautiful pink color with relative simplicity. The color of one's gingiva varies from pale pink to deep bluish purple, depending on many health components. The most prominent among these include the vascular supply, epithelial thickness, the degree of keratinization, and the presence of pigment in the epithelium. Melanin, carotene, reduced hemoglobulin, and oxyhemoglobulin are the main pigments contributing to the normal color of the oral mucosa. The health of one's gingival tissue are essential for an attractive smile. Excessive melanin deposits in the basal and early basal layers of the epithelium stored in the form of melanosomes frequently cause pigmentation. Although there are many different procedures to remove this pigmentation, the it was removed using the Er;YSGG laser. It is my wish that, through this case study, many people