• The Transactions of the Korean Institute of Electrical Engineers D
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• v.49 no.3
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• pp.124-132
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• 2000

In this paper, presented are an active surface-micromachined silicon accelerometer, force rebalance loop using parametric robust control method, and experimental results with a real micromachined accelerometer. And finally, a robust controller of the form of PID compensator was designed to construct force rebalance loop. Through the frequency response analysis, it is shown that the loop guarantees appropriate stability and robustness. Experiments with a real accelerometer demonstrated that the proposed loop effectively controls the position of the accelerometer's proof mass. It also demonstrated that the resolution of the fabricated accelerometer is better than 1mg. Compared with a commercial accelerometer the proposed force rebalance silicon accelerometer showed better performances.

• Journal of Institute of Control, Robotics and Systems
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• v.20 no.5
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• pp.563-569
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• 2014

This article focuses on a hemispherical resonator gyro driven by the Coriolis effect. A hemispherical shell, called a resonator, is maintained in the resonance state by amplitude control and phase locking control. Parametric excitation has been used to control the amplitude. For rate measurement mode or FTR mode, nodal points have been kept to an amplitude of zero. Angular rate measurement has been demonstrated by rotating a resonator. Frequency mismatch between two stiffness principal axes is a major cause of low performance: vibrating pattern drift and reduced control effectiveness. This mismatch has been reduced significantly by the addition of small mass. A negative spring effect, which lowers resonance frequencies, has been verified experimentally.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.14 no.1
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• pp.64-72
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• 2004

In this paper. we analyse and present electro-mechanical dynamic characteristics of a micro-machined vibrating silicon ring gyroscope which can measure angular velocities about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support-ligaments which are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-plane motion which are coupled by the gyro-effect due to the rotation of the gyroscope main body. The motions of the ring are electro-statically derived. sensed and balanced by electrodes. The equations of motion are formulated. The measuring method of angular velocities by force-to-rebalance is presented. The dynamic characteristics of a ring gyroscope are calculated and compared.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.11a
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• pp.970-976
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• 2003

In this paper, we analyse and present electro-mechanical dynamic characteristics of a micro-machined vibrating silicon ring gyroscope which can measure angular velocities about three orthogonal axes. The ring gyroscope has a ring connected to the gyroscope main body by support-ligaments which are arranged with cyclic symmetry. The natural modes of its vibration can be distinguished into the in-plane motion and the out-of-plane motion which are coupled by the gyro-effect due to the notation of the gyroscope main body. The motions of the ring are electro-statically derived, sensed and balanced by electrodes. The equations of motion are formulated. The scheme of angular velocities sensing by force-to-rebalance method is presented. The dynamic characteristics of a ring gyroscope are calculated and compared.

• Proceedings of the KSME Conference
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• 2000.04b
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• pp.886-891
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• 2000

One of the domestic co-generation plants have undergone excessive vibration problems of turbine attributed to external force for years. The root cause of turbine vibration may be shan alignment problem which sometimes is changed by thermal expansion and external farce, even if turbine technicians perfectly performed it. To evaluate the alignment condition from plant start-up to full load, a strain measurement of turbine and main steam piping subjected to thermal loading is monitored by using strain gages. The strain gages are bonded on both bearing housing adjusting bolts and pipe stoppers which. installed in the x-direction of left-side main steam piping near the turbine inlet in order to monitor closely the effect of turbine under thermal deformation of turbine casing and main steam piping during plant full load. Also in situ load of constant support hangers in main steam piping system is measured by strain gages and its results are used to rebalance the hanger rod load. Consequently, the experimental stress analysis by using strain gages turns out to be very useful tool to diagnose the trouble and failures of not only to stationary components but to rotating machinery in power plants.