• 대한전자공학회:학술대회논문집
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• 대한전자공학회 1999년도 하계종합학술대회 논문집
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• pp.269-274
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• 1999

As the semiconductor industry enters the next century, we are facing to the technological changes and challenges. Optical lithography has driven by the miniaturisation of semiconductor devices and has been accompanied by an increase in wafer productivity and performance through the reduction of the IC image geometries. In the last decade, DRAM(Dynamic Random Access Memories) have been quadrupoling in level of integration every two years. Korean chip makers have been produced the memory devices, mainly DRAM, which are the driving force of IC＇s(Integrated Circuits) development and are the technology indicator for advanced manufacturing. Therefore, Korean chip makers have an important position to predict and lead the patterning technology. In this paper, we will be discussed the limitations of the optical lithography, such as KrF and ArF. And, post optical lithography technology, such as E-beam lithography, EUV and E-beam Projection Lithography shall be introduced.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2000년도 춘계학술대회논문집
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• pp.1084-1089
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• 2000

The basic equations are derived for the analysis of a stepped labyrinth gas seal which are generally used in high performance compressors, gas turbines, and steam turbines. The Bulk-flow is assumed for a single cavity control volume and the flow is assumed to be completely turbulent in circumferential direction. Moody's wall-friction-factor formula is used for the calculation of wall shear stresses in the single cavity control volume. For the reaction force developed by the seal, linearized zeroth-order and first-order perturbation equations are developed for small motion about a centered position. Integration of the resultant first-order pressure distribution along and around the seal defines the rotordynamic coefficients of the stepped labyrinth gas seal. The leakage and rotordynamic characteristic results of the stepped labyrinth gas seal are presented and compared with Scharrer's theoretical analysis using Blasius' wall-friction-factor formula.

• 한국정밀공학회지
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• 제23권9호
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• pp.76-83
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• 2006

Machining accuracy is closely related with tool deflection induced by cutting forces. In this research, cutting forces and tool deflection in end milling are expressed as a closed form of tool rotational angle and cutting conditions. The discrete cutting fores caused by periodic tool entry and exit are represented as a continuous function using the Fourier series expansion. Tool deflection is predicted by direct integration of the distributed loads on cutting edges. Cutting conditions, tool geometry, run-outs and the stiffness of tool clamping part are considered together far cutting forces and tool deflection estimation. Compared with numerical methods, the presented method has advantages in prediction time reduction and the effects of feeding and run-outs on cutting forces and tool deflection can be analyzed quantitatively. This research can be effectively used in real time machining error estimation and cutting condition selection for error minimization since the form accuracy is easily predicted from tool deflection curve.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1992년도 춘계학술대회 논문집
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• pp.364-368
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• 1992

The conventional loading process of workpieces for a CNC lathe is performaed either by human or by a general robot. It is not suitable for a general robot to load workpieces because of high price and inefficiency. Starting from the description of the environment around CNC lathes and the analysis ofloading process, we have developed the task-oriented loading manipulator. The characteristics of a loading manipulator are the following: to load/unload heavy workpieces, to decrease the whole porcess time. The air-chuck to load heavy workpiece has high clamping force and light weight. A loading manipulator has accomplished both the integration of independent automation techniques and cost-down effect of product. A loading manupulator developed in this project has been designed for general loading process. The loading manipulator is capable of carrying heavy payload with respect to weight of robot in short cycle time.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2015년도 제46회 하계학술대회
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• pp.1229-1230
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• 2015

Monitoring of mechanical properties of tissues as well as direction/quantities of forces is considered as an essential way for disease diagnosis and haptic feedback systems. There are extensively increasing interests for measuring normal/shear force and touch feelings, especially for surgery systems. Highly sensitive and flexible tactile sensor is needed in palpation for detecting cancer cyst as well as real time pressure monitoring in minimally invasive surgery (MIS). Importantly, MEMS technique with miniaturized fabrication technique is essential for the on-chip integration with biopsy and biomedical grasper. Here, we propose the flexible tactile sensor with high sensitivity based on piezoresistive effect. We analyzed the sensitivity according to the pressure and directions and showed the ability of discrimination of the different materials surfaces, illustrating the feasibility of the flexible tactile sensor for biomedical grasper by mimicking human skin.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2008년도 춘계학술대회논문집
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• pp.589-592
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• 2008

For the system of a droplet on an insulator-coated electrode, the Lippmann-Young equation is derived by considering the deformation of interface near the three-phase contact line. The equation governing the deformation of interface, which describes the local balance of the Maxwell stress and the capillary pressure, is integrated along the interface. The integration leads to the Lippmann-Young equation which is shown to represent the macroscopic balance of horizontal force acting on entire meniscus. Young's angle is assumed to be not affected by the Maxwell stress. The meaning and validity of the assumption are discussed.

• Journal of Mechanical Science and Technology
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• 제15권9호
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• pp.1217-1225
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• 2001

The governing equations are derived for the analysis of a stepped labyrinth gas seal generally used in high performance compressors, gas turbines, and steam turbines. The bulk-flow is assumed for a single cavity control volume set up in a stepped labyrinth cavity and the flow is assumed to be completely turbulent in the circumferential direction. The Moodys wall-friction-factor model is used for the calculation of wall shear stresses in the single cavity control volume. For the reaction force developed by the stepped labyrinth gas seal, linearized zeroth-order and first-order perturbation equations are developed for small motion about a centered position. Integration of the resultant first-order pressure distribution along and around the seal defines the rotordynamic coefficients of the stepped labyrinth gas seal. The resulting leakage and rotordynamic characteristics of the stepped labyrinth gas seal are presented and compared with Scharrers theoretical analysis using Blasius wall-friction-factor model. The present analysis shows a good qualitative agreement of leakage characteristics with Scharrers analysis, but underpredicts by about 20%. For the rotordynamic coefficients, the present analysis generally yields smaller predictied values compared with Scharrers analysis.

• 한국유체기계학회 논문집
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• 제4권2호
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• pp.15-21
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• 2001

Basic equations and their solution procedure we derived for the analysis of an annular pump seal in which the rotor has a large static displacement from the centered position. The Bulk-flow is assumed for a control volume set in the seal clearance and the flow is assumed to be completely turbulent in axial and circumferential direction. Moody's wall-friction-factor formula is used for the calculation of wall shear stresses in the control volume. For the reaction force developed by the seal, linearized zeroth-order and first-order perturbation equations are developed for small motion about an eccentric position. Flow variables are expanded by using Fourier series for the solution procedure. Integration of the resultant first-order pressure distribution along and around the seal defines the 12 elements of rotordynamic coefficients of the eccentric annular pump seal. The results of leakage and rotordynamic coefficients aye presented and compared with the Marquette's experimental results and the San Andres' theoretical analysis.

• Tribology and Lubricants
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• 제18권1호
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• pp.24-33
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• 2002

The basic equations are derived for the analysis of a staggered labyrinth gas seal which are generally used in high performance compressors and steam turbines. The Bulk-flow is assumed for a single cavity control volume and the flow is assumed to be completely turbulent in circumferential direction. Moody's wall-friction-factor formula is used for the calculation of wall shear stresses in the single cavity control volume. For the reaction force developed by the seal, linearized zeroth-order and first-order perturbation equations are developed for small motion about a centered position. Integration of the resultant first-order pressure distribution along and around the seal defines the rotordynamic coefficients of the staggered labyrinth gas seal. Theoretical results of leakage and rotordynamic characteristics for the staggered labyrinth gas seal are compared with those of the plain seal and see-through labyrinth seal.

• 한국시스템다이내믹스연구
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• 제1권1호
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• pp.133-157
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• 2000

This paper deals with the social system from the point of system thinking consisting the fundamental construct of system dynamics. The Bertalanffy's general system theory, having been criticized because of its ambiguity, and the complex science theory, emerging system theory, are integrated by using the system thinking which is characterized with three concepts, 'feedback thinking', 'dynamic thinking', 'operational thinking'. In the integration, system thinking suggests the dynamic pattern of the social system have not only an equilibrium status but also complex status. The science of complexity gives an implication to system dynamics the important of the uncertainty and complexity if we interpret the social system as an open system. To show more concrete description, I simulate the cooperation model based on the iterated prisoner dilemma. The simulation results show the diverse patterns of cooperation and betrayal. Especially the sensitivity of initial payoff will cause the chaotic strategic landscapes as the game gose on. These results mean that we should not give the hasty prescription to control social system artificially. Because social system retains the self-organizing force in itself.