• 마이크로전자및패키징학회지
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• 제22권1호
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• pp.43-49
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• 2015

전자 제품의 경박 단소화 및 고집적화가 이루어 지면서 반도체 칩뿐만 아니라 유기 기판도 고집적화가 요구되고 있다. 본 연구는 인쇄회로기판의 미세 피치 회로에 대한 고온고습 전압인가 시험을 실시하여 불량 메커니즘을 연구하였다. $130^{\circ}C/85%RH/3.3V$와 $135^{\circ}C/90%RH/3.3V$ 시험조건에서 고온고습 전압시험(Biased HAST)의 가속 계수는 2.079로 계산되었다. 불량 메커니즘 분석을 위하여 집속이온빔(FIB) 분석이 이용되었다. (+)전극에서는 콜로이드 형태의 $Cu_xO$와 $Cu(OH)_2$가 형성되었으며, (-)전극에서는 수지형태의 Cu가 관찰되었다. 이를 통해 $Cu^{2+}$ 이온과 전자($e^-$)가 결합한 수지상 Cu에 의해 절연파괴가 일어난다는 것을 확인하였다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2008년도 추계학술대회 논문집
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• pp.134-137
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• 2008

The effects of residual stress and surface defects on the mechanical properties of the high carbon steel filament used for the automotive tire have been experimentally investigated. The samples were fabricated with annealing temperature. The residual stress was measured by focused ion beam and strain mapping software which has advantages, such as data with high accuracy and fast data acquisition time. Mechanical properties, such as tensile strength and fatigue resistance, were gradually increased up to $200^{\circ}C$ and then slightly decreased. From the measurement of residual stress and level of surface defect, it was revealed that the critical factor was varied with different temperature region. That is, the fatigue resistance increased due to decreasing the residual stress and decreased due to increasing the size and distribution of surface defect.

• 한국정밀공학회지
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• 제24권3호
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• pp.134-139
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• 2007

We report the suspension of individual multi-walled carbon nanotubes (MWNTs) from the bottom substrate using deep trench electrodes that were fabricated using optical lithography. During drying of the solution in dielectrophoretic assembly, the capillary force pulls the MWNT toward the bottom substrate, and it then remains as a deformed structure adhering to the bottom substrate after the solution has dried out. Small-diameter MWNTs cannot be suspended using thin electrodes with large gaps, but large-diameter MWNTs can be suspended using thicker electrodes. We present the statistical experimental results for successful suspension, as well as the feasible conditions for a MWNT suspension based on a theoretical approach.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.57-58
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• 2002

Asperity arrays and Independent asperities were fabricated on a silicon plate. Then pull-off and friction forces were measured on each asperity pattern by using AFM (atomic force microscope) in humid air and high vacuum of $2{\times}10^{-5}$ Pa. The probe of AFM cantilever has a flat square of about $1\;{\mu}m^2$ on its tip. The results showed that the pull-off force was proportional to the curvature radius of asperity peak in each ambient condition. The friction force was proportional to the pull-off force and was slightly higher in the humid air than in the high vacuum.

• Applied Microscopy
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• 제47권3호
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• pp.165-170
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• 2017

Gas vesicles are intracellular gas-filled protein-shelled nanocompartments. The structures are spindle or cylinder-shaped, and typically $0.1{\sim}2{\mu}m$ in length and 45~250 nm in width. A variety of prokaryotes including photosynthetic bacteria and halophilic archaea form gas vesicles in their cytoplasm. Gas vesicles provide cell buoyancy as flotation devices in aqueous habitats. They are used as nanoscale molecular reporters for ultrasound imaging for biomedical purposes. The structures in halophilic archaea are poorly resolved due to the low signal-to-noise ratio from the high salt concentration in the medium. Such a limitation can be overcome using focused ion beam-thinning or inelastically scattered electrons. As the concentric bodies (~200 nm in diameter) in fungi possess gas-filled cores, it is possible that the concept of gas vesicles could be applied to eukaryotic microbes beyond prokaryotes.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.466-471
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• 2004

In focused-ion-beam (FIB) application of micromachining and device transplantation, four kinds of FIB processes, namely FIB sputtering, FIB-induced etching, redeposition, and FIB-induced deposition, are well utilized. As with FIB systems, scanning electron microscopes(SEMs) were extensively used in the semiconductor industry. They are the tools of choice for defect review and providing the image resolution needed for process monitoring. The enhanced capabilities of a dual-column on one chamber system are quickly becoming realized by the nano industry for performing a wide range of application.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2005년도 창립60주년 기념 추계 학술대회
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• pp.238.1-238.1
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• 2005

• 한국세라믹학회지
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• 제42권4호
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• pp.287-291
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• 2005

나노인덴테이션 시험시의 알루미늄의 팝인 변형에 대하여 연구하였다. 팝인 현상은 알루미늄의 표면 상태에 따라서 발생 유무가 결정되었다. 기계연마한 알루미늄에서는 팝인이 일어나지 않았고, 전해연마한 시편에서만이 팝인이 일어났다. 팝인이 일어나는 경우에는 나노인덴테이션 초기단계에서 탄성변형이 일어났으며 그 후에 갑자기 팝인 변형이 일어났으며 팝인 후에는 탄소성 변형이 일어났다. 전위 활동에 근거한 팝인 발생 메카니즘을 제시하였으며 이는 FIB와 TEM에 의한 미세구조 분석 결과와 일치하였다.

• 한국정밀공학회지
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• 제24권11호
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• pp.108-115
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• 2007

We have designed a high transmission C-shaped aperture using finite differential time domain (FDTD) technique. The C-shaped aperture was fabricated in the aluminum thin film on a glass substrate using a focused ion beam (FIB) milling. Nano-size patterning was demonstrated with a vacuum contact device to keep tight contact between the Al mask and the photoresist. Using 405 nm laser, we recorded a 50 nm-size dot pattern on the photoresist with the aperture and analyzed the spot size dependent on the dose illuminated on the aperture.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 하계학술대회 논문집 D
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• pp.1444-1446
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• 1998

Direct writing of copper lines has been achieved by pyrolytic decomposition of copper formate films using a focused argon ion laser beam($\lambda$ =514.5nm) on a glass. The thickness and linewidth of the deposited copper films were considered as a function of laser power and scan speed. As the result from AES, there are no other elements except for copper after decomposition in the atmospheric ambient.