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Fabrication of Nano-bridge Using a Suspended Multi-Wall Carbon Nanotube  

Lee, Jong-Hong (충남대학교 메카트로닉스공학과)
Won, Moon-Cheol (충남대학교 메카트로닉스공학과)
Seo, Hee-Won (한국기계연구원 나노공정장비연구센터)
Song, Jin-Woo (한국기계연구원 나노공정장비연구센터)
Han, Chang-Soo (한국기계연구원 나노공정장비연구센터)
Publication Information
Journal of the Korean Society for Precision Engineering / v.24, no.3, 2007 , pp. 134-139 More about this Journal
Abstract
We report the suspension of individual multi-walled carbon nanotubes (MWNTs) from the bottom substrate using deep trench electrodes that were fabricated using optical lithography. During drying of the solution in dielectrophoretic assembly, the capillary force pulls the MWNT toward the bottom substrate, and it then remains as a deformed structure adhering to the bottom substrate after the solution has dried out. Small-diameter MWNTs cannot be suspended using thin electrodes with large gaps, but large-diameter MWNTs can be suspended using thicker electrodes. We present the statistical experimental results for successful suspension, as well as the feasible conditions for a MWNT suspension based on a theoretical approach.
Keywords
NEMS; Multi-wall Carbon Nanotube; Resonator; Bridge; Dielectrophoresis; Capillary Force; Focused Ion Beam;
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