• 한국진공학회지
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• 제7권3호
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• pp.167-272
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• 1998

ECR plasma CVD를 이용한 SiOF박막은 낮은 유전상수를 가지고 있으며, 기존의 공정과의 정합성이 우수해 다층배선 공정에 채용이 유망한 재료이지만 수분의 흡수로 인한 유전율의 상승과 후속공정의 안정성이 문제점으로 부각되고 있다. 따라서 본 연구에서는 SiOF박막의 내흡습성과 후속공정에서의 안정성을 향상시키기 위하여 SiOF박막을 증착한 후 후속 산소 플라즈마 처리를 행하였다. SiOF박막은 산소 플라즈마 처리를 수행함으로써 SiOF박막의 밀도가 증가하고, 수분과의 친화력이 강한 Si-F 결합이 감소하는 것이 주요한 원인으로 사료된다. 하지만 플라즈마 처리 시간이 5분 이상으로 증가하면 유전율의 증가가 일어난다. 따라서 본 실험에서는 산소 플라즈마 처리조건이 마이크로파 전력이 700W, 공정 압력이 3mTorr, 기판온도가 $300^{\circ}C$일 경우 플라즈마 처리시간은 3분이 적당한 것으로 생각 된다.

• Nuclear Engineering and Technology
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• 제41권4호
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• pp.531-544
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• 2009

This paper is intended to provide key issues and current research outcomes on accelerator-based Boron Neutron Capture Therapy (BNCT). Accelerator-based neutron sources are efficient to provide epithermal neutron beams for BNCT; hence, much research, worldwide, has focused on the development of components crucial for its realization: neutron-producing targets and cooling equipment, beam-shaping assemblies, and treatment planning systems. Proton beams of 2.5 MeV incident on lithium target results in high yield of neutrons at relatively low energies. Cooling equipment based on submerged jet impingement and micro-channels provide for viable heat removal options. Insofar as beam-shaping assemblies are concerned, moderators containing fluorine or magnesium have the best performance in terms of neutron accumulation in the epithermal energy range during the slowing-down from the high energies. NCT_Plan and SERA systems, which are popular dose distribution analysis tools for BNCT, contain all the required features (i.e., image reconstruction, dose calculations, etc.). However, detailed studies of these systems remain to be done for accurate dose evaluation. Advanced research centered on accelerator-based BNCT is active in Korea as evidenced by the latest research at Hanyang University. There, a new target system and a beam-shaping assembly have been constructed. The performance of these components has been evaluated through comparisons of experimental measurements with simulations. In addition, a new patient-specific treatment planning system, BTPS, has been developed to calculate the deposited dose and radiation flux in human tissue. It is based on MCNPX, and it facilitates BNCT efficient planning based via a user-friendly Graphical User Interface (GUI).

• 대한전기학회:학술대회논문집
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• 대한전기학회 2009년도 제40회 하계학술대회
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• pp.1338_1339
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• 2009

Dye-sensitized solar cell (DSC) consists of photo electrode, counter electrode and electrolyte. Photo electrode has titanium oxide layer with dye molecule to create electrons. And counter electrode is made of one layer that has catalytic ability for redox system such as the iodide/triiodide couple. Most DSC researchers use platinum as catalyst on counter electrode because platinum has good catalytic ability and conductivity. Platinum is doped on fluorine-doped tin oxide glass with different methods such as sputtering method, electrochemical method and so on. In this paper, we deposit platinum on counter electrode glass with two methods. One is the radio frequency (RF) sputtering method and the other is the chemical method with heating treatment. Finally, we compare the photovoltaic characteristics of DSCs that are assembled using two different counter electrodes.

• 한국전기전자재료학회논문지
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• 제24권11호
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• pp.911-914
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• 2011

We optimize electrical and optical properties of thermal and SF6 plasma treated indium tin oxide (ITO)/Al based reflector for high-power ultraviolet (UV) light-emitting diodes (LEDs). After thermal and $SF_6$ plasma treatments of ITO/Al reflector, the specific contact resistance decreased from $1.04{\times}10^{-3}\;{\Omega}{\cdot}cm^2$ to $9.21{\times}10^{-4}\;{\Omega}{\cdot}cm^2$, while the reflectance increased from 58% to 70% at the 365 nm wavelength. The low resistance and high reflectance of ITO/Al reflector are attributed to the reduced Schottky barrier height (SBH) between the ITO and AlGaN by large electronegativity of fluorine species and reduced interface roughness between the ITO and Al, respectively.

• 대한위암학회:학술대회논문집
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• 대한위암학회 2002년도 제14회 추계학술대회
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• pp.24-33
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• 2002

Clinical application of positron emission tomography (PET) is rapidly increasing for the detection and staging of cancer at whole-body studies performed with the glucose analogue tracer 2-[fluorine-18]fluoro-2-deoxy-D-glucose (FDG). Although FDG PET cannot match the anatomic resolution of conventional imaging techniques in gastrointestinal and abdominal organs, it is particularly useful for identification and characterization of whole body at the same time. FDG PET can show foci of metastatic disease that may not be apparent at conventional anatomic imaging and can aid in the characterization of indeterminate soft-tissue masses. Most gastrointestinal cancer need to surgical management. FDG PET can improve the selection of patients for surgical treatment and thereby reduce the morbidity and mortality associated with inappropriate surgery. FDG PET is also useful for the early detection of recurrence and the monitoring of therapeutic effect. The gastrointestinal cancers, such as gastroeso-phageal cancer, colorectal cancer, liver cancer and pancreatic cancer, are common malignancies in Korea. PET is one of the most promising and useful methodology for the management of gastric cancer as well as other gastrointestinal cancers.

• 대한임상독성학회지
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• 제8권1호
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• pp.43-45
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• 2010

A 22-year-old woman was referred to our emergency department for the treatment of a chemical injury on her arm. She had accidentally spilled 99% trifluoroacetic anhydride (TFAA) over her left forearm during an organic chemistry experiment. She visited a primary care unit, and then she was referred to our hospital for inactivation of the released fluoride ions. Her skin lesions were different from those caused by hydrofluoric acid (HF) injury. The injured area showed painful whitish maculae and patchy areas with accentuated rim. No vesiculation and bulla formation was detected. We intradermally injected a 5% solution of calcium through a 24-gauge needle into the burned skin. After the injection, she complained of more severe pain. Although TFAA contains fluorine, it does not release free fluoride ions on contact with the skin, unlike HF. In fact, application of calcium gluconate for TFAA burns is not recommended. Rather, it should be avoided since it increases pain and local abscess formation.

• Journal of Gastric Cancer
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• 제2권4호
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• pp.184-190
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• 2002

Clinical application of positron emission tomography (PET) is rapidly increasing for the detection and staging of cancer at whole-body studies performed with the glucose analogue tracer 2-[fluorine-18]fluoro-2-deoxy-D-glucose (FDG). Although FDG PET cannot match the anatomic resolution of conventional imaging techniques in gastrointestinal and abdominal organs, it is particularly useful for identification and characterization of whole body at the same time. FDG PET can show foci of metastatic disease that may not be apparent at conventional anatomic imaging and can aid in the characterization of indeterminate soft-tissue masses. Most gastrointestinal cancer need to surgical management. FDG PET can improve the selection of patients for surgical treatment and thereby reduce the morbidity and mortality associated with inappropriate surgery. FDG PET is also useful for the early detection of recurrence and the monitoring of therapeutic effect. The gastrointestinal cancers, such as gastroesophageal cancer, colorectal cancer, liver cancer and pancreatic cancer, are common malignancies in Korea. PET is one of the most promising and useful methodology for the management of gastric cancer as well as other gastrointestinal cancers.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.509-509
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• 2011

Superhydrophobic surfaces on alloyed steels were fabricated with a non-conventional method of plasma etching and subsequent water immersion procedure. High aspect ratio nanopatterns of nanoflake or nano-needle were created on the steels with various Cr content in its composition. With CF4 plasma treatment in radio-frequence chemical vapor deposition (r.-f. CVD) method, steel surfaces were etched and fluorinated by CF4 plasma, which induced the nanopattern evolution through the water immersion process. It was found that fluorine ion played a role as a catalyst to form nanopatterns in water elucidated with XPS and TEM analysis. The hierarchical patterns in micro- and nano scale leads to superhydrophobic properties on the surfaces by deposition of a hydrophobic coating with a-C:H:Si:O film deposited with a gas precursor of hexamethlydisiloxane (HMDSO) with its lower surface energy of 24.2 mN/m, similar to that of curticular wax covering lotus surfaces. Since this method is based on plasma dry etching & coating, precise patterning of surface texturing would be potential on steel or metal surfaces. Patterned hydrophobic steel surfaces were demonstrated by mimicking the Robinia pseudoacacia or acacia leaf, on which water was collected from the humid air using a patterned hydrophobicity on the steels. It is expected that this facile, non-toxic and fast technique would accelerate the large-scale production of superhydrophobic engineering materials with industrial applications.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 광주전남지부
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• pp.107-108
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• 2006

High $J_c$ $YBa_2Cu_3O_x$, superconducting films were fabricated by MOD method using fluorine-free dichloroacetic acid(DCA) as chelating solvent for preparing precursor solution. DCA-MOD precursor solution was coated on a single crystal (001) $LaAlO_3$(LAO) substrate by a dip coating method with a speed of 25 mm/min. Coated films were calcined at lower temperature up to $500^{\circ}C$ and Conversion heat treatment was performed at various temperatures of $780{\sim}810^{\circ}C$. SEM observations showed that films have very dense microstructures for the films prepared at the temperature higher than $800^{\circ}C$ regardless of diluting solvent; methanol or 2-methoxyethanol. A High critical current density ($J_c$) of 1.28 $MA/cm^2$ (@77 K and self-field) was obtained for the YBCO film prepared using 2-methoxyethanol as a solvent.

• 한국진공학회지
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• 제17권2호
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• pp.90-95
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• 2008

본 연구에서는 열 및 불산을 이용한 후처리 공정이 레지스트층을 이용하여 제작된 탄소나노튜브의 전자 방출 특성에 미치는 영향에 대하여 연구하였다. 전자 방출 전류는 초기에 $8V/{\mu}m$의 전계에서 $4.2{\mu}A/cm^2$의 전류에서 열 및 불산 처리 시 각각 $7.5mA/cm^2$ 및 $79mA/cm^2$로 향상되었다. 하지만 열 및 불산 처리를 동시에 실시한 경우 전류 밀도는 $426mA/cm^2$ 및 $656mA/cm^2$로 향상된 전자 방출 특성을 얻을 수 있었다. 전자 방출 특성은 처리 순서에 따라 증가하는 양이 다르게 나타났으며, 가장 우수한 전자 방출 특성은 열 처리를 먼저 시행 후, 불산 처리를 하는 공정에서 나타났다. 이는 열 처리에 의한 탄소나노튜브의 결정성의 증가와 이후 불산 처리에 의한 불소 결합의 증가에 기인함을 알 수 있었다. 강한 불소 결합은 탄소나노튜브 에미터의 전자 방출 특성의 향상에 크게 기여를 하였다.