• Carbon letters
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• 제28권
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• pp.66-71
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• 2018

To improve the flame retardant performance of cellulose fibers, fluorine functional groups were introduced under various controlled fluorination conditions. The properties of the fluorinated cellulose fibers were analyzed by X-ray photoelectron spectroscopy and a thermogravimetric analysis. The fluorine functional group content in the fluorinated cellulose fibers increased with an increase in the fluorination temperature. However, the fluorination reaction increased the char yield and decreased the rate of degradation of the cellulose fibers by introducing donors, enabling the formation of a thick and compact char layer. Therefore, the flame retardant properties of cellulose fibers were improved following the fluorination treatment.

• 방사선산업학회지
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• 제3권1호
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• pp.1-5
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• 2009

The variation of MgO surfaces, in which fluorine was contained (F-MgO), by high energy electron-beam (EB) was studied using X-ray photoelectron spectroscopy (XPS). Fluorine on the MgO surface was eliminated by EB treatment with the consequence that the electronic structures of Mg, O and C were varied. Moreover, as a result of oxidation of carbon species on the surface by high dose EB treatment (90 kGy), the concentration of carbonate and carboxyl species on the surface was increased. In this experiment, it was confirmed that the structure of oxidized metal surface can be adjusted by varying conditions of EB treatment (energy and dose). This result implies that EB can be applied for developing new catalysts.

• 한국전기전자재료학회논문지
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• 제34권2호
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• pp.85-89
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• 2021

High reliability thin film transistors are important factors for next-generation displays. The reliability of transparent a-IGZO semiconductors is being actively studied for display applications. A plasma treatment can fill the oxygen vacancies in the channel layer and the channel layer/insulating layer interface so that the device can work stably under a bias voltage. This paper studies the effect of plasma treatment on the performance of a-IGZO TFT devices. The influence of different plasma gases on the electrical parameters of device and its working reliability are reviewed. The article mentions argon, fluorine, hydrogen and several ways of processing in the atmosphere. Among these methods, F (fluorine) plasma treatment can maximize equipment reliability. It is expected that the presented results will form a basis for further research to improve the reliability of a-IGZO TFT.

• 자원리싸이클링
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• 제16권4호
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• pp.27-32
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• 2007

불소함유 폐수의 처리 후의 재사용 방안과 관련하여 칼슘을 침전제로 한 침전법에 의한 불소제거양상에 관해 조사하였다. 초기 불소농도를 10 mM로 고정한 상태에서 pH 4의 조건에서 칼슘 첨가에 따른 불소의 제거는 반응개시 수 분 이내에 신속히 진행되었으며 반응속도론적으로 2차 반응을 따르는 것으로 파악되었다. 또한 첨가된 칼슘의 양이 증가할수록 반응속도상수가 커지는 것으로 관찰되었다. pH 4에서의 불소제거율을 최대제거율로 설정한 상태에서 pH 2 및 pH 3의 조건에서 칼슘을 당량비 이상으로 첨가하여 불소의 제거율을 관찰한 결과, 칼슘의 첨가량이 당량비의 10 배로 첨가되었을 때 pH 2에 대해서는 불소제거율이 약 70%,그리고 pH 3에서는 약 96%의 불소가 제거되는 것으로 나타났다. 온도의 증가시 칼슘 첨가에 따른 불소의 제거율은 상승하여 침전반응은 흡열반응의 특성을 나타내었다. 불소폐수에 $SiF_6{^{2-}}$가 공존할 경우 불소의 제거율은 감소하였으며 침전반응에 의해 형성된 침전물의 등전점은 pH 5 부근인 것으로 파악되었다.

• 한국의류산업학회지
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• 제15권3호
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• pp.461-466
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• 2013

Synthetic fiber materials were developed due the desire of consumers for high-quality, high-performance and comfort. A high functionality of synthetic fiber can be obtained through surface treatment that can improve hydrophilic properties, color depth after dyeing and adhesion properties. These advantages create added-value. Hydrophobic properties are an important feature to create added-value (such as hydrophilic properties). One side processing is a method of imparting to contrary function on the front and rear side. In this study, fluorine-coated Nylon/PU blended fabric was treated on only one side with a low-temperature plasma treatment; subsequently, the contact angles decreased by increasing the time and intensity of the plasma treatment. The contact angle of the untreated surface and the treated surface was different. It a showed a difference in the properties of both surfaces. Tensile strength and stiffness decreased by increasing the time and intensity of the plasma treatment. However, plasma treatment did not significantly change the tensile strength and stiffness on both surfaces of the fabric. SEM photographs showed the surface of fluorine-coated fabric and the etching surface by using plasma treatment on the fabric. Plasma treatment was confirmed not to affect the physical properties of the fabric.

• 대한환경공학회지
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• 제22권6호
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• pp.1127-1137
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• 2000

인산염 폐수와 불소폐수를 대상으로 각각 $La^{3+}$를 주성분으로 하는 희토수처리제와 조염화희토화합물로 제조된 수처리제를 적용하는 방안을 검토하였다. $La^{3+}$의 인산염 농도 대비 투입몰비에 따른 인산염의 제거양상을 조사한 결과, 투입몰비 0.25에서 약 50% 정도의 인산염이, 그리고 투입몰비 0.5 에서 대부분의 인산염이 제거되는 결과를 보였다. 희토수처리제에 의한 인산염 인의 제거반응은 평형에 신속히 도달하였으며, 온도증가에 따라 인산염의 제거율이 다소 감소하는 경향이 관찰되어 발열반응의 특성을 나타내었다. 희토-인산 결합체의 제타전위는 pH 5.5를 경계로 그 이하에서는 양의 값을, 그리고 그 이상에서는 음의 값을 가지는 것으로 파악되었으며 pH에 따른 제타전위 절대치의 증감과 탁도의 증감은 유사한 경향으로 변화하였다. 불소폐수에 대한 조염화희토 수처리제의 적용에 있어서는 수처리제의 투입량 중가에 따른 잔류불소 농도의 감소 및 탁도와 생생슬러지량의 증대현상이 관찰되었으며, 수처리제의 투입량이 고정된 상태에서 응집제량의 변화에 따른 불소처리효과에 대한 검토에서는 응집제의 주입량이 증가됨에 따라 잔류불소량 및 탁도는 감소하고 슬러지 발생량은 증가하는 경향이 파악되었다.

• Journal of Korean Vacuum Science & Technology
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• 제2권1호
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• pp.25-31
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• 1998

The reliability of fluorine doped silicon oxide (SiOF) films for intermetal dielectrics in multilevel interconnections of ultra-large scale integrated circuits (ULSIs) is investigated. SiOF films were deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition (ECRPECVD) using H-free source gases, i.e., SiF4 and O2. The effect of post plasma treatment on the moisture absorption and dielectric properties of SiOF films was carried out I terms of air exposure time, The reliability test of Cu/TiN/SiOF/Fi specimen was carried out in terms of temperature by rapid thermal annealing (RTA) in N2 ambient. After O2 plasma treatment,, no appreciable peak directly related to moisture absorption was detected. The capacitance-voltage (C-V) characteristics of the O2 plasma treated SiOF film showed that the film remained to hold the sound dielectric properties even after boiling treatment. The Cu/TiN/SiOF/Si system was found to be reliable up to $600^{\circ}C$.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1997년도 추계학술대회 논문집
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• pp.413-417
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• 1997

In this study, chlorine(Cl)-based gas chemistry is generally used to etching for AlCu films metallization. The corrosion phenomena of AlCu films were examined with XPS (X-ray photoelectron spectroscopy), SEM (Scanning electron microscopy), and TEM (Transmission electron microscopy). SF$\sub$6/ plasma treatment subsequent to the etch process prevents the corrosion effectively in the pressure of 300 mTorr. It is found that the chlorine atoms on the etched surface are not substituted for fluorine atoms during SF$\sub$6/ treatment, but a passivation layer on the surface by fluorine-related compounds would be formed. The passivation layer prevents the moisture penetration on the SF$\sub$6/ treated surface and suppresses the corrosion successfully.

• 한국세라믹학회지
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• 제27권7호
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• pp.925-933
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• 1990

The possible use of bioglass,, which is one of the surface active biomaterials, as implants materials has drawn great attention due to their ability to bond to human living tissue. In the present work, the investigation was carried out to find the bonding phenomena between alumina substrate and bioglass(45S5) or fluorine-containing bioglass(45S5$.$4F), and the properties of coated bioglass. The stable bonding between alumina and bioglass was formed when heat-treated at 1150$^{\circ}C$ for 120 minutes or at 1250$^{\circ}C$ for 30 minutes for the 45S5, and at 1150$^{\circ}C$ for 30 minutes for the 45S5$.$4F. When bioglass coated alumina was heat-treated, great amount of Al was diffused into bioglass from alumina substrate. More Al was diffused into fluorine-containing bioglass than into bioglass without fluorine. At early stage of heat-tretment, the diffused alumina content was increased with the square root of time and it was also increased with the thickness of coating layer and heat-treatment temperatures. The alumina content became constant after its saturation for longer heat-treatment time. Coated bioglasses were crystallized to Na2O$.$CaO$.$3SiO2 when heat-treated at lower temperature, and to CaO$.$SiO2 at higher temperature.

• Progress in Superconductivity
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• 제7권2호
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• pp.152-157
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• 2006

New precursor solution with dichloroacetic acid (DCA) was developed for fabricating high $J_c$ REBCO film. DCA based-precursor solution was coated on $LaAlO_3$(001) substrate by dip coating method. Processing parameters such as oxygen partial pressure, water vapor, ramping rate and pyrolysis temperature were controlled in order to obtain a good epitaxial film. The film with thickness of 0.5 micrometer was obtained by single coating and no crack was observed at calcined films. Oxygen partial pressure was controlled in the range of $100{\sim}1,000$ ppm and conversion heat treatment was carried out at the temperature range of $705-765^{\circ}C$. A critical transition temperature ($T_c$) of 90 K and a critical transport current density ($J_c$) of $>0.5\;MA/cm^2$ (77 K and self-field) were obtained for the GdBCO film. It is thought that fluorine-free MOD solution using DCA is promising precursor solution for fabricating high quality REBCO films.