• Title/Summary/Keyword: flexible-mask

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Effects of thickness of GIZO active layer on device performance in oxide thin-film-transistors

  • Woo, C.H.;Jang, G.J.;Kim, Y.H.;Kong, B.H.;Cho, H.K.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.137-137
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    • 2009
  • Thin-film transistors (TFTs) that can be prepared at low temperatures have attracted much attention due to the great potential for flexible electronics. One of the mainstreams in this field is the use of organic semiconductors such as pentacene. But device performance of the organic TFTs is still limited by low field effect mobility or rapidly degraded after exposing to air in many cases. Another approach is amorphous oxide semiconductors. Amorphous oxide semiconductors (AOSs) have exactly attracted considerable attention because AOSs were fabricated at room temperature and used lots of application such as flexible display, electronic paper, large solar cells. Among the various AOSs, a-IGZO was considerable material because it has high mobility and uniform surface and good transparent. The high mobility is attributed to the result of the overlap of spherical s-orbital of the heavy pest-transition metal cations. This study is demonstrated the effect of thickness channel layer from 30nm to 200nm. when the thickness was increased, turn on voltage and subthreshold swing were decreased. a-IGZO TFTs have used a shadow mask to deposit channel and source/drain(S/D). a-IGZO were deposited on SiO2 wafer by rf magnetron sputtering. using power is 150W, working pressure is 3m Torr, and an O2/Ar(2/28 SCCM) atmosphere at room temperature. The electrodes were formed with Electron-beam evaporated Ti(30nm) and Au(70nm) structure. Finally, Al(150nm) as a gate metal was evaporated. TFT devices were heat treated in a furnace at $250^{\circ}C$ in nitrogen atmosphere for an hour. The electrical properties of the TFTs were measured using a probe-station to measure I-V characteristic. TFT whose thickness was 150nm exhibits a good subthreshold swing(S) of 0.72 V/decade and high on-off ratio of 1E+08. Field effect mobility, saturation effect mobility, and threshold voltage were evaluated 7.2, 5.8, 8V respectively.

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Fabrication of Resistive Switching Memory based on Solution Processed AlOx - PMMA Blended Thin Film

  • Sin, Jung-Won;Baek, Il-Jin;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.181.1-181.1
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    • 2015
  • 용액 공정을 이용한 Resistive random access memory (ReRAM)은 간단한 공정 과정, 대면적화, 저렴한 가격 등의 장점으로 인해 큰 관심을 받고 있으며, HfOx, TiOx, AlOx 등의 산화물이 ReRAM 절연 막으로 주로 연구되고 있다. 더 나아가 최근에는 organic 물질을 메모리 소자로 사용한 연구가 보고되고 있다. 이는 경제적이며, wearable 또는 flexible system에 적용이 용이하다. 그럼에도 불구하고, organic 물질을 갖는 메모리 소자는 기존의 산화물 소자에 비해 열에 취약하며 전기적인 특성과 신뢰성이 우수하지 못하다는 단점을 가지고 있다. 이를 위한 방안으로 본 연구에서는 AlOx - polymethylmethacrylate (PMMA) blended thin film ReRAM을 제안하였다. 이는 organic물질의 전기적 특성을 개선시킬 뿐 아니라, inorganic 물질을 wearable 소자에 적용했을 때 발생하는 crack과 같은 기계적 물리적 결함을 해결할 수 있는 새로운 방법이다. 먼저, P-type Si 위에 습식산화를 통하여 SiO2 300 nm 성장시킨 기판을 사용하여 electron beam evaporation으로 10 nm의 Ti, 100 nm의 Pt 층을 차례로 증착하였다. 그리고 PMMA 용액과 AlOx 용액을 초음파를 이용하여 혼합한 뒤, 이 용액을 Pt 하부 전극 상에서 spin coating방법으로 1000 rpm 10초, 5000 rpm 30초의 조건으로 증착하였다. Solvent 및 불순물 제거를 위하여 150, 180, $210^{\circ}C$의 온도로 30 분 동안 열처리를 진행하였고, shadow mask를 이용하여 상부 전극인 Ti를 sputtering 방식으로 100 nm 증착하였다. 150, 180, $210^{\circ}C$로 각각 열처리한 AlOx - PMMA blended ReRAM의 전기적 특성은 HP 4156B semiconductor parameter analyzer를 이용하여 측정하였다. 측정 결과 제작된 소자 전부에서 2 V이하의 낮은 동작전압, 안정된 DC endurance (>150cycles), 102 이상의 높은 on/off ratio를 확인하였고, 그 중 $180^{\circ}C$에서 열처리한 ReRAM은 더 높은 on/off ratio를 갖는 것을 확인하였다. 결론적으로 baking 온도를 최적화하였으며 AlOx - PMMA blended film ReRAM의 우수한 메모리 특성을 확인하였다. AlOx-PMMA blended film ReRAM은 organic과 inorganic의 장점을 갖는 wearable 및 system용 비휘발성 메모리소자에 적용이 가능한 경제적인 기술로 판단된다.

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Passivation Layer (Thermosetting Film)가 형성된 유기박막 트랜지스터의전기적 특성 변화에 대한 연구

  • Seong, Si-Hyeon;Kim, Gyo-Hyeok;Jeong, Il-Seop
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.380-380
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    • 2013
  • 본 논문에서는 외기 환경 요인 중에서 H2O와 O2의 영향으로 성능이 저하되는 유기박막트랜지스터(OTFT)의 수명시간 향상을 위하여 필요한 passivation layer의 효과에 대하여 알아 보았다. OTFT에 기존의 액상 공정이나 증착 공정으로 단일 passivation layer또는 다층 passivation layer를 형성하는 방식과는 다르게 향후에 산업 전반에 적용이 기대되는 것을 고려하여 제작 공정의 간편성을 위하여 film 형태로 되어 있는 열경화성 epoxy resin film으로 passivation layer를 구현하는 방법을 사용하여 OTFT의 storage stability를 평가하였다. passivation layer가 없는 OTFT와 열경화성 epoxy resin film으로 passivation된 OTFT의 전기적 특성이 서로 비교 평가되었으며 또한 30일 동안 온도 $25^{\circ}C$ 상대습도 40%의 환경을 갖는 Desicator 안에서 소자를 보관하여 시간에 따른 전기적 특성 변화를 검증하여 epoxy resin film의 passivation layer으로의 적용가능성을 검증하였다. 결과적으로 30일 후의 passivation layer가 없는 OTFT의 전기적 특성은 매우 낮게 떨어진 반면에 epoxy resin film으로 passivation layer가 구현된 OTFT의 mobility는 $0.060cm^2$/Vs, VT는 -0.18 V, on/off ratio는 $3.7{\times}10^3$으로 초기의 소자 특성이 잘 유지되는 결과를 얻었다. OTFT는 Flexible한 polyethersulfone (PES)기판에 게이트 전극이 하부에 있는 Bottom gate 구조로 제작되었고 채널 형성을 위한 유기반도체 재료로 6,13-bis (triisopropylsilylethynyl) (TIPS) pentacene이 사용되었고 spin coating된 Poly-4-vinylphenol (PVP)가 게이트 절연체로 사용되었다. 이때 Au전극은 Shadow mask를 이용하여 증착하였다. 또한 OTFT의 채널 길이 $100{\mu}m$, 채널 폭 $300{\mu}m$의 영역에 Drop casting법을 사용하여 채널을 형성하였다. 물리적 특성은 scanning electron microscopy (SEM), scanning probe microscopy (SPM), x-ray diffraction (XRD)를 사용하여 분석하였고, 전기적 특성은 Keithley-4200을 사용하여 추출하였다.

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Changes of dielectric surface state In organic TFTs on flexible substrate (유연한 기판상의 유기 트랜지스터의 절연 표면층 상태 변화에 의한 전기적 특성 향상)

  • Kim, Jong-Moo;Lee, Joo-Woo;Kim, Young-Min;Park, Jung-Soo;Kim, Jae-Gyeong;Jang, Jin;Oh, Myung-Hwan;Ju, Byeong-Kwon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.05a
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    • pp.86-89
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    • 2004
  • Organic thin film transistors (OTFTs) are fabricated on the plastic substrate through 4-level mask process without photolithographic patterning to yield the simple fabrication process. And we herewith report for the effect of dielectric surface modification on the electrical characteristics of OTFTs. The KIST-JM-1 as an organic molecule for the surface modification is deposited onto the surface of zirconium oxide $(ZrO_2)$ gate dielectric layer. In this work, we have examined the dependence of electrical performance on the interface surface state of gate dielectric/pentacene, which may be modified by chemical properties in the gate dielectric surface.

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A performance study of organic solar cells by electrode and interfacial modification (전극과 계면간의 개질에 의한 유기태양전지의 성능 연구)

  • Kang, Nam-Su;Eo, Yong-Seok;Ju, Byeong-Kwon;Yu, Jae-Woong;Chin, Byung-Doo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.67-67
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    • 2008
  • Application of organic materials with low cost, easy fabrication and advantages of flexible device are increasing attention by research work. Recently, one of them, organic solar cells were rapidly increased efficiency with regioregular poly(3-hexylthiophene) (P3HT) and [6,6]-phenyl-C61-butyricacidmethylester (PCBM) used typical material. To increased efficiency of organic solar cell has tried control of domain of PCBM and crystallite of P3HT by thermal annealing and solvent vapor annealing. [4-6] In those annealing effects, be made inefficiently efficiency, which is increased fill factor (FF), and current density by phase-separated morphology with blended P3HT and PCBM. In addition, increased conductivity by modified hole transfer layer (HTL) such as Poly(3,4-ethylenedioxythiophene) poly(styrenesulfonate) (PEDOT:PSS), increased both optical and conducting effect by titanium oxide (TiOx), and changed cathode material for control work function were increased efficiency of Organic solar cell. In this study, we had described effect of organic photovoltaics by conductivity of interlayer such as PEDOT:PSS and TCO (Transparent conducting oxide) such as ITO, which is used P3HT and PCBM. And, we have measured with exactly defined shadow mask to study effect of solar cell efficiency according to conductivity of hole transfer layer.

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Flexible Background-Texture Analysis for Coronary Artery Extraction Based on Digital Subtraction Angiography (유동적인 배경 텍스쳐 분석을 통한 DSA 기반의 관상동맥 검출)

  • Park Sung-Ho;Lee Joong-Jae;Lee Geun-Soo;Kim Gye-Young
    • The KIPS Transactions:PartB
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    • v.12B no.5 s.101
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    • pp.543-552
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    • 2005
  • This paper proposes the extraction of coronary arteries based on DSA(Digital Subtraction Angiography) through a texture analysis of background in the angiography. DSA is a well established modality for the visualization of coronary arteries. DSA involves the subtraction of a mask image - an image of the heart before injection of contrast medium - from live image. However, this technique is sensitive to the movement of background and can result to a wrong detection by the variance of background gray-level intensity between two images. Therefore, this paper solves a structural problem resulted from a background movement bV selecting an image which has the least difference of movement through an analysis of the similarity of background texture and proposes a method to extract only the blood vessel efficiently through local gray-level correction of the selected image. Using the coronary angiogram of 5 patients clinical data, we proved that the proposed method has the lower false-detection rate, approximately $2\%$, and the higher accuracy than the existing methods.

2016 KOREA STAR AWARDS (2016 미래패키징 신기술 정부포상)

  • (사)한국포장협회
    • The monthly packaging world
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    • s.277
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    • pp.45-66
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    • 2016
  • 산업통상자원부가 주최하고 한국생산기술연구원이 주관하는 "제10회 미래패키징 신기술 정부포상"시상식이 4월 26일 일산 킨텍스 그랜드볼룸에서 열렸다. 정부포상제도는 미래지식산업인 패키징산업 종사자의 긍지와 자부심 함양의 계기를 실천하고, 패키징산업 종사자의 사기진작과 패키징산업 활성화를 도모하는데 그 목적이 있다. 또한 한국국제포장기자재전(KOREA PACK)과의 동시개최로 패키징산업 종사자간 정보교류 극대화 및 공동체 의식 함양으로 일체감을 조성함은 물론, 패키징산업 기술인의 기술개발 의욕을 고취한다는 평가를 받고 있다. 제10회 미래패키징 신기술 정부포상 시상식에서는 코리아스타상 기업부문, 학생부문, 공로부문으로 구분하여 시상이 진행됐다. 기업부문은 패키징 완제품, 친환경패키징, 패키징관련기계(설비) 및 관련부품, 패키징인쇄(라벨링), 패키징원부자재 생산 및 가공공정, 패키징디자인 등의 분야에서 신기술 개발 또는 개선으로 수출 신장, 매출 수익 증대 및 발명특허 획득을 통해 패키징 기술력 발전에 기여한 기업의 패키징제품 또는 패키징디자인을 대상으로 진행되고 있으며 학생부문은 패키징 디자인 관련분야 전공자로 패키징과 연관된 컨셉으로 상품성, 창의성, 표현성, 친환경성, 지속가능성 등이 어우러진 독창적인 패키징제품 또는 패키징디자인을 대상으로 한다. 또한 공로부문은 패키징 산업 관련 산업계, 학계, 연구계, 유관기관에 종사하는 자로서 패키징 관련 핵심 기술개발, 경영, 마케팅 면에서 패키징 산업 발전에 기여한 공적이 뚜렷한 자, 패키징산업발전 정책연구 및 패키징산업 육성에 기여한 기업 또는 개인을 대상으로 하고 있다. 이번 행사에서는 기업부문 29개 제품과, 학생 14명, 공로 2명에 대한 포상이 진행, 국무총리상에는 (주)더우주의 '우주 페이스 마스크(OOZOO FACE MASK)'가 수상했으며, 산업통상자원부장관상에는 현대글로비스(주)외 2개사, 한국생산기술연구원장상에는 (주)풀무원 외 10개사가 수상했다. 학생부문에서는 안양대학교가 산업통상자원부장관상을 수상했다. 공로부문으로 진행된 시상식에서는 서영철 Flair Flexible Packaging 대표이사와 이명훈 한국포장시스템연구소장이 산업통상자원부장관 표창을 받았다. 본 고에서는 제10회 미래패키징 신기술 정부포상 수상작들을 살펴봄으로써 최신 패키징 경향에 대해 알아보도록 한다.

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Dry Etching of Flexible Polycarbonate and PMMA in O2/SF6/CH4 Discharges (O2/SF6/CH4 플라즈마를 이용한 플렉시블 Polycarbonate와 PMMA의 건식 식각)

  • Joo, Y.W.;Park, Y.H.;Noh, H.S.;Kim, J.K.;Lee, J.W.
    • Journal of the Korean Vacuum Society
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    • v.18 no.2
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    • pp.85-91
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    • 2009
  • There has been a rapid progress for flexible polymer-based MEMS(Microelectromechanical Systems) technology. Polycarbonate (PC) and Poly Methyl Methacrylate (PMMA), so-called acrylic, have many advantages for optical, non-toxic and micro-device application. We studied dry etching of PC and PMMA as a function of % gas ratio in the $O_2/SF_6/CH_4$ temary plasma. A photoresist pattern was defined on the polymer samples with a mask using a conventional lithography. Plasma etching was done at 100 W RIE chuck power and 10 sccm total gas flow rate. The etch rates of PMMA were typically 2 times higher than those of PC in the whole experimental range. The result would be related to higher melting point of PC compared to that of PMMA. The highest etch rates of PMMA and PC were found in the $O_2/SF_6$ discharges among $O_2/SF_6$, $O_2/CH_4$ and $SF_6/CH_4$ and $O_2/SF_6/CH_4$ plasma composition (PC: ${\sim}350\;nm/min$ at 5 sccm $O_2/5$ sccm $SF_6$, PMMA: ${\sim}570\;nm/min$ at 2.5 sccm $O_2/7.5$ sccm $SF_6$). PC has smoother surface morphology than PMMA after etching in the $O_2/SF_6/CH_4$ discharges. The surface roughness of PC was in the range of 1.9$\sim$3.88 nm. However, that of PMMA was 17.3$\sim$26.1 nm.

Stress distribution following face mask application using different finite element models according to Hounsfield unit values in CT images (CT상의 HU 수치에 따른 상악골 전방견인 효과의 유한요소 분석)

  • Chung, Dong-Hwa
    • The korean journal of orthodontics
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    • v.36 no.6
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    • pp.412-421
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    • 2006
  • Objective: The result of finite element analysis depends on material properties, structural expression, density of element, and boundar or loading conditions. To represent proper elastic behavior, a finite element model was made using Hounsfield unit (HU) values in CT images. Methods: A 13 year 6 month old male was used as the subject. A 3 dimensional visualizing program, Mimics, was used to build a 3D object from the DICOM file which was acquired from the CT images. Model 1 was established by giving 24 material properties according to HU. Model 2 was constructed by the conventional method which provides 2 material properties. Protraction force of 500g was applied at a 45 degree downward angle from Frankfort horizontal (FH) plane. Results: Model 1 showed a more flexible response on the first premolar region which had more forward and downward movement of the maxillary anterior segment. Maxilla was bent on the sagittal plane and frontal plane. Model 2 revealed less movement in all directions. It moved downward on the anterior part and upward on the posterior part, which is clockwise rotation of the maxilla. Conclusion: These results signify that different outcomes of finite element analysis can occur according to the given material properties and it is recommended to use HU values for more accurate results.

A comparison study for mask plantar pressure measures to the difference of shoes in 20 female (20대 여성의 신발종류에 따른 족저압 영역별 비교 연구)

  • Kim, Y.J.;Ji, J.G.;Kim, J.T.;Hong, J.H.;Lee, J.S.;Lee, H.S.;Park, S.B.
    • Korean Journal of Applied Biomechanics
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    • v.14 no.3
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    • pp.83-98
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    • 2004
  • The purpose of this study was to investigate the test-retest of plantar pressures using the F-Scan system over speeds and plantar regions. 6 healthy female subjects in 20's were recruited for the study. Plantar pressure measurements during locomotor activities can provide information concerning foot function, particularly if the timing and magnitude of the loading profile can be related to the location of specific foot structures such as the metatarsal heads. The Tekscan F-Scan system consists of a flexible, 0.18mm thick sole-shape having 1260 pressure sensors, the sensor insole was trimmed to fit the subjects' right. left shoes - sneakers shoes & dress shoes. It was calibrated by the known weight of the test subject standing on one foot. The Tekscan measurements show the insole pressure distribution as a function of the time. This finding has important implications for the development of plantar pressure test protocols where the function of the forefoot is important. According to the result of analysis it is as follows 1) Center of force trajectory in women's dress shoes display direct movement, compare with center of force trajectory in Sneaker shoes displays a little bit curved slow pronation movement. Sneaker shoes in forefoot part display very quick supination movement, therefore, this shoes effects negative effectiveness for ankle's stability Considering center of force trajectory analyzing the more center of force close straight line, the more movement can be quick movement for locomotion. For foot pressure distribution, center of force trajectory in locomotion is better to curved trajectory with pronation movement. So sneaker shoes style is good shoes considering center of pressure distribution trajectory compare with women's dress shoes. 2) Women's dress shoes increased peak pressure in medial, this is effected by high hill's height. The more increased women's dress shoes's height, the more women's peak pressure will increase, pronation can increase compare with before. Supination movement increase, this focused pressure in lateral, also, supination increased more. If the supination movement increased, foot pressure focused in lateral, therefore, it is appeared force distribution in gait direction. This is bad movement in foot's stability. 3) Women's dress shoes in landing phase displayed a long time, this is when women's dress shoes wear, gait movement is unbalance, so, landing phase displayed a long time. For compensation in gait, swing phase quick movement. 4) Women's dress shoes displayed peak pressure distribution in lateral of rearfoot part, Sneakers shoes displayed peak pressure distribution in medial of forefoot part. Its results has good impact absorption compare with women's dress shoes. In forefoot part, sneakers shoes has good propulsive force compare with women's dress shoes.