• Title/Summary/Keyword: flatness area

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Novel Wafer Warpage Measurement Method for 3D Stacked IC (3D 적층 IC제조를 위한 웨이퍼 휨 측정법)

  • Kim, Sungdong;Jung, Juhwan
    • Journal of the Semiconductor & Display Technology
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    • v.17 no.4
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    • pp.86-90
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    • 2018
  • Standards related to express the non-flatness of a wafer are reviewed and discussed, for example, bow, warp, and sori. Novel wafer warpage measurement method is proposed for 3D stacked IC application. The new way measures heat transfer from a heater to a wafer, which is a function of the contact area between these two surfaces and in turn, this contact area depends on the wafer warpage. Measurement options such as heating from room temperature and cooling from high temperature were experimentally examined. The heating method was found to be sensitive to environmental conditions. The cooling technique showed more robust and repeatable results and the further investigation for the optimal cooling condition is underway.

A Study on the Characteristics of Attenuation and Propagation of Railway Noise at Various Ground Conditions (지형조건의 변화에 따른 철도소음의 전달 및 감쇠특성에 관한 연구)

  • 윤해동;김재수
    • The Journal of the Acoustical Society of Korea
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    • v.21 no.2
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    • pp.142-149
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    • 2002
  • With rapid industrial development, a railway has become a main traffic means. But, the railway noise has caused much annoyance for the residents living nearby railway tracks. Therefore, execute regulation standard of railway noise has established for quite dwelling environment from January 2000. However efficient soundproofing measures are very difficult because of the lack of basic data and insufficiency of the existing research. In this point, this study attempts to survey the characteristics of attenuation and propagation of railway noise. And this study intends to get the basic data for establishment of a standard for domestic railway noise.

The Effects of Incised Meandering Valley and Lithological Differences on the Grain Size and Shape of Channel Bed Materials: A Case Study of the Upper and Middle Reaches of Gongneungcheon River (감입곡류 지형과 암질 차이가 하상 퇴적물 입경 및 형상에 미친 영향: 공릉천 중상류 구간을 사례로)

  • Chen, Hui;Kim, Jong Wook;Han, Min;Byun, Jongmin
    • Journal of The Geomorphological Association of Korea
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    • v.26 no.1
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    • pp.15-26
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    • 2019
  • In this study, we investigated the grain size, lithological type, and shape of coarse bed materials in the upper and middle reaches of Gongneungcheon River. For this purpose, 11 sampling points were selected along the river. For 100 samples of the coarse bed materials at each point, three axes (long, intermediate, and short) of samples were measured, and their lithological types were also identified. By measuring grain size, the sphericity and flatness of samples were calculated. Finally, every particle was classified into four shape categories: sphere, disc, blade and rod. We found that the grain size in incised meandering reach is the largest. This is mainly due to the supply of coarse materials from steep valley sides along the meandering channel. According to the lithological analysis, all samples were identified as granite, gneiss and schist, and quartz. The proportion of granite decreased, whereas the proportion of gneiss and schist increased downstream. These patterns indicate that the bedrock distribution within the study area accounts for the downstream lithological variation of coarse bed materials. With regard to the grain shape, sphericity gradually decreased while flatness gradually increased downstream. In the case of the shape classification, unlike the general downstream pattern of grain shape, the proportion of the sphere type decreased and the proportion of the blade type increased downstream. Such a reversal change in the downstream direction turns out to be determined by the lithology (such as foliation, bedding and the pattern of weathering) of coarse bed materials.

Development of a Sensor Calibration to Enhance the Performance of a Non-contact Laser Optical Sensor Unit (비접촉 레이저 광센서의 성능 향상을 위한 센서보정에 관한 연구)

  • Seo, Pyeong-Won;Ryu, Young-Kee;Oh, Choon-Suk;Byun, Jong-Hwan
    • Proceedings of the KIEE Conference
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    • 2006.10c
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    • pp.579-581
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    • 2006
  • Flat panel image display devices such as TFT LCD and PDP have required more large area and high quality control components. To control the qualities of the components, measurements of the flatness of a plate glass has been required. In order to measure the shape of the specular objects, Non-Contact Optical Sensor using Hologram laser unit was proposed. The sensor has a optical system that is composed of a Hologram laser and objective lens. The temperature of the sensor body is controlled by TEC(Thermoelectric Cooler) to maintain the same wavelength of the diode laser. In this research, we proposed the calibration scheme to make sensor real time measuring sensor. From the experimental results we see that the proposed sensor unit can measure the position of the glass surface in rial time.

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Design of Broad Band Amplifier Using Feedback Technique

  • Kang, Tae-Shin;Rhee, Jin-Koo
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.3 no.1
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    • pp.42-46
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    • 2003
  • In this paper, an MMIC broadband amplifier for wireless communication systems has been developed by using an active feedback method. This active feedback operates at much higher frequencies than a method by a spiral inductor feedback and its size is independent of the inductance value. The MMIC broadband amplifier was designed using a $0.5{\;}{\mutextrm{m}}$ MESFET library. The fabricated chip area was $1.4{\;}mm{\;}{\times}{\;}1.4{\;}mm. Measurement showed a gain of 18 dB with a gain flatness of ${\pm}3$ dB in a 1.5 GHz~3.5 GHz band. The maximum output power and the minimum noise figure were 14 dBm and 2.5 dB in the same band, respectively.

Broadband Amplifier Using Active Feedback Technique (Active Feeback를 이용한 MMIC 광대역 증폭기 설계)

  • Kang, T. S.;An, D.;Yoon, Y. S.;Rhee, J. K.
    • Proceedings of the Korea Electromagnetic Engineering Society Conference
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    • 2000.11a
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    • pp.197-201
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    • 2000
  • In this paper, a MMIC(Monolithic Microwave Integrated Circuit) broadband drive amplifier for wireless communication system has designed using active feedback method. The MMIC brodband amplifier was designed using 0.5$\mu\textrm{m}$ MESFET of ETRI library. Simulation results show that gain is 22 dB, and gain flatness ${\pm}$1 dB. Maximum output power 15 dBm and noise figure 2.5 dB in bandwidth 500 MHz ~3.0 GHz. The MMIC Broadband amplifer's chip area is 14mm${\times}$1.4mm.

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A Study on the Within Wafer Non-uniformity of Oxide Film in CMP (CMP 패드 강성에 따른 산화막 불균일성(WIWNU)에 관한 연구)

  • Park, Ki-Hyun;Jung, Jae-Woo;Park, Boum-Young;Seo, Heon-Deok;Lee, Hyun-Seop;Jeong, Hae-Do
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.6
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    • pp.521-526
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    • 2005
  • Within wafer non-uniformity(WIWNU) improves as the stiffness of pad decrease. We designed the pad groove to study of pad stiffness on WIWNU in Chemical mechanical polishing(CMP) and measured the pad stiffness according to groove width. The groove influences effective pad stiffness although original mechanical properties of pad are unchanged by grooving. Also, it affects the flow of slurry that has an effect on the lubrication regime and polishing results. An Increase of the apparent contact area of pad by groove width results in decrease of effective pad stiffness. WIWNU and profile of removal tate improved as effective pad stiffness decreased. Because grooving the pad reduce its effective stiffness and it makes slurry distribution to be uniform. Futhermore, it ensures that pad conforms to wafer-scale flatness variability. By grooving the top pad, it is possible to reduce its stiffness and hence reduce WIWNU and edge effect.

A Study on the Dose Changes Depending on the Shielding Block Type of Irradiation During Electron Beam Theraphy (전자선치료 시 조사부위 차폐물 형태에 따른 선량변화 연구)

  • Lee, Sun-Yeb;Park, Cheol-Soo;Lee, Jae-Seung;Goo, Eun-Hoe;Cho, Jae-Hwan;Kim, Eng-Chan;Moon, Soo-Ho;Kim, Jin-Soo;Park, Cheol-Woo;Dong, Kyung-Rae;Kweon, Dae-Cheol
    • Journal of radiological science and technology
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    • v.33 no.3
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    • pp.253-260
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    • 2010
  • The primary focus of this study was to explore the variation in dose distributions of electron beams between different types of construction structure of cut-out blocks embodied in electron cones, given that the structure is considered one of the causes of multiple scattered radiation from electrons which may affect dose distributions. For evaluation, two types of cut-out blocks, divergency and straight, manufactured for this study, were compared in terms of area of interval in distribution of dose, and flatness and symmetric state of surface being radiated. The results showed that divergency cut-out blocks reduced the lateral scattering effects on the thickness of cut-out blocks more substantially than straight ones, leading to more uniform dose distribution at baseline depth. Notably in divergency cut-out blocks, the high dose area decreased more significantly, and more uniform dose distribution was observed at the edge of the irradiated field. This points to a need to consider the characteristics of dose distribution of electron beams when setting up radiotherapy planing at the venues. Therefore, this study is significant as an exploratory work for ensuring high accuracy in dose delivery for patients.

Petrology of Jurassic Granitoids in the Hamyang-Geochang Area, Korea (함양(咸陽)-거창(居昌) 지역(地域), 쥬라기 화강암류(花崗岩類)의 암석학적(岩石學的) 연구(硏究))

  • Lee, Cheol-Lag;Lee, Yoon-Jong;Hayashi, Masao
    • Economic and Environmental Geology
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    • v.25 no.4
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    • pp.447-461
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    • 1992
  • The Jurassic granitoids in the study area are divided into the "Gneissose granodiorite" and the "Daebo granodiorite" (1 : 250,000 Jeonju Geological map, 1973). The term of Geochang granodiorite was used in this study instead of "Daebo granodiorite". These granitoids were studied in terms of microscopic observation, petrochemistry, and zircon morphology. The granitoids are mostly granodiorite. Two kinds of progressive variation can also be recognized in the modal quartz~alkali feldspar~plagioclase triangular diagram; the Gneissose granodiorite is in accordance with the trondhjemitic (low k) trend, and the Geochang granodiorite with the granodioritic trend (medium k). The granitoids belong to the calc-alkaline series, and are classified into the I-type (magnetite series). Plagioclase ($An_{25.1}{\sim}An_{30.9}$) in the granitoids shows generally an oligoclase composition. Biotite has a wider range in (Si, Al) solution than in (Fe, Mg) solid solution. Hornblende occurs in a few thin sections of the Geochang granodiorite, and is plotted in the tschermakite field. The zircon prism shows a long variation between the {110} dominant type and the {100} dominant type in the Geochang granodiorite, but only the {110}={100} type in the Gneissose granodiorite. However, zircon crystals in the granitoids are mostly crystallized in a low-to-medium temperature magma. In the PPEF (Prism- Pyramid-Elongation-Flatness) diagram, the Gneissose granodiorite shows a closed scissors type, the Geochang granodiorite, a opened scissors type. It indicates that the Geochang granodiorite might originate from the mixed magma with crustal materials or pre-existed residual magma which had formed the Gneissose granodiorite.

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A Research on the Types of Middle Aged Women's Body Figures (중년 여성의 체형에 관한 연구 - 직접계측을 중심으로 -)

  • Kim, Kyung-Hee
    • The Research Journal of the Costume Culture
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    • v.15 no.4
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    • pp.677-687
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    • 2007
  • This research aims to classify the physical characteristics of middle aged women. The characteristics are esteemed to be adopted for the formalisation of the types of their body figures and their characteristics for each type. For this purpose, middle aged women in the significant change of their body shapes were sampled for body measurement which would be used for the comparison between each measured figure. A group of sample for this research was constructed with 154 middle aged women who is currently living in Seoul and its Metropolitan area and being in their age of $35{\sim}59$. Particularly, the analysis on the girth of belly shows a significant difference subject to each age group so that a distinguished change in the girth of belly is observed as the age gets older. With the SPSS programme, the physical characteristics of middle aged women were analysed by the variation analysis and correlation analysis. In terms of the analysis on the body mass index and the flatness index, the observed result that there is a significant difference between the indices for late middle aged women and early and mid middle aged women shows far more different result from Yu-Kyung Choi(1997) that the body figures of middle aged women tend to start rapidly to change from their ages of 49. This can be explained to some extent in that the increased interest in much healthier and slimmer body shapes beginning from widely-spread so called "well-being" syndrome results in the increase in the number of middle aged women taking care of their health management so that the ages starting their body shape to become obese tend to be deferred. Another explanation is also feasible to partly extent that the middle aged women living in Seoul and Kyung-Gi area are much more looking after their health management than those living in other areas. However, this research has a limitation in that the physical measurement for this research has been conducted focusing on the women living in Seoul and Kyung-Gi area. Hence, it is further expected going forward that the physical measurement for middle aged women living in other areas should follow for the comparison purpose.

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