• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.387-387
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• 2013

Currently, the flash memory and the dynamic random access memory (DRAM) have been used in a variety of applications. However, the downsizing of devices and the increasing density of recording medias are now in progress. So there are many demands for development of new semiconductor memory for next generation. Magnetic random access memory (MRAM) is one of the prospective semiconductor memories with excellent features including non-volatility, fast access time, unlimited read/write endurance, low operating voltage, and high storage density. MRAM is composed of magnetic tunnel junction (MTJ) stack and complementary metal-oxide semiconductor (CMOS). The MTJ stack consists of various magnetic materials, metals, and a tunneling barrier layer. Recently, MgO thin films have attracted a great attention as the prominent candidates for a tunneling barrier layer in the MTJ stack instead of the conventional Al2O3 films, because it has low Gibbs energy, low dielectric constant and high tunneling magnetoresistance value. For the successful etching of high density MRAM, the etching characteristics of MgO thin films as a tunneling barrier layer should be developed. In this study, the etch characteristics of MgO thin films have been investigated in various gas mixes using an inductively coupled plasma reactive ion etching (ICPRIE). The Cl2/Ar, CH3OH/Ar, and CH4/Ar gas mix were employed to find an optimized etching gas for MgO thin film etching. TiN thin films were employed as a hard mask to increase the etch selectivity. The etch rates were obtained using surface profilometer and etch profiles were observed by using the field emission scanning electron microscopy (FESEM).

• Journal of the Korean Chemical Society
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• v.46 no.5
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• pp.450-468
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• 2002

As the computer is popularized in individual and society, it is using in a many of area. In particular, there are many materials to learn a science knowledge using multimedia through computer. Many of them are web-based learning materials, which are developed by Java or Flash. Since the technology of the representation, storage, com-putation and communication in computer make progress, the environment of education is also developed. Especially, the internet and VR technology will cause the education to change. A key feature of VR is real-time interactivity, in that the computer is able to detect student input and instantaneously modify the virtual world. It is reported that using the VR simulation in chemistry education can increase student engagement in class, promote understanding of basic chem-ical principles, and augment laboratory experience. In this study, application way of the virtual reality technology in chemistry education is examined.

• Journal of the Korean Institute of Gas
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• v.9 no.2 s.27
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• pp.1-7
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• 2005

The thermochemical parameters for safe handling, storage, transport, operation and process design of flammable substances are explosive limit, flash point, autoignition temperature, minimum oxygen concentration, heat of combustion etc.. Explosive limit and autoignition temperature are the major physical properties used to determine the fire and explosion hazards of the flammable substances. Explosive limit and autoignition temperature of methane fur LNG process safety were investigated. By using the literatures data, the lower and upper explosive limits of methane recommended 4.8 vol$\%$ and 16 vol$\%$, respectively. Also autoignition temperatures of methane with ignition sources recommended $540^{\circ}C$ at the electrically heated cruicible furnace (the whole surface heating) and recommended about $1000^{\circ}C$ in the local hot surface. The new equations for predicting the temperature dependence and the pressure dependence of the lower explosive limits for methane are proposed. The values calculated by the proposed equations were a good agreement with the literature data.

• Korean Chemical Engineering Research
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• v.46 no.1
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• pp.1-6
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• 2008

Block copolymers spontaneously assemble into various nanoscale structures such as spheres, cylinders, and lamellar structures according to the relative volumn ratio of each macromolecular block and their overall molecular weights. The self-assembled structures of block copolymer have been extensively investigated for the applications such as nanocomposites, photonic crystals, nanowires, magnetic-storage media, flash memory devices. However, the naturally formed nanostructures of block copolymers contain a high density of defects such that the practical applications for nanoscale devices have been limited. For the practical application of block copolymer nanostructures, a robust process to direct the assembly of block copolymers in thin film geometry is required to be established. To exploit self-assembly of block copolymer for the nanotechnology, it is indispensible to fabricate defect-free self-assembled nanostructure over an arbitrarily large area.

• Proceedings of the Korean Vacuum Society Conference
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• 1998.02a
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• pp.17-17
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• 1998

Synchrotron radiation is produced when charged particles moving with relativistic velocities a are accelerated - for example, deflected by the bending magnets which guide the electron or p positrons in circular accelerators or storage rings. By using special focusing magnetic lattices i in the particle accelerators it is possible to make the dimensions of the particle beam very small with a hi맹 charge density which results in a light source with high b디lIiance. Synchrotron light h has important properties which make it ideal for a wide range of investigations in surface s science. The fact that the spectrum of electromagnetic radiation emitted in a bending magnet e extends in a continuum from the 얹r infra red region to hard x-rays means that it is id않I for a v variety of spectroscopic studies. Since there are no convenient lasers, or other really bright l light sources, in the vacuum ultraviolet and soft x-ray re.밍ons the development of synchrotron r radiation has enabled enormous advances to be made in this di펌C비t spectr따 re밍on. P Polarization-dependent measurements, for ex없nple ellipsometry or circular dichroism studies a are possible because the radiation has a well-defined polarization - linear in the plane of orbit w with additional right-circular, or left-circular, components for emission an생es above, or below, t the horizontal, respectively. Since the synchrotron light is emitted from a bunch of charge c circulating in a ring the light is emitted with a well-defined time structure with a short flash of l light every time a bunch passes an exit port. The time structure depends on the size of the ring a and the number and sequence of filling of the bunches. A pulsed light source enables time¬r resolved studies to be performed which provide direct information on the lifetimes and decay m modes of excited states and in addition opens up the possibility of using time of flight t techniques for spectroscopic studies. The fact that synchrotron radiation is produced in a clean u ultrahi야 vacuum environment is of gr않t importance for surce science studies. The current t비rd generation synchrotron light sources provide exceptionally high baliance and stability a and open up possibilities for experiments which would have been inconceivable only a short time ago.

• Clean Technology
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• v.17 no.4
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• pp.306-313
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• 2011

Flux or solder is used in soldering process for manufacturing electronic parts such as printed circuit boards (PCB). After soldering process, residual flux and solder paste on the parts should be removed since their residuals could cause performance degradation or failure of parts due to their corrosion and electric leakage. Ozone depletion substances such as 1,1,1- trichloroethane (TCE) and HCFC-141b have widely been using for removal of residual flux and solder paste after soldering process In manufacturing of electronic parts until now. In this study, non-aqueous cleaning agents without flash point were developed and applied to industrial field for replacement of cleaning agents with ozone depletion. In order to develop non-aqueous cleaning agents without ethers, esters, fluoride- type solvents. And their physical properties and cleaning abilities were evaluated, and they were applied to industrial fields for cleaning of flux and solder on the PCB. And vacuum distillation apparatus were operated to determine their operating conditions and recycling yields for recycling of used cleaning agents formulated in this study. As a result of physical properties measurement of our formulated cleaning agents, they were expected to have good wetting and penetrating power since their surface tensions were relatively low as 18.0~20.4 dyne/$cm^2$ and their wetting indices are relatively large. And some cleaning agents holding fluoride-type solvents as their components did not have any flash point and they seemed to be safe in their handling and storage. The cleaning experimental results showed that some cleaning agents were better in their cleaning of flux and solder paste than 1,1,1-TCE and HCFC-141b. And industrial application results of the formulated cleaning agents for cleaning PCB indicated that they can be applicable to industry due to their good cleaning capability in comparison with HCFC-141b. The recycling experiments of the used formulated cleaning agents through a vacuum distillation apparatus also showed that their 91.9~97.5% could be recycled with its proper operating conditions.

• 한국신재생에너지학회:학술대회논문집
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• 2010.11a
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• pp.130.2-130.2
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• 2010

2020년까지 대형 CCS (Carbon Capture and Storage) Demo Plant 시장 (100MW 이상) 이 형성될 전망이다. 발전 부문에서 대규모 CCS 실증 프로젝트는 총 44개이며 연소전(41%), 연소후(28%), 순산소(3%) 프로젝트가 계획되어 있다. 순산소 연소 기술은 실증진입단계, 연소후(USC) 기술은 상용화 추진단계, 연소전 (IGCC) 기술은 실증완료 이후 상용화 진입 단계이다. IGCC 발전의 석탄가스화 기술은 타 산업분야에 서 상용화 되어있어 기술신뢰성이 높다. IGCC 단위설비 기술 개발을 통한 성능개선 및 비용절감에 대한 잠재력을 가지고 있기 때문에 미래의 석탄발전기술로 고려되고 있다. IGCC 기술은 가장 상용화에 앞서있지만 아직까지 IGCC+CCS 대형 설비가 운전된 사례가 전 세계적으로 없으며 미국 EPRI 등에서 Feasibility Study 단계이다. 현재 국책과제로 수행중인 300MW급 태안 IGCC 플랜트를 대상으로 향후 CCS 설비를 적용했을 경우에 대해 기술 타당성 검증을 목적으로 IGCC+CCS 모델링을 수행하였다. 모델링은 스크러버 후단의 합성 가스를 대상으로 하였다. Water Gas Shift Reaction (WGSR) 공정 및 Selexol 공정을 구성하여 최종 단에서 수소 연료를 생산할 수 있도록 하였다. WGSR 공정은 Co/Mo 촉매반응기로 구성되었다. WGSR 모델링을 통하여 주입되는 스팀량 (1~2 mol-steam/mol-CO) 및 온도 변화 ($220-550^{\circ}C$)에 따른 CO가스의 전환율을 분석하여 경제적인 설계조건을 선정하였다. Selexol 공정은 $H_2S$ Absorber, $H_2S$ Stripper, $CO_2$ Absorber, $CO_2$ Flash Drum으로 구성된다. Selexol 공정의 $CO_2$와 $H_2S$ 선택도를 분석 하였으며 단위 설비별 설계 조건을 예측하였다. 모델링 결과 59kg/s의 합성가스($137^{\circ}C$, 41bar, 가스 조성은 $CO_2$ 1.2%, CO 57.2%, $H_2$ 23.2%, $H_2S$ 0.02%)가 WGSR Process를 통해 98% CO가 $CO_2$ 로 전환되었다. Selexol 공정을 통해 $H_2S$ 제거율은 99.9%, $CO_2$제거율은 96.4%이었고 14.9kg/s의 $H_2$(86.9%) 연료를 얻었다. 모델링 결과는 신뢰성 검증을 통해 IGCC+CCS 전체 플랜트의 성능예측과 Feasibility Study를 위한 자료로 활용될 예정이다.

• Journal of the Institute of Electronics and Information Engineers
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• v.50 no.2
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• pp.143-151
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• 2013

NAND flash-based SSDs (Solid State Drive) have advantages of fast input/output performance and low power consumption so that they could be widely used as storages on tablet, desktop PC, smart-phone, and server. But, SSD has the disadvantage of wear-leveling due to increase of the number of writes. In order to improve the lifespan of the SSD, a variety of data deduplication techniques have been introduced. General fixed-size splitting method allocates fixed size of chunk without considering locality of data so that it may execute unnecessary chunking and hash key generation, and variable-size splitting method occurs excessive operation since it compares data byte-by-byte for deduplication. This paper proposes adaptive chunking method based on application locality and file name locality of written data in SSD-based server storage. The proposed method split data into 4KB or 64KB chunks adaptively according to application locality and file name locality of duplicated data so that it can reduce the overhead of chunking and hash key generation and prevent duplicated data writing. The experimental results show that the proposed method can enhance write performance, reduce power consumption and operation time compared to existing variable-size splitting method and fixed size splitting method using 4KB.

• The KIPS Transactions:PartD
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• v.11D no.2
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• pp.443-452
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• 2004

The paper presents an intelligent space management system for ubiquitous computing. The system is basically a home/office automation system that could control light, electronic key, and home appliances such as TV and audio. On top of these basic capabilities, there are four elegant features in the system. First, we can access the system using either a cellular Phone or using a browser on the PC connected to the Internet, so that we control the system at any time and any place. Second, to provide more human-oriented interface, we integrate voice recognition functionalities into the system. Third, the system supports not only reactive services but also proactive services, based on the regularities of user behavior. Finally, by exploiting embedded technologies, the system could be run on the hardware that has less-processing power and storage. We have implemented the system on the embedded board consisting of StrongARM CPU with 205MHz, 32MB SDRAM, 16MB NOR-type flash memory, and Relay box. Under these hardware platforms, software components such as embedded Linux, HTK voice recognition tools, GoAhead Web Server, and GPIO driver are cooperated to support user-friendly intelligent space.