• 한국세라믹학회지
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• 제41권4호
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• pp.313-322
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• 2004

후막 광식각 기술은 스크린 인쇄 등의 일반적인 후막공정에 노광 및 현상 등의 리소그라피 공정을 접목시킨 새로운 기술이다. 본 연구에서는 후막 광식각 기술을 이용하여 미세라인을 형성할 수 있는 저온동시소성용 Ag 페이스트를 개발하였다. 페이스트를 구성하는 Ag분말과 폴리머, 모노머, 광개시제 등의 양을 조절하여 미세라인을 형성할 수 있는 최적 조성을 연구하였으며. 또한 노광량과 같은 공정변수가 미세라인 형성에 미치는 영향을 연구하였다. 실험결과 폴리머/모노머비, Ag 분말 중량비, 광개시제의 양 등이 미세라인의 해상도에 영향을 미치는 주요 인자임을 확인할 수 있었다. 개발된 감광성 Ag 페이스트를 저온동시소성용 그린 시트에 전면 인쇄한 후 건조, 노광, 현상, 적층, 소성 과정을 통하여, 소성 후 20$\mu\textrm{m}$ 이하의 선폭을 가지는 후막 미세라인을 형성할 수 있었다.

• 폴리머
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• 제30권5호
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• pp.407-411
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• 2006

액상의 고분자 전구체 polyvinylsilazane (PVS) 혹은 allylhydridopolycarbosilane(AHPCS)를 실리콘 기판 위에 스핀 코팅한 다음, DVD 마스터로부터 제조된 polydimethylsiloxane(PDMS) 몰드를 이용한 자외선 나노임프린트법으로 나노 크기의 고분자 패턴을 제조하였다. 나아가 질소 분위기하에서 $800^{\circ}C$ 열처리함으로써 각각 SiCN, SiC 세라믹 패턴도 제조하였다. 가교된 고분자와 세라믹 패턴의 폭과 넓이를 원자힘현미경(AFM)과 주사전자현미경(SEM)으로 관측한 결과 PVS와 AHPCS의 패턴 높이는 각각 38.5%와 24.1%, 패턴 폭은 18.8%와 16.7%의 수축률을 나타내었다. 즉 전구체의 세라믹 수율이 높을수록 세라믹 패턴 수축률은 낮아졌고, 패턴과 기판과의 접착에 의한 수축억제로 이방성 수축현상도 관찰되었다. 본 연구결과는 새로운 세라믹 MEMS 소자제작공정으로서 나노임프린트법의 가능성과 수축률 제어 연구가 필요함을 제시하고 있다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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• pp.342-345
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• 2002

As the size of chip components and module decreases, new patteming method for fine line and geometry is needed. So far, in LTCC(Low Temperature Cofired Ceramic) process, screen printing method has been used generally. But screen printing method has some disadvantages as follows. First, the geometry including line, vias, etc. smaller than $100{\mu}m$ can't be evaluated easily. Second, the patterned dimension is different from designed value, which makes distortion in charactersitics of not only chip components but also modules. Thick film lithography has advantages of thick film screen printing process, low cost and thin film process, fine line feasibility. Using this method, the line with $30{\mu}m$ width and the geometry with expected dimension can be evaluated. In this study, the fine line with $35{\mu}m$ line/space is formed and the embedded capacitor with very small tolerance is developed using thick film lithography.

• 정보저장시스템학회논문집
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• 제1권1호
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• pp.108-114
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• 2005

The generation of fine relics of suspensions is a significant interest as it holds the key to the fabrication of electronic devices. These processes offer opportunities for miniaturization of multilayer circuits, for production of functionally graded materials, ordered composites and far small complex-shaped components. Some novel printing methods of depositing ceramic and metal droplets were suggested in recent years. In an electro-hydrodynamic printing, the metallic capillary nozzle can be raised to several kilovolts with respect to the infinite ground plate or pin-type electrode positioned a few millimeters from the nozzle tip. Depending on the electrical and physical properties of the liquid, for a given geometry, it Is possible to generate droplets in any one of three modes, dripping, cone-jet and multi-jet. In this experiment, an alumina suspension flowing through a nozzle was subjected to electro-hydrodynamic printing using pin-type electrodes in the cone-jet mode at different applied voltages. The pin-type electrodes of 1, 100, 1000${\mu}m$ in diameter were used to form fine ceramic patterns onto the substrates. Various feature sizes with applied voltages and electrode diameters were measured. The feature sizes increased with the electrode diameter and applied voltages. The feature size was as fine as $30 {\mu}m$.

• 한국세라믹학회지
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• 제44권3호
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• pp.157-161
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• 2007

Line width under $100\;{\mu}m$ with good resolution is difficult to achieve using conventional thick-film process utilizing screen printing method. However combined with lithography technology finer line and space for miniaturization and highly integrated package is achievable. In this study, photosensitive Ag paste of optimum formulation used for thick film lithography technology was fabricated by various Ag powder, glass powder and additives. As the result, line width of $30\;{\mu}m$ with good definition and reduced mismatch during co-firing with LTCC substrate was acquired. Formulated Ag paste was used to pattern embedded fine line inductor with over 90% yield.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.303-303
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• 2007

Photo-imageable thick-film lithography technology was developed for the fabrication of embedded passives such as inductors and capacitors. In this study, photo-imageable dielectric and conductor pastes have apoted a negative type. Sodalime glass wafer, alumina substrate and zero-shrinkage LTCC green tapes were used as substrates. In result, The lithographic patterns were designed as lines and spaces for conductor material, or via-holes for ceramic, LTCC, materials. The scattering and reflection of UV-beam on the substrate had negative effects on fine patterning. The patterning performance was varied with the exposing and developing process conditions, and also varied with the substrate materials. Fine resolution of less then $50/50{\mu}m$ in line and space was obtained, which is difficult in screen printing method.

• 한국세라믹학회:학술대회논문집
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• 한국세라믹학회 2003년도 춘계총회 및 연구발표회 초록집
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• pp.158.1-158
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• 2003

• 한국세라믹학회지
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• 제23권4호
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• pp.35-40
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• 1986

The production process of a fine size fraction of Korean kaolin by ball milling is studied in this paper by analyzing the size distribution the size distribution of products with the Rosin-rammle formular and the rate process of cumulative size fractions with Alyavdin-Chujyo's formular. The size distribution is found to be divided in three regions a coarser part influenced by feed size an intermediate part where the size distribution shows a clear straight line relationship on Rosin-Rammler chart and the finest part with the ultimate limit of fineness by ball milling. Alyavdin-Chujyo's relationship is found to be valid over a very wide range of milling conditions. For different feed sizes the Alyavdin-Chujyo's relationship gives a group of straight lines with a common intersection point which can be defined as the limiting point of the persistent component region.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.768-771
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• 2003

Nowadays, the study on the ceramic components and modules used in telecommunication system is being performed. Duplexer is the one of the most important components and has the role of dividing Rx and Tx signal. Duplexer including the FBAR is being done vigorously LTCC is used for package like SAW package, duplexer package. In our research, LTCC material is used for FBAR duplexer package and photo-lithography for the fine line phase shifter. The good characteristics, low loss and good isolation, of duplexer is obtained by the fine line phase shifter having high characteristic impedance of stripline.

• 대한심미치과학회지
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• 제11권2호
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• pp.33-36
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• 2002

As patients have concerned the esthetics of dental restorations, the porcelain fused to metal restorations have gain their popularity due to their strength and esthetic appearance for many years. However, metal collar in subgingival level of porcelain fused to metal restoration often causes black shadows. Inadequately positioned metal collar causes plaque depositions, gingival inflammations, black shadows, and discolorations of margin area. Those problems can be avoided by a clear finishing line, well-fabricated provisional restorations with precise margin and fine polishing, collarless porcelain fused to metal restoration, and all ceramic restoration. In this case report, collarless porcelain fused to metal restoration was used to treat cervical discoloration from old restorations.