• Journal of Sensor Science and Technology
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• v.9 no.3
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• pp.248-255
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• 2000

Penning type sputtering system which has two opposed targets was implemented and the physical characteristics of the deposited carbon nitride films were investigated. When argon ratio was reduced and nitrogen ratio was increased in the sputtering gas mixture, Fe was less sputtered. The grain size of grown carbon nitride films was distributed from $150{\AA}$ to $250{\AA}$. As nitrogen partial pressure increases, growth rate and nitrogen incorporation in the film increases.

• Journal of the Korean Solar Energy Society
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• v.27 no.4
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• pp.11-17
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• 2007

The purpose of this study is to check whether the plate temperature could be lower than the surrounding air by using the radiant cooling during the day time in summer at Seoul. Without an insolation shield as this experiment was performed, a few cases were found. The temperatures of the black painted plate are lower than those of the aluminium film coated plate if the following condition exist; no or small insolation over the plate, the wind velocity less than around 2 m/s, and clear sky However if there are insolation over the plate, the temperatures of the aluminium coated plate are lower than the black painted plate. Also, as the wind velocity increases, the plate temperature decreases faster. The temperature response of the small system is much faster than the large system.

• The Journal of the Korea Contents Association
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• v.9 no.5
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• pp.145-155
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• 2009

There is a great deal of merit in CR system but artifact not produced in old system of film or screen newly is created. we studied 3 cases of artifact with CR system in one hospital, Gwangju. In the first case of the delay time and density, As the time was delayed, the density of the artifact was increased up to 67 percent in the natural radiation. The Second, Fading of the artifact decreased 33 percent in the rate of the emission after 10 hours, and the more the time was delayed, the less the quality of image was deteriorated. Third, Artifact was produced by the collimation when the radiologic technologist was performed, and by the Guiding plate and Suction cup when the radiation equipment was done. Therefore, when health care provider have to understand the artifact exactly and check regularly, the quality of the picture and the satisfaction of the medical examination is increased.

• Proceedings of the KIEE Conference
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• 1999.07d
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• pp.1514-1516
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• 1999

This paper covers our efforts to improve the low carrier mobility and light instability of hydrogenated amorphous silicon (a-Si:H) films with microcrystalline silicon $({\mu}c-Si)$ films. We successfully prepared ${\mu}c-Si$ films on $CaF_2$/glass substrate by decomposition of $SiH_4$ in RPCVD system. The $CaF_2$ films on glass served as a seed layer for ${\mu}c-Si$ film growth. The XRD analysis on $CaF_2$/glass illustrated a (111) preferred $CaF_2$ grains with the lattice mismatch less than 5 % of Si. We achieved ${\mu}c-Si$ films with a crystalline volume fraction of 61 %, (111) and (220) crystal orientations. grain size of $706\AA$, activation energy of 0.49 eV, and Photo/dark conductivity ratio of 124. By using a $CaF_2$/glass structure. we were able to achieve an improved ${\mu}c-Si$ films at a low substrate temperature of $300^{\circ}C$.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.367-367
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• 2013

Commercial applications of indium tin oxide (ITO) can be separated into two useful areas. As it is perceived to bear electrical properties and optical transparency at once, its chance to apply to promising fields, usually for an optical device, gets greater in the passing time. ITO is one of the transparent conducting oxides (TCO), and required to carry the relative resistance less than $10^{-3}{\Omega}$/cm and transmittances over 80 % in the visible wavelength of light. Because ITO has considerable refractive index, there exist applications for anti-reflection coatings. Anti-reflection properties require gradual change in refractive index from films to air. Such changes are obtained from film density or nano-clustered fractional void. Glancing angle deposition (GLAD) method is a well known process for adjusting nanostructure of the films. From its shadowing effects, GLAD helps to deposit well-controlled porous films effectively. In this study, we are comparing the reference sample to samples coated with controlled ITO multilayer accumulated by an e-beam evaporation system. At first, the single ITO layer samples are prepared to decide refractive index with ellipsometry. Afterwards, ITO multilayer samples are fabricated and fitted by multilayer ellipsometric model based on single layer data. The structural properties were measured by using atomic force microscopy (AFM), and by scanning X-ray diffraction (XRD) measurements. The ellipsometry was used to determine refractive indices and extinction coefficient. The optical transmittance of the film was investigated by using an ultraviolet-visible (UV-Vis) spectrophotometer.

• Journal of Sensor Science and Technology
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• v.14 no.6
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• pp.374-380
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• 2005

Vibration sensors have a wide scope of applications in the field of monitoring systems that needs to perceive an undesirable physical vibration before a critical failure occurs in a system, and then costly unplanned repairs can be avoided. The conventional vibration sensors developed so far have many disadvantages, such as complex manufacturing process, bulkiness, high cost, less reliability and so on. This paper reports a simple-structured vibration sensor, which has been developed using a commercialized conductive ball and silicon bulk-micromachining technology. The sensor consists of a conductive ball placed in $600{\mu}m$-deep micromachined silicon groove, in which Au thin film has been patterned using a shadow mask technique. Prior to the formation of the Au thin film, the sharp convex corner was rounded for smooth meatl deposition on the non-planar surface at the edge of the groove. The measurement results of the fabricated vibration sensor demonstrate a stable response characteristic to low-frequency vibration range ($1{\sim}30{\;}Hz$).

• Asian Pacific Journal of Cancer Prevention
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• v.14 no.5
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• pp.3177-3181
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• 2013

Background: Human papillomavirus (HPV) infection is the main causes of cervical cancer in women worldwide. The goal of the present study was to determine the prevalence and distribution of HPV genotypes in women from Saudi Arabia. Recently, several HPV detection methods have been developed, each with different sensitivities and specificities. Methods: In this study, total forty cervical samples were subjected to polymerase chain reaction and hybridization to BioFilmChip microarray assessment. Results: Human papillomavirus (HPV) infections were found in 43% of the specimens. The most prevalent genotypes were HPV 16 (30%) HPV 18 (8.0%) followed by type HPV 45, occurring at 5.0%. Conclusion: Our finding showed the HPV infection and prevalence is increasing at alarming rate in women of Saudi Arabia. There was no low risk infection detected in the tested samples. The BioFilmChip microarray detection system is highly accurate and suitable for detection of single and multiple infections, allowing rapid detection with less time-consumption and easier performance as compared with other methods.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.471-474
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• 2000

A flat type microgas sensor was fabricated on the p-type silicon wafer with low stress S $i_3$ $N_4$, whose thickness is 2${\mu}{\textrm}{m}$ using MEMS technology and its characteristics were investigated. W $O_3$thin film as a sensing material for detection of N $O_2$gas was deposited using a tungsten target by sputtering method, followed by thermal oxidation at several temperatures (40$0^{\circ}C$~$600^{\circ}C$) for one hour. N $O_2$gas sensitivities were investigated for the W $O_3$thin films with different annealing temperatures. The highest sensitivity when operating at 20$0^{\circ}C$ was obtained for the samples annealed at $600^{\circ}C$. As the results of XRD analysis, the annealed samples had polycrystalline phase mixed with triclinic and orthorhombic structures. The sample exhibit higher sensitivity when the system has less triclinic structure. The sensitivities, $R_{gas}$ $R_{air}$ operating at 20$0^{\circ}C$ to 5 ppm N $O_2$of the sample annealed at $600^{\circ}C$ were approximately 90. 90.

• Journal of Sensor Science and Technology
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• v.26 no.5
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• pp.366-369
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• 2017

This work presents a detailed study of several parameters on the spray coating method for fabricating a flexible cantilever. Conventionally, spin coating method have been widely used in the microelectromechanical system (MEMS) fabrication process. However, the major drawback of this method is the difficulties in protecting various topography with photoresist film, particularly when the device is manufactured in high aspect ratio. It is also a challenging process to form a small pattern in the etched area. On the other hand, the commercial spray coating systems are not advantageous from an economic perspective and the technique is also providing less efficient. In order to solve these issues, we have developed a manual spray coating system which can be efficiently used by combining the accessories available in the laboratory. The developed spray coating system consists of a spin-coater, motorized stage, a spray gun with the capable of controlling centrifugal force, injection amount, injection angle, and spray range. The major advantage of the proposed spray coating system is its reasonable fabrication cost. Secondly, the system can be easily disassembled after finishing the coating experiment. Owing to the mentioned advantages, we sincerely believe that the proposed spray coating system can be effectively used in many related applications.

• The Journal of Korean Society for Radiation Therapy
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• v.16 no.2
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• pp.33-41
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• 2004

Purpose : Film has been the primary tool in coincidence testing between the light field and the radiation field, which constitutes the quality assurance list of a linear accelerator. But there is a great chance of errors being different among the observer when using film. Thus this study set out to use the BIS(Beam Image System) in addition to film in comparing and evaluating coincidence results between the two fields and in searching for the improvement measures. Materials & Methods : Photon beam of 6 and 15MV was exposed to film and the BIS using a linear accelerator. The light and radiation fields were each $50{\times}50,\;100{\times}100,\;and\;200{\times}200mm^2$. The gantry angle was $0^{\circ}$ when using film and $0^{\circ}\;and\;270^{\circ}$ when using the BIS. The devices adopted to test coincidence between the two fields were a ruler and film scanner when using film. With the BIS, the width of the scanned light and radiation fields was measured for errors with setting the X and Y axis. Results : The visual measurements of the observer with film resulted that the radiation field was bigger than the light field and that their maximum error was 1.9mm. The results were the same with the measurements using the film scanner except for the average error, which was less than 1.9mm. On the contrary, the measurements using the BIS showed that the light field was bigger than the radiation field at the gantry angle of $0^{\circ}\;and\;270^{\circ}$. The maximum error was 0.96mm, and the error range was $<{\pm}2mm$ both in the X and Y axis. The average error of ${\Delta}X$, Y was the smallest in the order of the visual film measurements, film scanner measurements, and BIS measurements Conclusion . This requires a careful measurement for accurate quality assurance since errors are much different according to each observer that tests coincidence between visual fields with film. And an observer needs to use another image device or develop a measuring device of his own if it seems necessary for accurate measurements.