Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1999.07d
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- Pages.1514-1516
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- 1999
The study of ${\mu}c-Si/CaF_2$ /glass properties for thin film transistor application
박막트랜지스터 응용을 위한 ${\mu}c-Si/CaF_2$ /glass 구조특성연구
- Kim, Do-Young (School of electrical and computer engineering, Sungkyunkwan Univ.) ;
- Ahn, Byeung-Jae (School of electrical and computer engineering, Sungkyunkwan Univ.) ;
- Lim, Dong-Gun (School of electrical and computer engineering, Sungkyunkwan Univ.) ;
- Yi, Jun-Sin (School of electrical and computer engineering, Sungkyunkwan Univ.)
- 김도영 (성균관대학교 전기전자 및 컴퓨터공학부) ;
- 안병재 (성균관대학교 전기전자 및 컴퓨터공학부) ;
- 임동건 (성균관대학교 전기전자 및 컴퓨터공학부) ;
- 이준신 (성균관대학교 전기전자 및 컴퓨터공학부)
- Published : 1999.07.19
Abstract
This paper covers our efforts to improve the low carrier mobility and light instability of hydrogenated amorphous silicon (a-Si:H) films with microcrystalline silicon
Keywords