• Title/Summary/Keyword: film pressure

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Fabrication of Indium Tin Oxide (ITO) Transparent Thin Films and Their Microwave Shielding Properties (Indium Tin Oxide (ITO) 투광성 박막의 제조 및 전자파 차폐특성)

  • Kim, Yeong-Sik;Jeon, Yong-Su;Kim, Seong-Su
    • Korean Journal of Materials Research
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    • v.9 no.11
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    • pp.1055-1061
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    • 1999
  • Indium Tin Oxide (ITO) films were fabricated by vacuum deposition technique and their microwave shielding properties were investigated for the application to the transparent shield material. The vacuum coating was conducted in a RF co-sputtering machine. The film composition and structure associated with the sputtering conditions (argon and oxygen pressure. substrate temperature. RF input power) were investigated for the attainment of high electrical conductivity and good transparency. The electrical conductivity of IT0 films fabricated under the optimum deposition conditions (substrate temperature : $300^{\circ}C$. Ar flow rate : 20 sccm, Oxygen flow rate : 10 sccm, In/Sn input power : 50/30 W) showed 5.6$\times10^4$mho/m. The optical transparency is also considerably good. The microwave shielding properties including the dominant shielding mechanism are investigated from the electrical conductivity, thickness and skin depth of the ITO films. The total shielding effectiveness is then estimated to be 26 dB, which provides a suggestion that the IT0 films can be effectively used as the transparent shield material.

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Effect of Urethane Modification on the Anti-Bullet Property of Dyneema/vinylester Composites (우레탄 수지 첨가에 의한 다이니마/비닐에스터 복합재료의 방탄효과 향상 연구)

  • Yoon, T.H.;Cha, Y.M.;Yuck, J.I.;Paik, J.G.;Oh, Y.J.;Kim, H.J.
    • Composites Research
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    • v.24 no.6
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    • pp.7-11
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    • 2011
  • Polyurethane oligomers (PUOs) such as UA8297, UP127 and EB8200 were utilized to enhance the anti-bullet property of Dyneema$^{(R)}$/vinylester composites. First, prepregs of PUO and vinylester (XSR10) were prepared via spray coating on Dyneema$^{(R)}$ fabric at 21 % resin content (by volume). In addition, spray coating and film lamination were also carried out with a mixture of XSR10/PUO for selected PUOs. Next, the prepregs were dried at RT for 1-2 h and then at $100^{\circ}C$ for 30 min to remove the solvent and to provide partial cure when necessary. The prepregs were stacked in 24 layers and cured at $120^{\circ}C$ for 5 min under the contact pressure and for additional 25 min at 150 $kg/cm^2$. Finally, the anti-bullet properties of composite samples were evaluated by measuring $V_{50}$ with simulated fragment projectile (SFP, 17 gr). The results showed a 6.5 and 9.0 % increase of $V_{50}$ with UP127 and EB8200, respectively.

Diagnostic reference levels in intraoral dental radiography in Korea

  • Kim, Eun-Kyung;Han, Won-Jeong;Choi, Jin-Woo;Jung, Yun-Hoa;Yoon, Suk-Ja;Lee, Jae-Seo
    • Imaging Science in Dentistry
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    • v.42 no.4
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    • pp.237-242
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    • 2012
  • Purpose: The objectives of this study were to survey the radiographic exposure parameters, to measure the patient doses for intraoral dental radiography nationwide, and thus to establish the diagnostic reference levels (DRLs) in intraoral dental X-ray examination in Korea. Materials and Methods: One hundred two intraoral dental radiographic machines from all regions of South Korea were selected for this study. Radiographic exposure parameters, size of hospital, type of image receptor system, installation duration of machine, and type of dental X-ray machine were documented. Patient entrance doses (PED) and dose-area products (DAP) were measured three times at the end of the exit cone of the X-ray unit with a DAP meter (DIAMENTOR M4-KDK, PTW, Freiburg, Germany) for adult mandibular molar intraoral dental radiography, and corrections were made for room temperature and pressure. Measured PED and DAP were averaged and compared according to the size of hospital, type of image receptor system, installation duration, and type of dental X-ray machine. Results: The mean exposure parameters were 62.6 kVp, 7.9 mA, and 0.5 second for adult mandibular molar intraoral dental radiography. The mean patient dose was 2.11 mGy (PED) and 59.4 $mGycm^2$ (DAP) and the third quartile one 3.07 mGy (PED) and 87.4 $mGycm^2$ (DAP). Doses at university dental hospitals were lower than those at dental clinics (p<0.05). Doses of digital radiography (DR) type were lower than those of film-based type (p<0.05). Conclusion: We recommend 3.1 mGy (PED), 87.4 $mGycm^2$ (DAP) as the DRLs in adult mandibular molar intraoral dental radiography in Korea.

CMP Properties of TCO Film by kind of Slurry (슬러리 종류에 따른 투명전도박막의 연마특성)

  • Park, Ju-Sun;Choi, Gwon-Woo;Lee, Woo-Sun;Na, Han-Yong;Ko, Pil-Ju;Seo, Yong-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.539-539
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    • 2008
  • 본 논문에서는 투명전도박막의 균일한 표면특성을 확보하기 위해 광역평탄화 공정을 적용하여 투명전도 박막의 표면 거칠기를 연구하였으며 슬러리의 종류에 따른 박막의 연마특성을 연구하였다. 본 실험에서 사용된 ITO 박막은 RF Sputtering에 의해 제작되었고 하부 기판은 석영 Glass가 사용되었다. 광역평탄화를 위한 CMP 공정은 고분자 물질계열의 패드위에 슬러리입자를 공급하고 웨이퍼 캐리어에 하중을 가하며 웨이퍼의 표면을 연마하는 방법으로 가공물을 탄성패드에 누르면서 상대 운동시켜 가공물과 친화력이 우수한 부식액으로 화학적 제거를 함과 동시에 초미립자로 기계적 제거를 하는 것이다. ITO 박막의 평탄화를 위한 공정조건은 Polisher pressure 300 g/$cm^2$, 슬러리 유속 80 ml/min, 플레이튼속도 60 rpm으로 하였다. 위의 조건에 따라 공정을 진행 후 연마특성을 측정하였으며 이때 사용된 슬러리는 산화막에 사용되는 실리카슬러리와 금속연마용 슬러리인 EPL을 사용하였다. 연마율은 실리카 슬러리가 EPL슬러리에 비해 높음을 확인 하였다. CMP 공정에 의해 평탄화를 수행 할 경우 실리카슬러리와 EPL슬러리 모두 CMP전에 비해 돌출된 힐록들이 감소되었음을 알 수 있었다. 비균일도 특성은 모든 슬러리가 양호한 특성을 나타내었다. 평탄화된 박막의 표면과 거칠기 특성은 AFM(XE-200, PSIA Company) 을 이용하여 분석을 하였다.

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A Study on the Electrical Characteristic of Organic Thin Film by Physical Vapor Deposition Method (진공증착법을 이용한 유기 박막의 전기적 특성에 관한 연구)

  • Park, Su-Hong
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.57 no.2
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    • pp.140-145
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    • 2008
  • The purpose of this paper is to discuss the fabrication of $\beta$-PVDF($\beta$-Polyvinylidene fluoride, ${\beta}-PVF_2$) organic thin films using the vapor deposition method. Vapor deposition was performed under the following conditions: the temperature of evaporator, the applied electric field, and the pressure of reaction chamber were $270^{\circ}C$, 142.4 kV/cm, and $2.0{\times}10^{-5}\;Torr$, respectively. The molecular structure of the evaporated organic thin films were evaluated by a FT-IR. The results showed that the characteristic absorption peaks of $\beta$-form crystal increase from 72% to 95.5% with an increase in the substrate temperature. In the analysis of the electric characteristics, the abnormal increases in the relative dielectric constant and the dielectric loss factor in the regions of low frequency and high temperature are known to be caused by inclusion of impurity carriers in the PVDF organic thin films. In order to analyze quantitatively the abnormalities in the conductivity mechanism caused by ionic impurities, the product of the ion density and the mobility that affect the electrical property in polymeric insulators is analyzed. In the case of a specimen produced by varying the substrate temperature from $30^{\circ}C$ to $105^{\circ}C$, the product of mobility and the ion density decreased from $4.626{\times}10^8$ to $8.47{\times}10^7/V{\cdot}cm{\cdot}s$. This result suggests that the higher the substrate temperature is maintained, the better excluded the impurities are, and the more electrically stable material can be obtained.

Development of Equipment and Process on Dry Ice Blasting (드라이아이스 펠렛 세정 장치 및 공정개발)

  • Park, Jong Soo;Kim, Hotae;Kim, Sun-Geon
    • Clean Technology
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    • v.10 no.3
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    • pp.121-130
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    • 2004
  • Pelletizer of dry ice snow produced by adiabatic expansion of liquid carbon dioxide and their blaster were designed and manufactured. The blaster had a high cleaning power against various contaminants on the surface such as stain, oily dirt, lacquer film and paints with low blasting pressure and low consumption of blasting air. The capacity of hopper for dry ice pellet supply was 12 kg and the mass rate of pellet blasting was controlled in 0 to 1.2 kg/min. The impact of the pellets was independent of standoff distance within a certain limiting distance, and dependent on the impact stress, angle and mass rate of dry ice pellet blasting. On the other hand the cleaning power was influenced by thermal properties and surface roughness of the substrates and decreased in the order of glass, copper, brass, steel and acryl. The power was also affected by hardness and adhesion of the contaminant on the substrate, and decreased in the order of grease, epoxy and paint. The noise was detected during blasting in the range of 85 to 100dBA.

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Development of Shading Tape for Manufacturing of Touch Panel Display with High Screen-to-Body Ratio (기기 면적 대비 높은 화면 비율을 갖는 터치 패널 디스플레이 제조를 위한 차광 테이프의 개발)

  • Kim, Ki-Chul
    • Journal of Convergence for Information Technology
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    • v.7 no.4
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    • pp.75-81
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    • 2017
  • The design trend of information technology is quickly changed with the times. The design trend of information display is a bezel-less display, recently. The bezel-less display or edge-less display is a new trend of mobile phone display. In this study, the shading tape was manufactured for assembling process of touch panel display with the high screen-to-body ratio so-called bezel-less display. The shading tape was fabricated on PET film with the UV curable acrylic pressure sensitive adhesive(PSA) by roll-to-roll process. The UV curable PSA was synthesized with the eco-friendly toluene-less manufacturing method. The adhesive power of manufactured shading tape was investigated by motorized tensile testing machine. The thixotropic, maintaining property of cutting shape, was characterized by field emission scanning electron microscope. As results, the shading tape exhibits high adhesive power and good thixotropic performance suitable for assembly process of touch panel display. The functional shading tape will be expected to improve productivity of assembly process of touch panel display.

Characteristics of Sputtered Ta films by Statistical Method (통계적 실험 방법에 의한 Ta 박막의 증착 특성 연구)

  • Seo, Yu-Seok;Park, Dae-Gyu;Jeong, Cheol-Mo;Kim, Sang-Beom;Son, Pyeong-Geun;Lee, Seung-Jin;Kim, Han-Min;Yang, Hong-Seon;Park, Jin-Won
    • Korean Journal of Materials Research
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    • v.11 no.6
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    • pp.492-497
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    • 2001
  • We report the characteristics and the dependence of sputter-deposited Ta films on the process parameters. The properties of as-deposited Ta films such as deposition rate, resistivity, Rs uniformity, reflectivity, and stress were investigated and analyzed as a function of process parameter using a statistical experimental method. The functional relationships between the independent and dependent variables were predicted by surface response. The optimal deposition condition of DC magnetron sputtered Ta films was obtained at the chamber pressure of 2 mTorr, power density of 8 W/$\textrm{cm}^2$, and substrate temperature of 2$0^{\circ}C$ by means of resistivity and Rs uniformity. The fitness value for quadratic model as evaluated by the R- square was 0.85~ 0.9 without pooling. The as-deposited Ta films exhibited the resistivity of ~180$\mu$$\Omega$cm with Rs uniformity of ~2%. The transmission electron microscopy and x-ray diffractometry identified that the phase of as-deposited film was $\beta$-Ta having the grain size of 100~200.

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A Study on Sleep Quality Algorithm by Piezo Sensor Signal (Piezo Sensor Signal에 의한 수면의 질 Algorithm에 관한 연구)

  • Byun, Jae-Ryoung;Cho, We-Duck;Kim, Young-Kil
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2011.10a
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    • pp.324-326
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    • 2011
  • Measuring a biosignal during sleep is an important part of diagnosis and treatment of sleep disorder and also used to determine the general quality of sleep. As in current polysomnography, Contact method, which requires the attachment of electrodes to the skin, is the typical method to measure a biosignal during sleep. The procedure of this test is often considered to be inconvenient and tiresome because it requires attaching the device to the skin for each observation, and also limits free movement throughout the test. For this reason, the research on the acquiring the biosignal information without any attachment of a fixture on the skin is being conducted actively these days. In this study, it is suggested to check the heart rate per minute and the presence of breathing by placing a Piezo, which is a film type of pressure sensor, on the bed.

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The properties of $TiO_2$ thin films by oxygen partial pressure (산소 분압비에 따른 $TiO_2$ 박막의 특성평가)

  • Yang, Hyun-Hun;Lim, Jeong-Myung;Park, oung-Yun;Jeong, Woon-Jo;Park, Gye-Choon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.05c
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    • pp.154-157
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    • 2003
  • $TiO_2$ thin films were fabricated by RF magnetron sputtering system at by controlling deposition times, ratios of $Ar:O_2$ partial presser ratio and substrate conditions. And the surface, cross-section morphology, microstructure, and composition ratio of the films were analyzed by FE-SEM, TEM and XPS. Besides, the optical absorption and transmittance of the $TiO_2$ films were measured by a UV-VIS-NIR Spectrophotometer, and photocatalytic properties were studied by G${\cdot}$C Analyzer & Data Analysis system. As the result, when $TiO_2$ thin film was made at deposition time of 120[min] and $Ar:O_2$ ratio of 60:40, the best structural and optical properties among many thin films could be accepted. The best results of properties were as follows: thickness; 360~370[nm), grain size; 40[nm], gap between two peak binding energy; $5.8{\pm}0.05[eV]$ ($2_{p3/2}$ peak and $2_{p1/2}$ peak of Ti was show at $458.3{\pm}0.05[eV]$ and $464.1{\pm}0.05[eV]$ respectively), binding energy; $530{\pm}0.05[eV]$, optical energy band gap; 3.4[eV].

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