• 제목/요약/키워드: film crystallinity

검색결과 642건 처리시간 0.024초

Off-axis 고주파 마그네트론 스퍼터링법을 이용한 이종에피텍셜 ZnO 박막 성장 (Growth of Heteroepitaxial ZnO Thin Film by Off-axis RF Magnetron Sputtering)

  • 박재완;박종완;이전국
    • 한국세라믹학회지
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    • 제40권3호
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    • pp.262-267
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    • 2003
  • Off-axis 고주파 마그네트론 스퍼터링법으로 사파이어(0001) 기판 위에 이종에피텍셜 ZnO 박막을 제조하였다. ZnO 박막의 결정성은 증착압력, RF power 그리고 기판온도의 공정조건 변화에 많은 영향을 받았으며, 스퍼터링된 입자의 적당한 kinetic energy와 기판표면에서의 표면이동도(surface mobility)가 조화를 이룰 때 결정성이 우수한 이종에피텍셜 박막을 을 얻을 수 있었다. 이종에피텍셜 ZnO 박막의 Photoluminescence(PL) 특성 측정 결과, 저온(17K)에서 약 3.36 eV의 자외선 영역 발광을 관찰할 수 있었으며, 상온에서도 3.28 eV의 자외선 영역 발광을 관찰할 수 있었다. ZnO 박막을 산소 분위기에서 열처리함에 따라 결정성은 향상되는 반면 자외선 영역의 발광은 급격히 감소하는 경향을 보였다.

Ambient Oxygen Effects on the Growth of ZnO Thin Films by Pulsed Laser Deposition

  • Park, Jae-Young;Kim, Sang-Sub
    • 한국재료학회지
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    • 제17권6호
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    • pp.303-307
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    • 2007
  • ZnO thin films were prepared by pulsed laser deposition on amorphous fused silica substrates at different ambient $O_2$ pressures varying from 0.5 to 500 mTorr, to observe the effect of ambient gas on their crystalline structure, morphology and optical properties. Results of X-ray diffraction, scanning electron microscopy, atomic force microscopy and photoluminescence studies showed that crystallinity, surface features and optical properties of the films significantly depended on the oxygen background pressure during growth. A low oxygen pressure (0.5 mTorr) seems to be suitable for the growth of highly c-axis oriented and smoother films possessing a superior luminescent property. The films grown at the higher $O_2$ pressures (50-500 mTorr) were found to have many defects probably due to an excessive incorporation of oxygen into ZnO lattice. We speculate that the film crystallinity could be affected by the kinetics of atomic arrangement during deposition at the higher oxygen pressures.

다이아몬드 CVD에서 산소혼입이 증착속도 및 결정성에 미치는 영향 (Effects of Oxygen Addition on the Growth Rate and Crystallinity in Diamond CVD)

  • 서문규;이지화
    • 한국세라믹학회지
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    • 제27권3호
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    • pp.401-411
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    • 1990
  • Deposition of diamond films on Si(100) from the mixtures of methane and hydrogen were investigated using hot W filament CVD method. The nucleation density could be increased thousandfold by surface treatment with SiC powder. Upon oxygen addition to the mixture, crystal facets became developed more clearly by selectively removing non-diamond carbons, but the film growth rate generally decreased. However, at a very high methane content(e.g. 10%), a small amount of oxygen addition has resulted in an increase in the film deposition rate presumably by promotion of methane decomposition. When the gas pressure was varied, the growth rate exhibited a maxiumum at around 20torr and the film crystallinity steadily improved with the pressure increase. The observed variation of the growth rate by oxygen addition was discussed in terms of its role in the pyrolysis and the subsequent gas phase reactions.

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m-Aramid Films in Diverse Coagulants

  • Kim, Ji-Young;Jung, Ji-Won;Kim, Sam-Soo;Lee, Jae-Woong
    • 한국염색가공학회지
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    • 제21권4호
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    • pp.63-67
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    • 2009
  • m-Aramid dissolved in N,N-dimethylacetamide (DMAc), were coagulated in different coagulants such as water, methanol, ethanol, propanol and butanol. Various concentrations and temperatures of the coagulants were also used to evaluate dyeing properties of coagulated m-aramid films. Field emission scanning electron microscopy (FE-SEM) was employed to investigate the surface morphology of m-aramid films. Wide angle X-ray diffraction (WAXD) was conducted in order to measure crystallinity change of mcaramid fibers and films. WAXD patterns showed that crystallinity of m-aramid fibers was reduced after film formation. In addition, color depth (K/S value) was measured and the results revealed that the film coagulated in water possessed fairly enhanced color depth.

고주파 플라즈마 CVD에 의한 초경합금상에 다이아몬드 박막의 합성 (Synthesis of diamond thin film on WC-Co by RF PACVO)

  • 김대일;이상희;박종관;박구범;조기선;박상현;이덕출
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 하계학술대회 논문집
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    • pp.452-455
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    • 2000
  • Diamond thin films were synthesized on WC-Co substrate at various experimental parameters using 13.56MHz RF PACVD(radio frequency plasma-assisted chemical vapor deposition). In order to increase the nucleation density, the WC-Co substrate was polished with 3$\mu\textrm{m}$ diamond paste. And the WC-Co substrate was pretreated in HNO$_3$: H$_2$O = 1:1 and O$_2$ plasma. In H$_2$-CH$_4$gas mixture, the crystallinity of thin film increased with decreasing CH$_4$concentration at 800W discharge power and 20torr reaction pressure. In H$_2$-CH$_4$-O$_2$gas mixture, the crystallinity of thin film increased with increasing O$_2$concentration at 800W discharge power, 20torr reaction pressure and 4% CH$_4$concentration.

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식용 콜라겐 분말을 적용한 바이오 압전 발전기의 특성 (Characteristics of Bio-Piezoelectric Generator Using Edible Collagen Powder)

  • 손하영;박상식
    • 한국재료학회지
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    • 제34권4호
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    • pp.215-222
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    • 2024
  • Because collagen is inherently piezoelectric, research is being actively conducted to utilize it to harvest energy. In this study, a collagen solution was prepared using edible low-molecular-weight peptide collagen powder, and collagen films were fabricated using a dip coating method. The collagen films prepared by dip coating showed a smooth surface without defects such as pinholes or cracks. Dehydrothermal treatment of the collagen films was performed to induce a stable molecular structure through cross-linking. The collagen film subjected to dehydrothermal treatment at 110 ℃ for 24 h showed a thickness reduction rate of 19 %. Analysis of the collagen films showed that the crystallinity of the collagen film improved by about 7.9 % after dehydrothermal treatment. A collagen film-based piezoelectric nanogenerator showed output characteristics of approximately 13.7 V and 1.4 ㎂ in a pressure test of 120 N. The generator showed a maximum power density of about 2.91 mW/m2 and an output voltage of about 8~19 V during various human body movements such as finger tapping. The collagen film-based piezoelectric generator showed improved output performance with improved crystallinity and piezoelectricity after dehydrothermal treatment.

표면개질에 의한 헤테로에피텍시 단결정 다이아몬드의 결정성 향상 (Improving the Crystallinity of Heteroepitaxial Single Crystal Diamond by Surface Modification)

  • 배문기;김민수;김성우;윤수종;김태규
    • 열처리공학회지
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    • 제33권3호
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    • pp.124-128
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    • 2020
  • Recently, many studies on growth of single crystal diamond using MPECVD have been conducted. The heteroepitaxial method is one of the methods for growing diamonds on a large-area substrate, and research on synthesis of single crystal diamonds using SrTiO3, MgO, and sapphire substrates has been attempted. In addition, research is being conducted to reduce the internal stress generated during diamond growth and to improve the crystallinity of the diamond. The compressive stress generated therein causes peeling and bowing from the substrate. This study aimed to synthesize heteroepitaxial single crystal diamonds with high crystallinity by surface modification. A diamond thin film was first grown on a sapphire/Ir substrate by MPECVD, and then etched with H2 gas to modified the morphology and roughness of the surface. A secondary diamond layer was grown on the surface, and the internal stress, crystallinity of the diamond were investigated. As a result, the fabrication of single crystal diamonds with improved crystallinity was confirmed.

저밀도 폴리에틸렌 필림의 결정화도 및 전기적 특성 (The crystallinity and electrical characteristics of low density polyetylene thin film)

  • 윤중락;권정열;이헌용
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1996년도 추계학술대회 논문집
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    • pp.164-168
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    • 1996
  • The relation between crystallinity and thermal history in low density polyethylene thin films and their effect on electric conduction phenomena and dielectric breakdown was studied. The low density polythylene thin films obtained by the solution growth method heat-treated at 140[$^{\circ}C$] for 2 h and subsequently cooling to various ways. The degree of crystallinity was estimated by the X-ray diffraction measurement for the specimen of slowly cooling, ICE quenching and liquid nitrogen quenching. The result shows that the crystallinity decreases become faster as the cooling speed increased, and that conduction phenomenon is governed by the space charge limited current in high field. It was found that the dielectric breakdown field increases with an increase in cooling speed and test number in self-healing breakdown method.

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