• 제목/요약/키워드: field emission emitter

검색결과 184건 처리시간 0.033초

탄소나노튜브를 이용한 텅스텐 나노팁 전계방출기 제작 (Fabrication of a nano-sized conical-type tungsten field-emitter based on carbon nanotubes)

  • 박창균;김종필;김영광;박진석
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 2008년도 제39회 하계학술대회
    • /
    • pp.1220-1221
    • /
    • 2008
  • Submicron-sized conical-type tungsten(W) field-emitters based on carbon nanotubes(CNTs) are fabricated with the configuration of CNTs/catalyst(Ni)/buffer(Al/Ni/TiN)/W-tip. This study focuses on elucidating how the Al/Ni/TiN stacked buffer layer affects the structural properties of CNTs and the electron-emission characteristics of CNT-emitters. Field-emission scanning electron microscopy(FESEM), high-resolution transmission electron microscopy(HRTEM), and x-ray photoelectron spectroscopy(XPS) are used to monitor the nanostructures, surface morphologies, chemical bonds of all the catalysts and CNTs grown. The crystalline structure of CNTs is also characterized by Raman spectroscopy. Furthermore, the measurement of field-emission characteristics for the field-emitters fabricated shows that the emitter using the Al/Ni/TiN stacked buffer reveals the excellent performances.

  • PDF

전계 효과 트랜지스터로 제어하는 전계 방출 소자의 시뮬레이션에 의한 특성 평가 (Characteristics of MOSFET-Structured Silicon Field Emitter by Computer Simulation)

  • 김진호;길태현;윤상한;김용상;박진석
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 1998년도 하계학술대회 논문집 D
    • /
    • pp.1318-1320
    • /
    • 1998
  • We have investigated the electrical characteristics of a MOSFET-structured silicon field emitter by employing Maxwell 2D and Silvaco simulators. The potential distribution is obtained by Maxwell 2D simulator and the field emission current is calculated by Fowler-Nordheim equations. The characteristics of MOSFET is simulated by Silvaco simulator. Simulated results are almost identical to the experimental results. Also, we have studied the emission characteristics as funtions of several geometric parameters.

  • PDF

Electrical Conduction Characteristics of a Thick-film Form Multiwalled Carbon Nanotubes for Field Electron Emitter

  • Lee, Yun-Hi;Kim, Hoon;Ju, Byeong-Kwon;Yu, Jae-Eun;Oh, Myung-Hwan
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 한국정보디스플레이학회 2000년도 제1회 학술대회 논문집
    • /
    • pp.53-54
    • /
    • 2000
  • Measurements of the direct current resistivity, on multiwalled carbon nanotubes(MWNT) for field electron emitter source that had been screen printed in a thick film form were made as a function of temperature T in the range of 1.7K-390K. In this measuring temperature range, the electrical resistivity for the MWNT show that the main contribution to the conductivity comes form carries that hop directly between localized states executing variable range hopping processes. This thick-film form system for large area display showed a high bright light emission as well as very low turn-on field as like an individual MWNT system at room temperature. Furthermore, the electron emission characteristics followed well typical Fowler-Nordheim conduction under the vacuum.

  • PDF

몰리브덴 팁 전계 방출 소자의 제조 및 다이아몬드 상 카본의 코팅효과 (Fabrication of Mo-tip Field Emitter Array and Diamond-like Carbon Coating Effects)

  • 주병권;정재훈;김훈;이상조;이윤희;차균현;오명환
    • 한국전기전자재료학회논문지
    • /
    • 제11권7호
    • /
    • pp.508-516
    • /
    • 1998
  • Mo-tip field emitter arrays(FEAs) were fabricated by conventional Spindt process and their life time characteristics and failure mode were evaluated. The fabricated Mo-tip FEA could generate at least $0.35\{mu} A/tip$ emission current for about 320 persistently under a constant gate bias of 140 V and was finally destroyed through self-healing mode. Thin diamond-like carbon films were coated on the M-tip by plasma-enhanced CVD and the dependence of emission properties upon the DLC thickness was investigated. By DLC coating, the turn-on voltage and emission current were appeared to be improved whereas the current fluctuation was increased in the DLC thickness range of $0~1,000\{AA}$.

  • PDF

음극이 자동 정렬된 화산형 초미세 실리콘 전계방출 소자 제작 (Fabrication of Self -aligned volcano Shape Silicon Field Emitter)

  • 고태영;이상조;정복현;조형석;이승협;전동렬
    • 한국진공학회지
    • /
    • 제5권2호
    • /
    • pp.113-118
    • /
    • 1996
  • Aligning a cathode tip at the center of a gate hole is important in gated filed emission devices. We have fabricated a silicon field emitter using a following process so that a cathode and a gate hole are automatically aligned . After forming silicon tips on a silicon wafer, the wafer was covered with the $SiO_2$, gate metal, and photoresistive(PR) films. Because of the viscosity of the PR films, a spot where cathode tips were located protruded above the surface. By ashing the surface of the PR film, the gate metal above the tip apex was exposed when other area was still covered with the PR film. The exposed gate metal and subsequenlty the $SiO_2$ layer were selectively etched. The result produced a field emitter in which the gate film was in volcano shape and the cathode tip was located at the center of the gate hole. Computer simulation showed that the volcano shape and the cathode tip was located at the center of the gat hole. Computer simulation showed that the volcano shape emitter higher current and the electron beam which was focused better than the emitter for which the gate film was flat.

  • PDF

PECVD에 의해 작성된 탄소계 박막의 전계전자방출특성에 대한 RF power 의존성에 관한 연구 (RF power dependence on field emission property from carbon thin film grown by PECVD)

  • 류정탁;김연보
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2000년도 추계학술대회 논문집
    • /
    • pp.519-523
    • /
    • 2000
  • Using plasma-enhanced chemical vapor deposition (PECVD), carbon thin film as electron field emitter were fabricated. These carbon thin film were deposited on Si(100) substrate at several RF power. These film were estimated by raman spectroscopy, scanning electron microscopy, and field emission. The field electron emission property of these carbon thin film was estimated by a diode technique. As the result, we observed that the field emission properties of these films were promoted by higher RF power. These results are explained as change of surface morphology and structural properties of carbon thin film

  • PDF

다양한 방법에 의해 성장된 탄소 나노튜브의 전계방출 특성 (Field emission properties of carbon nanotubes grown by various methods)

  • 김부종;장한빛;김종필;박진석
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 2011년도 제42회 하계학술대회
    • /
    • pp.1408-1409
    • /
    • 2011
  • Carbon nanotubes (CNTs) were grown on conical tip substrates by using various methods such as electrophoretic deposition, dip-coating, and spray. The scanning electron microscope measurement showed that the spray method ascertained the most uniform deposition of CNTs. The CNT-emitter that was fabricated by the spray method revealed the lowest turn on voltage of electron emission and the highest emission current. In addition, the spray-produced CNT emitter showed the most stable long-term emission characteristics.

  • PDF

Fabrication of Vertically Aligned GaN Nanostructures and Their Field Emission Property

  • 조종회;김제형;조용훈
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
    • /
    • pp.281-281
    • /
    • 2014
  • The field emission properties of GaN are reported in the present study. To be a good field emitter, it requires a low work function, high aspect ratio, and strong mechanical stability. In the case of GaN, it has a quite low work function (4.1eV) and strong chemical/mechanical/thermal stabilities. However, so far, it was difficult to fabricate vertical GaN nanostructures with a high aspect ratio. In this study, we successfully achieved vertically well aligned GaN nanostructures with chemical vapor-phase etching methods [1] (Fig. 1). In this method, we chemically etched the GaN film using hydrogen chloride and ammonia gases at high temperature around $900^{\circ}C$. This process effectively forms vertical nanostructures without patterning procedure. This favorable shape of GaN nanostructures for electron emitting results in excellent field emission properties such as a low turn-on field and long term stability. In addition, we observed a uniform fluorescence image from a phosphor film attached at the anode part. The turn-on field for the GaN nanostructures is found to be about $0.8V/{\mu}m$ at current density of $20{\mu}A$/cm^2. This value is even lower than that of typical carbon nanotubes ($1V/{\mu}m$). Moreover, threshold field is $1.8V/{\mu}m$ at current density of $1mA$/cm^2. The GaN nanostructures achieved a high current density within a small applied field range. We believe that our chemically etched vertical nanostructures are the promising structures for various field emitting devices.

  • PDF

갈륨이 첨가된 산화아연막의 코팅에 따른 미세팁 구조 탄소나노튜브의 전계방출 특성 및 장시간 안정성 (Field-emission Properties and Long-term Stability of Tip-type Carbon Nanotubes Coated with Gallium-incorporated Zinc Oxide Films)

  • 김종필;노영록;조경철;이상렬;박진석
    • 반도체디스플레이기술학회지
    • /
    • 제8권4호
    • /
    • pp.65-69
    • /
    • 2009
  • Carbon nanotubes (CNTs) were coated with undoped zinc oxide (ZnO) or 5 wt% gallium-incorporated ZnO (GZO) using various deposition conditions. The CNTs were directly grown on conical-type tungsten substrates at $700^{\circ}C$ using inductively coupled plasma-chemical vapor deposition. The pulsed laser deposition technique was used to deposit the ZnO and GZO thin films with very low stress. Field-emission scanning electron microscopy and high-resolution transmission electron microscopy were used to monitor the variations in the morphology and microstructure of CNTs prior to and after ZnO or GZO coating. The formation of ZnO and GZO films on CNTs was confirmed using energy-dispersive x-ray spectroscopy. In comparison to the as-grown (uncoated) CNT emitter, the CNT emitter that was coated with a thin (10 nm) GZO film showed remarkably improved field emission characteristics, such as the emission current of $325\;{\mu}A$ at 1 kV and the threshold field of $1.96\;V/{\mu}m$ at $0.1\;{\mu}A$, and it also exhibited the highly stable operation of emission current up to 40 h.

  • PDF

전계방출광원용 카본나노파이버 에미터 연구 (Study on Carbon Nano Fiber Emitter for Field Emission Lamp)

  • 김광복;이선희;유승호;김대준;김용원
    • 한국조명전기설비학회:학술대회논문집
    • /
    • 한국조명전기설비학회 2008년도 춘계학술대회 논문집
    • /
    • pp.21-24
    • /
    • 2008
  • Properties of carbon nano fiber (CNF) as field emitters were described. Carbon nano fiber (CNF) of herringbone was prepared by thermal chemical vapor deposition(CVD). Field emitters mixed with organic binders, conductive materials and were prepared by screen-printing process. In order to increase field emissions, the surface treatment of rubbing & peel-off was applied to the printed CNF emitters on cathode electrode. The measurements of field emission properties were carried out by using a diode structure inline vacuum chamber. CNF of herringbone type showed good emission properties that a turn on field was as low as 2.1 $V/{\mu}m$ and current density was as large as 0.15 $mA/cm^2$ of 4.2 $V/{\mu}m$ with electric field. Through the results. we propose that CNFs are suitable for application of electron emitters in Field Emission Devices.

  • PDF