Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1998.07d
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- Pages.1318-1320
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- 1998
Characteristics of MOSFET-Structured Silicon Field Emitter by Computer Simulation
전계 효과 트랜지스터로 제어하는 전계 방출 소자의 시뮬레이션에 의한 특성 평가
- Kim, Jin-Ho (Myongji University) ;
- Kil, Tae-Hyun (Myongji University) ;
- Yun, Sang-Han (Myongji University) ;
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Kim, Yong-Sang
(Myongji University)
;
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Park, Jin-Seok
(Hanyang University)
- Published : 1998.07.20
Abstract
We have investigated the electrical characteristics of a MOSFET-structured silicon field emitter by employing Maxwell 2D and Silvaco simulators. The potential distribution is obtained by Maxwell 2D simulator and the field emission current is calculated by Fowler-Nordheim equations. The characteristics of MOSFET is simulated by Silvaco simulator. Simulated results are almost identical to the experimental results. Also, we have studied the emission characteristics as funtions of several geometric parameters.
Keywords