• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.489-490
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• 2006

To establish fabrication techniques for nano structure understanding of focused ion beam (FIB) milling process is required. In this study the mathematical model containing the factors related to FIB milling is developed to acquire the optimal fabrication condition. Then, the model is verified by comparison with various nano pattern fabricated in actual FIB system. Consequently, it is demonstrated that the nano patterns with the smallest pitch can be fabricated using developed FIB milling model.

• 대한건축학회논문집:구조계
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• 제34권7호
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• pp.19-26
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• 2018

This study tested 25 lightweight aggregate concrete (LWAC) mixtures using the expanded bottom ash and dredged soil granules to examine the compressive strength gain of such concrete with different ages. The test parameters investigated were water-to-cement ratios and the natural sand content for the replacement of lightweight fine aggregate. The compressive strength gain rate in the basic equation specified in fib model code was experimentally determined in each mixture and then empirically formulated as a function of the water-to-cement ratio and oven-dried density of concrete. When compared with 28-day compressive strength, the tested LWAC mixtures exhibited relatively low gain ratios (0.49~0.82) at an age of 3 days whereas the gain ratios (1.16~1.41) at 91 days were higher than that (1.05~1.15) of the conventional normal-weight concrete. Thus, the fib model equations tend to overestimate the early strength gain of LWAC but underestimate the long-term strength gain. The proposed equations are in good agreement with the measured compressive strength development of LWAC at different ages, indicating that the mean and standard deviation of the normalized root mean square errors determined in each mixture are 0.101 and 0.053, respectively.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.472-477
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• 2004

Miniaturization is the central theme in modern fabrication technology. Many of the components used in modem products are becoming smaller and smaller. The direct write FIB technology has several advantages over contemporary micromachining technology, including better feature resolution with low lateral scattering and capability of mastless fabrication. Therefore, the application of focused ion beam(FIB) technology in micro fabrication has become increasingly popular. In recent model of FIB, however the feeding system has been a very coarse resolution of about a few ${\mu}{\textrm}{m}$. It is not unsuitable to the sputtering and the deposition to make the high-precision structure in micro or macro scale. Our research is the development of nano stage of 200mm strokes and l0nm resolutions. Also, this stage should be effectively operating in ultra high vacuum of about 1$\times$10$^{-5}$ pa. This paper presents the concept of nano stages and the discussion of the material treatment for ultra tush vacuum.

• Advances in concrete construction
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• 제13권 2호
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• pp.191-198
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• 2022

FIB is introduced as the sole guideline for the design purpose that results in a practical relationship for the torsional capacity of concrete beams strengthened with carbon fiber-reinforced polymer (CFRP). This study applies first-order reliability method to assess the reliability evaluation of the torsional capacity of CFRP-strengthened beams on the basis of FIB guidelines. In terms of steel reinforcement losses, this study applies a corrosion model to investigate the ceaseless deterioration of the existing structure. Hence, the average of reliability indices varies between 2.68 and 2.80, indicating the reliability viewpoint of the design methodologies. The average values are somehow low compared to the target values of reliability (3.0 or 3.5) applied in the calibration stage of the FIB guideline. In this way, the partial safety factors may change in the forthcoming guideline revisions. For this aim, the reliability of strengthening ratio was applied to assess the variation in the average value of the reliability index with different partial safety factors. The performance of parametric study for the factor proved that minimum values of 1.60 and 2.32 are required for target values of reliability (3.0 and 3.5), respectively.

• Applied Microscopy
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• 제42권4호
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• pp.223-227
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• 2012

Focused Ion Beam (FIB) systems have incorporated versatile nanomanipulators with inherent sophisticated machining capability to characterize the electrical properties of highly miniature components of electronic devices. Carbon fibers were chosen as a model system to test the applicability of nanomanipulators to microscale electronic materials, with special emphasis on the direct current current-voltage characterizations in terms of electrode configuration. The presence of contact resistance affects the electrical characterization. This resistance originates from either i) the so-called "spreading resistance" due to the geometrical constriction near the electrode - material interface or ii) resistive surface layers. An appropriate electrode strategy is proposed herein for the use of FIB-based manipulators.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2004년도 춘계학술대회 발표 논문집
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• pp.223-228
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• 2004

Miniaturization is the central theme in modern fabrication technology. Many of the components used in modern products are becoming smaller and smaller. The direct write FIB technology has several advantages over contemporary micromachining technology, including better feature resolution with low lateral scattering and capability of maskless fabrication. Therefore, the application of FIB technology in micro fabrication has become increasingly popular. In recent model of FIB, however the feeding system has been a very coarse resolution of about a few $\mu\;\textrm{m}$. It is not unsuitable to the sputtering and the deposition to make the high-precision structure in micro or macro scale. Our research is the development of nano stage of 200mm strokes and 10nm resolutions. Also, this stage should be effectively operating in ultra high vacuum of about $1\times10^{-7}$ torr. This paper presents the concept of nano stages and the discussion of the material treatment for ultra high vacuum.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1186-1189
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• 2005

Focused Ion Beam machining is an attractive approach to produce nano-scale 3D structures. However, like other beam-based manufacturing processes, the redeposition of the sputtered material during the machining deteriorates the geometric accuracy of ion beam machining. In this research a new approach to reduce the geometric error in FIB machining is introduced. The observed redeposition phenomena have been compared with existing theoretical model. Although the redeposition effect has good repeatability the prediction of exact amount of geometric error in ion beam machining is difficult. Therefore, proposed method utilizes process control approach. Developed algorithm measures the redeposition amount after every production cycle and modifies next process plan. The method has been implemented to a real FIB machine and the experimental results demonstrated considerable improvement of five micrometer-sized pocket machining.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1871-1874
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• 2005

The direct write FIB technology has several advantages over contemporary micro-machining technology, including better feature resolution with low lateral scattering and capability of maskless fabrication. Therefore, the application of FIB technology in micro fabrication has become increasingly popular. In recent model of FIB, however the feeding system has been a very coarse resolution of about a few ${\mu}m$. Our research is the development of nano stage of 200mm strokes and 10nm resolutions. Also, this stage should be effectively operating in ultra high vacuum of about $1x10^{-7}$ torr. This paper presents the discussion and results of CAE of the 2 axes stages. we have estimated the stable static and dynamic characteristics for dual servo system. Therefore the 2 axes stages developed and future work are introduced at the end of the paper.

• 한국전기전자재료학회논문지
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• 제27권11호
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• pp.679-685
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• 2014

For the measurements of surface shape milled using FIB (focused ion beam), the silicon bulk, $Si_3N_4/Si$, and Al/Si samples are used and observed the shapes milled from different sputtering rates, incident angles of $Ga^+$ ions bombardment, beam current, and target material. These conditions also can be influenced the sputtering rate, raster image, and milled shape. The fundamental ion-solid interactions of FIB milling are discussed and explained using TRIM programs (SRIM, TC, and T-dyn). The damaged layers caused by bombarding of $Ga^+$ ions were observed on the surface of target materials. The simulated results were shown a little bit deviation with the experimental data due to relatively small sputtering rate on the sample surface. The simulation results showed about 10.6% tolerance from the measured data at 200 pA. On the other hand, the improved analytical model of damaged layer was matched well with experimental XTEM (cross-sectional transmission electron microscopy) data.

• 한국콘크리트학회:학술대회논문집
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• 한국콘크리트학회 2008년도 추계 학술발표회 제20권2호
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• pp.265-268
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• 2008

슬래브-기둥 접합부는 많은 구조물의 시공에 사용되고 있다. 그러나 횡하중을 받는 슬래브-기둥 접합부의 파괴거동 및 극한강도를 예측하는 것이 매우 어렵기 때문에 현행 구조물 설계기준은 횡하중을 받는 슬래브-기둥 접합부의 파괴 거동을 명확하게 설명하지 못하고 있다. 본 논문에서는 횡하중을 받는 슬래브-기둥 접합부의 극한해석과 설계를 위하여 응력교란영역을 가지는 3차원 구조의 해석과 설계를 위하여 제안된 3차원 격자 스트럿-타이 모델 방법을 파괴실험이 수행된 43개의 횡하중을 받는 슬래브-기둥 접합부의 극한강도 평가에 적용하고, ACI 318-05 기준과 FIB 1999 기준에 의한 극한강도 평가결과와 비교함으로써 3차원 격자 스트럿-타이 모델 방법의 타당성을 검토하였다.