• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.1101-1106
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• 2005

The purpose of this study was to develop a process management system to manage ingot fabrication and the quality of the ingot. The ingot is the first manufactured material of wafers. Operating data (trace parameters) were collected on-line but quality data (measurement parameters) were measured by sampling inspection. The quality parameters were applied to evaluate the quality. Thus, preprocessing was necessary to extract useful information from the quality data. First, statistical methods were employed for data generation, and then modeling was accomplished, using the generated data, to improve the performance of the models. The function of the models is to predict the quality corresponding to the control parameters. The dynamic polynomial neural network (DPNN) was used for data modeling that used the ingot fabrication data.

• Journal of Institute of Control, Robotics and Systems
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• v.17 no.2
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• pp.131-134
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• 2011

In this study, we propose an optimal design and new fabrication method for a slim tactile sensor. Slim tactile sensor can detect 3-axial forces and has suitable flexibility for intelligent robot fingers. To amplify the contact signal, a unique table-shaped structure was attempted. A new layer-by-layer fabrication process for polymer micromachining that can make a 3D structure by using a sacrificial layer was proposed. A table-shaped epoxy sensing plate with four legs was built on top of a flexible polymer substrate. The plate can convert an applied force to a concentrated stress. Normal and shear forces can be detected by combining responses from metal strain gauges embedded in the polymer substrate. The optimal positions of the strain gauges are determined using the strain distribution obtained from finite element analysis.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.945-949
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• 2003

LIGA(Lithographie Galvanoformung Abformung), a fabrication method for the production of microstructrues with a high aspect ratio, is now playing an important role in a fabrication of polymeric optical waveguide device as the replication processes have been developed such as hot embossing and injection molding. The present report deals with the fabrication of Ni master used for the replication of multi-mode polymeric optical waveguide. With the basic technological features in the sequence of the LIGA technique, we fabricated Ni master with 12 channel microstructures of $100\;{\times}\;100{\mu}m\;^2{\times}\;60mm$, and achieved an accuracy of ${\pm}1\;{\mu}m$. Manufactured polymeric optical wavegude with the same using hot embossing process has also the same accuracy and approved its mass production capability.

• Journal of the Korean Institute of Telematics and Electronics
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• v.25 no.6
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• pp.637-646
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• 1988

The CMOS physical parameters are extracted using by processing models in fabrication steps, processing parameters, fabrication disturbances, control parameters. Statistical CMOS process and device simulator is proposed to evaluate the effect of inherent fluctuations in IC fabrication. Using this simulator, we perform worst case analysis in terms of statistically independent disturbances and compare this proposed method to Monte Carlo method, previous Worst Case method. And simulation results with this proposed method are more accurate than the past worst case analysis. This package is written in C language and runs on a IBM PC AT(OPUS).

• Proceedings of the KIEE Conference
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• 2000.07b
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• pp.597-599
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• 2000

Fabrication of superconducting magnet system needs high-degree technical know-how, which require not only a lot of investment of man-power and finance but also that of long time. Until now, we have met many technical problems and it have been solved by trial and error. In fact, we have got chance to come into contact with researches into the magnet design for MRI easily but did not contact with the process of fabrication and the techniques. We introduced process of fabrication and techniques for MRI magnet system until before the superconducting magnet combine with cryostat in Korea Electrotechnology Research Institute.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.21 no.4
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• pp.77-83
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• 2022

Amorphous alloys exhibit excellent mechanical properties; therefore, application technology development is being attempted in various fields. However, industrial use of application technology is limited owing to the limitations in fabrication. In this study, micropattern fabrication of an amorphous alloy was conducted using laser beam machining. Although microhole fabrication is possible without the deformation of the amorphous phase through nanosecond pulsed laser beam machining, there are limitations in the generation of recast layers and spatters. In cover plate laser beam machining (c-LBM), a cover plate is used to reduce the thermal deformation and processing area. Therefore, it is possible to fabricate holes at the level of several micrometers. In this study, it was confirmed that recast layers are hardly generated in c-LBM. Furthermore, square-shaped micropatterns were successfully fabricated using c-LBM.

• Journal of Korea Technology Innovation Society
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• v.20 no.1
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• pp.205-238
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• 2017

Display industry in Korea has been rapidly developing over 20 years, now taking the top-class leading position in the world. Nevertheless, many previous studies have mainly focused on major panel set makers. To overcome the drawbacks, this study focuses on supplier companies in the upstream of display industry such as materials, components, and equipments sectors. The research method used in this study is an industry value chain perspective combined with architectural innovation approach. Display panel is produced through fabrication process and modular process, each having a different characteristics of process architecture. This research figured out that there are quite a different development characteristics between materials and components suppliers and equipment suppliers. The number and revenue of materials and components suppliers were quite larger than equipments suppliers. However, the former has been growing mainly in the field of modular process, having a very weak position in the field of fabrication process. On the contrary, equipments suppliers have been showing a continuously growing pattern in the field of fabrication process. The R&D expenditures between these two kinds of suppliers showed a similar pattern. The fabrication process of display panel production is characterized as a highly integral architecture characteristics, so as to be a strong barriers to local suppliers, resulting less development of materials and components suppliers in Korea.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.42 no.1
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• pp.19-24
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• 2005

In this paper, the fabrication process of Si pressure sensors utilizing piezoresistive effect was optimized. The efficiency(yield) of the fabrication process for Si piezoresistive pressure sensors was improved by conducting Si anisotrophic etching process after processes of piezoresistors and AI circuit patterns. The position and process parameters for piezoresistors were determined by ANSYS and SUPREM simulators, respectively. The measured thickness of p-type Si piezoresistors from the boron depth-profile measurement was in good agreement with the simulated one from SUPREM simulation. The Si anisotrohic etching process for diaphragm was optimized by adding ammonium persulfate(AP) to tetramethyl ammonium hydroxide (TMAH) solution.

• Korean Journal of Computational Design and Engineering
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• v.11 no.3
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• pp.223-233
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• 2006

Layered manufacturing(LM) is emerging as a new technology that enables the fabrication of three dimensional heterogeneous objects such as Multi-materials and Functionally Gradient Materials (FGMs). Among various types of heterogeneous objects, more attention has recently paid on the fabrication of FGMs because of their potentials in engineering applications. The necessary steps for LM fabrication of FGMs include representation and process planning of material information inside an FGM. This paper introduces a new process planning algorithm that takes into account the processing of material information. The detailed tasks are discretization (i.e., decomposition-based approximation of volume fraction), orientation (build direction selection), and adaptive slicing of heterogeneous objects. In particular, this paper focuses on the discretization process that converts all of the material information inside an FGM into material features like geometric features. It is thus possible to choose an optimal build direction among various pre-selected ones by approximately estimating build time. This is because total build time depends on the complexity of features. This discretization process also allows adaptive slicing of heterogeneous objects to minimize surface finish and material composition error. In addition, tool path planning can be simplified into fill pattern generation. Specific examples are shown to illustrate the overall procedure.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2006.05a
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• pp.105-108
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• 2006

It has been issued to fabricate nano-scale patterns with large-scale in the field of digital display. Also, large-scale fabrication technology of nano pattern is very important not only for the field of digital display but also for the most of applications of the nano-scale patterns in the view of the productivity. Among the fabrication technologies, UV nano imprinting process is suitable for replicating polymeric nano-scale patterns. However, in case of conventional UV nano imprinting process using flat mold, it is not easy to replicate large areal nano patterns. Because there are several problems such as releasing, uniformity of the replica, mold fabrication and so on. In this study, to overcome the limitation of the conventional UV nano imprinting process, we proposed a continuous UV nano imprinting process using a pattern roll stamper. A pattern roll stamper that has nano-scale patterns was fabricated by attaching thin metal stamper to a roll base. A continuous UV nano imprinting system was designed and constructed. As practical examples of the process, various nano patterns with pattern size of 500, 150 and 50nm were fabricated. Finally, geometrical properties of imprinted nano patterns were measured and analyzed.