• Tribology and Lubricants
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• 제31권6호
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• pp.239-244
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• 2015

Chemical mechanical polishing (CMP) is one of the most important processes for enabling sub-14 nm semiconductor manufacturing. Moreover, post-CMP defect control is a key process parameter for the purpose of yield enhancement and device reliability. Due to the complexity of device with sub-14 nm node structure, CMP-induced defects need to be fixed in the CMP in-situ cleaning module instead of during post ex-situ wet cleaning. Therefore, post-CMP in-situ cleaning optimization and cleaning efficiency improvement play a pivotal role in post-CMP defect control. CMP in-situ cleaning module normally consists of megasonic and brush scrubber processes. And there has been an increasing effort for the optimization of cleaning chemistry and brush scrubber cleaning in the CMP cleaning module. Although there have been many studies conducted on improving particle removal efficiency by brush cleaning, these studies do not consider the effects of brush contamination. Depending on the process condition and brush condition, brush cross contamination effects significantly influence post-CMP cleaning defects. This study investigates brush cross contamination effects in the CMP in-situ cleaning module by conducting experiments using 300mm tetraethyl orthosilicate (TEOS) blanket wafers. This study also explores brush pre-treatment in the CMP tool and proposes recipe effects, and critical process parameters for optimized CMP in-situ cleaning process through experimental results.

• 새물리
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• 제68권11호
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• pp.1215-1224
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• 2018

Most solar photovoltaic (PV) modules frequently get shadowed, completely or partially, resulting in a reduction of PV generation. This paper presents and compares the results from simulations and experimental measurements of the power output from a single PV module under various shading conditions. The study was carried out with a 90 W PV module and a 250 W PV module. The shaded area was increased from 0 to 100% for both variable and constant irradiances to analyze the effect of fluctuations in the solar irradiance certain shading conditions. The effect of shading for irradiance levels from 100 to $900W/m^2$ was investigated. Results showed that for every $100W/m^2$ decrease in the solar irradiance level, the power output decreased by 9, 0.7 and 1.5 W at 0, 25 and 50% shading, respectively. For solar irradiance levels higher than $500W/m^2$, the temperature increased by 1.6, 2.7 and $1.1^{\circ}C$ at 0, 25 and 50% shading, respectively, for every $100W/m^2$ increase in the irradiance.

• 로봇학회논문지
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• 제16권4호
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• pp.291-298
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• 2021

In this study, we present a multi-sensor module for snake robot searching survivors in a narrow space. To this end, we integrated five sensor systems by considering the opinions of the first responders: a gas sensor to detect CO₂ gases from the exhalation of survivors, a CMOS camera to provide the image of survivors, an IR camera to see in the dark & smoky environment, two microphones to detect the voice of survivors, and an IMU to recognize the approximate location and direction of the robot and survivors. Furthermore, we integrated a speaker into the sensor module system to provide a communication channel between the first responders and survivors. To integrated all these mechatronics systems in a small, compact snake head, we optimized the positions of the sensors and designed a stacked structure for the whole system. We also developed a user-friendly GUI to show the information from the proposed sensor systems visually. Experimental results verified the searching function of the proposed sensor module system.

• 국제학술발표논문집
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• The 9th International Conference on Construction Engineering and Project Management
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• pp.1252-1252
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• 2022

Temporary work that utilizes temporary equipment (e.g., system scaffold and system pipe support) in construction work is one of the most vulnerable work from a safety perspective in South Korea. Typically, temporary equipment is reused at construction sites. The Korea Occupational Safety and Health Agency announced guidelines regarding the performance standards for reusable temporary equipment to prevent the accidental collapse of temporary facilities. Nevertheless, temporary facilities' collapse still occurs, which could be attributed to a degradation in the performance due to the reuse of temporary equipment. Therefore, this study investigated the performance of simple temporary structures assembled with new and reused equipment. To this end, an experimental module was designed based on previous research cases, and two experimental models were constructed, in which one was assembled using new equipment (Model A), and the other was built using reused equipment (Model B). To determine the performance of each model, a load test was conducted to measure the maximum load that each model could withstand. The experimental results revealed that the maximum load of Model B was 15% lower than that of Model A. This indicates that there is a meaningful performance difference between those two models. Based on this result, the authors decided to perform additional tests with more realistic models than previous ones. The new experimental module was designed to ensure compliance with the Korean design guidelines. In this presentation, the authors show details of the first tests and their results and plan for the additional test.

• 환경위생공학
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• 제11권1호
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• pp.71-76
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• 1996

Bio-film module system was applied to the treated leachate water that priorly had been treated with biological nitrification process. The experiments were performed in the laboratory and treated leachate water treatment facility. Experimental results obtained from laboratory conditions and nitrogen removal efficiencies were averaged 90% for 1 hr.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1993년도 한국자동제어학술회의논문집(국내학술편); Seoul National University, Seoul; 20-22 Oct. 1993
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• pp.718-723
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• 1993

In this paper, we propose a neural network with fuzzy preprocessor not only for improving the classification accuracy but also for being able to classify objects whose attribute values do not have clear boundaries. The fuzzy input signal representation scheme is included as a preprocessing module. It transforms imprecise input in linguistic form and precisely stated numerical input into multidimensional numerical values. The transformed input is processed in the postprocessing module. The experimental results indicate the superiority of the backpropagation network with fuzzy preprocessor in comparison to the conventional backpropagation network.

• 한국전산유체공학회지
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• 제15권2호
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• pp.71-78
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• 2010

As a step toward accurate prediction of droplet impingement and ice accretion on aircraft, an Eulerian-based droplet impingement and ice accretion code for air flows around an airfoil containing water droplets is developed. A CFD solver based on the finite volume method was also developed to solve the clean airflow. The finite-volume-based approach for simulating droplet impingement on an airfoil was employed owing to its compatibility with the CFD solver and robustness. For ice accretion module, a simple model based on the control volume is combined with the droplet impingement module that provides the collection efficiency. To validate the present code, it is compared with NASA Glenn IRT (Icing Research Tunnel) experimental data and other well-known icing codes such as LEWICE and FENSAP-ICE. It is shown that the collection efficiency and shape of ice accretion are in good agreement with previous experimental and simulation results.

• 대한산업공학회지
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• 제25권3호
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• pp.298-309
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• 1999

In this study, we attempt to solve the loading and scheduling problems of an FMS in an integrated manner. We propose an integrated approach and its solution methodologies which can fully exploit the flexibility of an FMS effectively and make decisions about tool allocation, machine selection, and job sequencing simultaneously. The proposed approach consists of two main modules : 'schedule generating module' which makes partial schedules and 'tool-allocation checking module' which investigates the feasibility of tool-allocation for unscheduled tasks. Utilizing two interacting modules, we can finally settle the loading and scheduling problems. Experimental results show that in most cases the proposed integrated approach outperforms existing hierarchical approaches in the scheduling performance and the computational time required. In addition to that, the difference between the two approaches tends to increase when the number of part types and the number of alternative machines increase and the tool constraints become tight. To conclude, the experimental results show that the proposed approach is a viable one for solving practical problems.

• 한국전기전자재료학회논문지
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• 제27권12호
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• pp.857-862
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• 2014

In this paper, we designed and fabricated electromagnetic induction based scaffold type energy harvester. For energy harvesting, mechanical energy of vertical motion is transferred to rotational energy using rack gear and multiplying gear was used to maximize energy transfer. To optimize design parameters, physical structure of energy harvester was modeled using finite element method. The effect of multiplying gear ratio and frequency levels of applied mechanical energy on energy generation efficiency are analyzed by computer simulation and experimental test. Experimental results showed that maximum 25.36 W of electric power can be achieved at the frequency of 2 Hz and 1:77 of gear ratio with only 5 mm of vertical changes on scaffold structure.

• 한국공간구조학회논문집
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• 제23권4호
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• pp.71-79
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• 2023

In this study, a prefabricated buckling brace (PF-BRB) was proposed, and a test specimen was manufactured based on the design formula for the initial shape and structural performance tests were performed. As a result of the experiment, all standard performance requirements presented by KDS 41 17 00 and MOE 2021 were satisfied before and after replacement of the reinforcement module, and no fracture of the joint module occurred. As a result of the incremental load test, the physical properties showed a significant difference in the stiffness ratio after yielding under the compressive load of the envelope according to the experimental results. It is judged necessary to further analyze the physical properties according to the experimental results through finite element analysis in the future.