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Fabrication of Hierarchical Nanostructures Using Vacuum Cluster System

  • Lee, Jun-Young;Yeo, Jong-Souk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.389-390
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    • 2012
  • In this study, we fabricate a superhydrophobic surface made of hierarchical nanostructures that combine wax crystalline structure with moth-eye structure using vacuum cluster system and measure their hydrophobicity and durability. Since the lotus effect was found, much work has been done on studying self-cleaning surface for decades. The surface of lotus leaf consists of multi-level layers of micro scale papillose epidermal cells and epicuticular wax crystalloids [1]. This hierarchical structure has superhydrophobic property because the sufficiently rough surface allows air pockets to form easily below the liquid, the so-called Cassie state, so that the relatively small area of water/solid interface makes the energetic cost associated with corresponding water/air interfaces smaller than the energy gained [2]. Various nanostructures have been reported for fabricating the self-cleaning surface but in general, they have the problem of low durability. More than two nanostructures on a surface can be integrated together to increase hydrophobicity and durability of the surface as in the lotus leaf [3,5]. As one of the bio-inspired nanostructures, we introduce a hierarchical nanostructure fabricated with a high vacuum cluster system. A hierarchical nanostructure is a combination of moth-eye structure with an average pitch of 300 nm and height of 700 nm, and the wax crystalline structure with an average width and height of 200 nm. The moth-eye structure is fabricated with deep reactive ion etching (DRIE) process. $SiO_2$ layer is initially deposited on a glass substrate using PECVD in the cluster system. Then, Au seed layer is deposited for a few second using DC sputtering process to provide stochastic mask for etching the underlying $SiO_2$ layer with ICP-RIE so that moth-eye structure can be fabricated. Additionally, n-hexatriacontane paraffin wax ($C_{36}H_{74}$) is deposited on the moth-eye structure in a thermal evaporator and self-recrystallized at $40^{\circ}C$ for 4h [4]. All of steps are conducted utilizing vacuum cluster system to minimize the contamination. The water contact angles are measured by tensiometer. The morphology of the surface is characterized using SEM and AFM and the reflectance is measured by spectrophotometer.

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A Study on ILD(Interlayer Dielectric) Planarization of Wafer by DHF (DHF를 적용한 웨이퍼의 층간 절연막 평탄화에 관한 연구)

  • Kim, Do-Youne;Kim, Hyoung-Jae;Jeong, Hae-Do;Lee, Eun-Sang
    • Journal of the Korean Society for Precision Engineering
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    • v.19 no.5
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    • pp.149-158
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    • 2002
  • Recently, the minimum line width shows a tendency to decrease and the multi-level increases in semiconductor. Therefore, a planarization technique is needed and chemical mechanical polishing(CMP) is considered as one of the most suitable process. CMP accomplishes a high polishing performance and a global planarization of high quality. However there are several defects in CMF, such as micro-scratches, abrasive contaminations and non-uniformity of polished wafer edges. Wet etching process including spin-etching can eliminate the defects of CMP. It uses abrasive-free chemical solution instead of slurry. On this study, ILD(Interlayer-Dielectric) was removed by CMP and wet etching process using DHF(Diluted HF) in order to investigate the possibility of planrization by wet etching mechanism. In the thin film wafer, the results were evaluated from the viewpoint of material removal rate(MRR) and within wafer non-uniformity(WIWNU). And the pattern step heights were also compared for the purpose of planarity characterization of the patterned wafer. Moreover, Chemical polishing process which is the wet etching process with mechanical energy was introduced and evaluated for examining the characteristics of planarization.

Spectroscopic Study of the X-ray Dip at Pre-eclipse Phase of Hercules X-1

  • Choi, C.S.;Nagase, F.;Makino, F.;Dotani, T.;Min, K.W.
    • Bulletin of the Korean Space Science Society
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    • 1992.10a
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    • pp.21-21
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    • 1992
  • The X-ray binary pulsar Her X-1 was observed with Ginga on 1988 August 28 during the orbital phase of 0.76 to 0.85 at the main-on phase of the 35 day cycle. During the observations the X-ray intensity varied by a factor of five or more on a time scale as short as 30 sec, due mostly to the soft X-ray absorption in the pre-eclipse phase. From the studies of pulse profiles and energy spectra, we revealed that there exists in the dipphase an unpulsed component which is "3% of the intensity at the non-absorbed high-level. We suggest that scattering of the source continuum by the optically thin hot corona is responsible for the unpoised component. In the spectral analysis, we find that the high-state non-absorbed spectra can be fitted by a power-law without absorption, and the spectra observed in the different abgorption states by two components of a power-law with the same photon index. An iron-K emission line is required in to the cases of fitting. The estimated equivalent width of the iron line varies from 0.18 to 0.51 key according to the change in the absorption column density along the line of sight. We suggest that the fluorescent iron line arises in a cool and relatively small region, like the Alfvensur face, and may be partially intercepted by the optically thick gas cloud passing across the line of sight.1 Korea Astronomy Observatorya The Institute of Space and Astronautical Science in Japan3 Korea Advanced Institute of Science and Technology

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Simulation Study on the Performance Evaluation of Light-shelf According to Geometric Shape of Ceiling (천장의 기하학적 형태에 따른 광선반 성능평가 시뮬레이션 연구)

  • Lee, Henagwoo;Kim, Yongseong;Seo, Janghoo;Kim, Duk-Su
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.26 no.4
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    • pp.181-192
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    • 2014
  • Light-shelf is one of the most efficient natural lighting systems due to the improved function of the inflow level of the outdoor natural light. However, the existing research on the light shelf limits to the rectangular parallelepiped space, so do not provide sufficient data for various shapes of spaces. Thus, this study aims at deriving proper plan and relationship of the light shelf through its performance assessment depending on the indoor space shapes and utilizing them as basic data of light shelf design. The conclusions are as follows : 1) for 6m space depth, standard intensity of illumination satisfaction depth has shown 8.3%~26.3% improvement through the adjustment of the angle and width when installing light shelf compared to no light shelf installation; 2) $-30^{\circ}$, $-20^{\circ}$ and $-10^{\circ}$ light shelves set by this study play only as a blind regardless of the shape of ceiling on the summer solstice, and it is unsuitable; and 3) this study has derived proper plan of light shelf upon space shapes based on energy reduction and indoor evenness. The study results provide expanded data of the performance assessment of the light shelves according to the different space shapes and light shelf factors, which serves as a basis of the light shelves designing.

Optical and Electrical Properties of InAs Sub-Monolayer Quantum Dot Solar Cell

  • Han, Im-Sik;Park, Dong-U;No, Sam-Gyu;Kim, Jong-Su;Kim, Jin-Su;Kim, Jun-O
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.196.2-196.2
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    • 2013
  • 본 연구에서는 분자선 에피택시 (MBE)법으로 성장된 InAs submonolayer quantum dot (SML-QD)을 태양전지에 응용하여 광학 및 전기적 특성을 평가하였다. 본 연구에서 사용된 양자점 태양전지(quantum dot solar cell, QDSC)의 구조는 n+-GaAs 기판 위에 n+-GaAs buffer와 n-GaAs base layer를 차례로 성장 한 후, 활성영역에 InAs/InGaAs SML-QD와 n-GaAs spacer layer를 8주기 형성하였다. 그 위에 p+-GaAs emitter, p+-AlGaAs window layer를 성장하고 ohmic contact을 위하여 p+-GaAs 를 성장하였다. SML-QD 구조의 두께는 0.3 ML 이며, 이때 SML-QD의 적층수를 4 stacks 으로 고정하였다. SML-QD 와의 비교를 위하여 2.0 ML크기의 InAs자발 형성 양자점 태양전지(SK-QDSC)과 GaAs 단일 접합 태양전지 (reference-SC)를 동일한 성장조건에서 제작하였다. PL 측정 결과, 300 K에서 SML-QD의 발광 피크는 SK-QD 보다 고에너지에서 나타나는데(1.349 eV), 이것은 SML-QD가 SK-QD보다 작은 크기를 가지기 때문으로 사료된다. SML-QD는 single peak를 보이는 반면, SK-QD는 dual peaks (1.112 / 1.056 eV)을 확인하였다. SML-QD의 반치폭(full width at half maximum, FWHM)이 SK-QD에 비하여 작은 것으로 보아 SML-QD가 SK-QD보다 양자점 크기 분포의 균일도가 높은 것으로 해석된다. Illumination I-V 측정 결과, SML-QDSC의 개방 전압(VOC) 과 단락전류밀도(JSC)는 SK-QDSC의 값과 비교해 보면, 각각 47 mV와 0.88 mA/cm2만큼 증가하였다. 이는 SK-QD보다 상대적으로 작은 크기를 가진 SML-QD로 인해 VOC가 증가되었으며, SML-QD가 SK-QD 보다 태양광을 흡수할 수 있는 영역이 비교적 적지만, QD내에 존재하는 energy level에서 탈출 할 수 있는 확률이 더 높음으로써 JSC가 증가한 것으로 분석 된다.

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An Experimental Study on the Application of End-Expanded Soil Nailing Method (선단확장식 소일네일링 공법의 적용성에 관한 실험적 연구)

  • Lee, Sang-Eun;Jang, Yun-Ho;Moon, Chang-Yeul;Jeong, Gyo-Cheol;Park, Young-Sun
    • The Journal of Engineering Geology
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    • v.17 no.4
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    • pp.525-534
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    • 2007
  • The peculiarity of end-expanded soil nailing method(EESNM) is in fixing the wedge-type steel body spreaded by collars and grouting its surroundings by cement milk within soils, after extending hole bottom over drilling hole diameter with top drill bit. The present study was done to establish the effect of this method. Laboratory model test were carried out to investigate the behavior characteristics with the performance of the pull-out test and failure experiment, after preparing soil test box having 1,300mm length, width 1,000mm, and height 1,100mm, and the same experimental condition was set up to compare with the general soil nailing method(GSNM). The pull-out force of about 23 percentage was increased, and the horizontal displacements 1.2 from 9.1 percentage in soil-nailed wall decreased in EESNM compare with GSNM. The axial force acting on nail increased considerably at load level over 7 ton in EESNM and 5 ton in GSNM. The predicted failure line from the maxima analyzed by axial tensile strain located at long distance from soil-nailed wall in EESNM. The EESNM demonstrated the superiority of reinforcement effect in comparison with GSNM from the results above mentioned.

Optical Properties of ZnO Thin Films deposited by Pulsed Laser Deposition (PLD 법을 이용해 제작한 ZnO 박막의 광학적 특성)

  • Kang, Seong-Jun;Joung, Yang-Hee;Yoon, Yung-Sup
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.44 no.5
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    • pp.15-20
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    • 2007
  • We fabricated ZnO thin films on quartz substrate using pulsed laser deposition method and investigated structural and optical properties of ZnO thin films with various substrate temperatures. Regardless of the substrate temperature variation, all ZnO thin films had grown to (002) and the thin film deposited at 400 $^{\circ}C$ exhibited an excellent crystallinity having 0.24$^{\circ}$ of Full-Width-Half-Maximum (FWHM). In the result of photoluminescence property, UV and deep-level emission peaks were observed in all ZnO films and the emission peaks were changed with various substrate temperatures. An highest UV emission was exhibited on the specimen deposited at 400 $^{\circ}C$ and the FWHM of UV peak was 14 nm. The optical transmittance was about 85 % in visible region regardless of the substrate temperature. The comparison result of the bandgap energies obtained from optical transmittance and UV emission centers, the two values were about the same. From these results, it is found that UV emission center has close relationship with near band edge emission of ZnO thin film.

The Evaluation of Image Correction Methods for SPECT/CT in Various Radioisotopes with Different Energy Levels (SPECT/CT에서 서로 다른 에너지의 방사성동위원소 사용시 영상보정기법의 유용성 평가)

  • Shin, Byung Ho;Kim, Seung Jeong;Yun, Seok Hwan;Kim, Tae Yeop;Lim, Jung Jin;Woo, Jae Ryong;Oh, So Won;Kim, Yu Kyeong
    • The Korean Journal of Nuclear Medicine Technology
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    • v.17 no.2
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    • pp.53-58
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    • 2013
  • Purpose: To optimize correction method for SPECT/CT, image quality consisting of resolution and contrast was evaluated using three radioisotopes ($^{99m}Tc$, $^{201}Tl$ and $^{131}I$) and three different correction methods; attenuation correction (AC), scatter correction (SC) and both attenuation and scatter correction (ACSC). Materials and Methods: Images were acquired with a SPECT/CT scanner and a conventional CT protocol with an OESM reconstruction algorithm (2 iterations and 10 subsets). For resolution measurement, fixed radioactivity (2.22 kBq) was infused into a spatial resolution phantom and full width at half maximum (FWHM) was measured using a vendor-provided software. For contrast evaluation, radioactive source with a ratio of 1:8 to background was filled in a Flanged Jaszczak phantom and percent contrast (%) were calculated. All the parameters for image quality were compared with non-correction (NC) method. Results: As compared with NC, image resolution of all three isotopes were significantly improved by AC and ACSC, not by SC. In particular, ACSC showed better resolution than AC alone for $^{99m}Tc$ and $^{201}Tl$. Image contrast of all three radioisotopes in a sphere with the largest diameter were enhanced by all correction methods. ACSC showed the highest contrast in all three radioisotopes, which was the most accurate in $^{99m}Tc$ (85.9%). Conclusion: Image quality of SPECT/CT was improved in all the radioisotopes by CT-based attenuation correction methods, except SC alone. SC failed to improve resolution in any radioisotopes, but it was effective in contrast enhancement. ACSC would be the best correction method as it improved resolution in radioisotopes with low energy levels and contrast in radioisotope with low energy levels. However, in radioisotope with high energy level, AC would be better than ACSC for resolution improvement.

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Effects of Feeding Purified Zearalenone Contaminated Diets with or without Clay Enterosorbent on Growth, Nutrient Availability, and Genital Organs in Post-weaning Female Pigs

  • Jiang, S.Z.;Yang, Z.B.;Yang, W.R.;Yao, B.Q.;Zhao, H.;Liu, F.X.;Chen, C.C.;Chi, F.
    • Asian-Australasian Journal of Animal Sciences
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    • v.23 no.1
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    • pp.74-81
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    • 2010
  • The effects of different levels of natural clay enterosorbent on the growth, nutrient availability, and genital organs of post-weaning female pigs fed with an addition of zearalenone (ZEA) were investigated in the study. A total of thirty-five post-weaning gilts ($L{\times}Y{\times}D$) with an average body weight of 12.36${\pm}$1.46 kg were used in the test. The gilts were raised individually in metabolism cages and fed a corn-soybean meal-whey basal diet with an addition of 0 or 1 mg/kg of ZEA for 24 d with four levels of natural clay enterosorbent added in the feed. The treatments were: i) control; ii) control+2.5 g/kg clay; iii) control+1 mg/kg ZEA; iv) control+1 mg/kg ZEA+1.25 g/kg clay; v) control+1 mg/kg ZEA+2.5 g/kg clay; vi) control+1 mg/kg ZEA+5.0 g/kg clay; vii) control+1 mg/kg ZEA +10 g/kg clay. Pigs fed diets contaminated with additional purified ZEA had significantly reduced apparent digestibility of crude protein (CP), gross energy (GE) and apparent metabolic rate of GE (ME/GE, p<0.05) without changes of net protein utilization (NPU, p>0.05). Final body weight, average daily gain (ADG), average daily feed intake (ADFI), vulva length, vulva width, vulva area, relative weights of genital organ and proliferative changes of the ovary tissues in gilts fed ZEA-contaminated diet were increased (p<0.05) compared to the gilts fed the control diet. Addition of natural clay enterosorbent in the ZEA-contaminated diet showed a positive protection effect on ZEA feeding, and the protection was increased linearly or quadratically as clay content increased. However, in pigs fed a diet with clay alone at 2.5 g/kg level there was no significant impact (p>0.05) on all the parameters as compared to the control. It is suggested that feeding ZEA at about 1.0 mg/kg for 24 days might result in a deleterious effect in pigs, and addition of 5 or 10 g clay enterosorbent per kg diet can effectively neutralize the detrimental effects of the ZEA feeding.

Effect of Seeds Treatment on Germinablity of Tetragonia Tetragonides Seeds (번행초의 대량번식을 위한 종자처리가 발아력에 미치는 영향)

  • Kang, Jum-Soon;Park, Eun-Ji;Kim, So-Hee;Heo, You;Park, Young-Hoon;Choi, Young-Whan;Son, Beung-Gu;Lim, Woo-Taik;Suh, Jeong-Min
    • Journal of Environmental Science International
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    • v.23 no.5
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    • pp.771-780
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    • 2014
  • Tetragonia tetragonides is a medicinal plant native to ocean sand soil of southern provinces and has significant effects on the prevention and curing of gastroenteric disorders. Despite of its popularity, supply of the plant has never met the level of demand because of the absence of an adequate culturing method. The present study, thereby, was conducted for classifying the plants with geographically different characteristics, studying growth habits, developing a new culturing method and establishing a large scale propagation system of selected superior individual plants. The study was also aimed for revealing optimum conditions for seed treatment, fertilization, and efficient culturing system and thereby, for utilizing the plant as a new income source for rural communities. The seed was elongated with size of 2.6 mm (width) ${\times}$ 1.8 mm (length). No difference in seed size was observed depending on different inhabitate. Each flower produced about 4.5~4.8 seeds. Germination rate was high for seeds matured for 40 days after fertilization, but deceased to 50% for seeds matured only for 20 or 30 days. Seed dormancy lasted 6 months and seed storage at humid $5^{\circ}C$ facilitated germination. Mechanical obstruct of seed germination was due to seed coat and removal of seed coat enhanced the germination rate. Optimum temp. for seed storage was $5^{\circ}C$, and high germination rate was maintained for 350 days. However, for stratification condition or at room temperature, germination was significantly reduced as storage time increased Optimum treatment of plant growth regulators was soaking in $GA_3$ 250 mg/L for 1 hr. The priming treatment with 50 mM $Ca(NO_3)_2$ at $20^{\circ}C$ for two days improved the seed germination with 10% compared to non-treated control. The treatment of 20% NaOCl for 3 hr. improved the seed germination rate up to 10% and 1 day ahead.