Design and Fabrication of Scratch Drive Actuator for Optical Application using MEMS( Micro-electro-mechanical System) Technology (광학응용을 위한 초소형 SDA(Scratch Drive Actuator) 액튜에이터의 설계 및 제작)
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- Proceedings of the IEEK Conference
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- 1999.11a
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- pp.905-908
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- 1999