Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)

The Institute of Electronics and Information Engineers (대한전자공학회)
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Design and Fabrication of Scratch Drive Actuator for Optical Application using MEMS( Micro-electro-mechanical System) Technology

광학응용을 위한 초소형 SDA(Scratch Drive Actuator) 액튜에이터의 설계 및 제작

  • 김지우 (포항공과대학교 전자전기공학과) ;
  • 이승섭 (포항공과대학교 기계공학과) ;
  • 권오대 (포항공과대학교 전자전기공학과)
  • Published : 1999.11.01
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Abstract

In this paper, we present a polysilicon actuator on silicon wafer using surface micromachining technology which employs an electrostatic stepwise driven Scratch Drive Actuator to generate a force that can move an external object. For optical applications, we propose wavelength selector using distributed feedback structures and this micro actuator.

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