• Title/Summary/Keyword: electron gun

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Deposition of YBCO Films on Moving Substrate by a Spray Pyrolysis method (분무 열분해 CVD법으로 이동 중인 LaAlO_3(100) 단결정 위에 증착시킨 YBCO 박막의 특성)

  • Kim, Jae-Gun;Hong, Suk-Kwan;Kim, Ho-Jin;Yu, Seok-Koo;Cho, Han-Woo;Ahn, Jin-Hyun;Joo, Jin-Hoo;Lee, Hee-Gyoun;Hong, Gye-Won
    • Progress in Superconductivity
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    • v.8 no.1
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    • pp.93-97
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    • 2006
  • YBCO films were deposited on a moving substrate by a spray pyrolysis method using nitrate aqueous solution as precursors. Deposition was made on $LaAlO_3$(100) single crystal substrate by spraying precursor droplets generated by a concentric nozzle. The cation ratio of precursor solution was Y:Ba:Cu=1:2.65:4.5. The distance between nozzle and substrate was 15 cm. Substrate was transported with a speed ranging from 0.23 cm/min to 0.5 cm/min. Films were deposited at the pressure ranging from 10 Torr to 20 Torr and the deposition temperature was ranged from $740^{\circ}C\;to\;790^{\circ}C$. Oxygen partial pressure was controlled between 1 Tow and S Torr. Superconducting YBCO films were obtained from $740^{\circ}C\;to\;790^{\circ}C$ with an oxygen partial pressure of 3 Torr. Scanning electron microscope(SEM) and X-ray diffraction(XRD) observation revealed that films are smooth and highly texture with(001) plans parallel to substrate plane. Highest Jc was 0.72 $MA/cm^2$ at 77K and self-field for the film with a thickness of 0.15 m prepared at a substrate temperature of $740^{\circ}C$ and $PO_2$=3 Torr.

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Reliability assessment of RPCB and FPCB Joints bonded using Thermo-compression (열 압착으로 접합된 RPCB와 FPCB 접합부의 신뢰성 평가)

  • Jang, Jin-Kyu;Lee, Jong-Gun;Lee, Jong-Bum;Ha, Sang-Su;Jung, Seung-Boo
    • Proceedings of the KWS Conference
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    • 2009.11a
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    • pp.81-81
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    • 2009
  • 최근 휴대폰, 노트북 등과 같은 소형 멀티미디어 기기의 사용이 증가함에 따라 전자 패키징 산업은 경박단소화를 요구하고 있습니다. 더불어 전기적 신호의 손실을 줄이기 위해 전기, 전자산업체에서는 가볍고 굴곡성이 우수한 연성인쇄회로기판(Flexible Printed Circuit Board, FPCB)과 가격이 싸고 신뢰성이 입증된 경성인쇄회로기판(Rigid Printed Circuit Board, RPCB)의 전극간 접합에 많은 관심을 보이고 있습니다. 기존에 연성인쇄회로기판과 경성인쇄회로기판을 접합하는 방식으로는 connector를 이용한 체결법이 사용되고 있지만 완성품의 부피가 커지고 자동화 공정이 힘들며 I/O 개수가 제한적이어서 신호전달에 취약한 단점이 있습니다. 또한, 최근 FPCB를 RPCB에 접합하는데 interconnection으로 이방성 도전 필름(Anisotropic conductive film, ACF) 또는 비전도성 필름(Non-conductive film)이 널리 사용되고 있습니다. 하지만 필름의 가격이 비싸고, 낮은 전기 전도도를 보이며, 신뢰성 특성이 낮다는 단점을 가지고 있습니다. 본 실험에서는 기존의 connector 방식과 접착 필름을 이용한 방식을 대체하기 위하여 솔더를 interlayer로 이용하여 열과 압력으로 접합하는 방법에 대하여 연구하였습니다. 실험에 사용된 솔더의 조성은 Sn-3.0Ag-0.5Cu (in wt%)이고, RPCB와 FPCB의 표면처리는 ENIG로 하였습니다. 접합 온도와 접합 시간에 따라 최적의 접합 조건을 도출하고자 하였고, 접합된 시편을 가지고 신뢰성 테스트를 진행하였습니다. $85^{\circ}C$/85% 고온고습 시험과 고온 방치 시험을 통하여 접합부의 신뢰성을 테스트 하였고, 90도 Peel test로 기계적 접합 강도를 측정하였고, 파괴 단면을 Scanning Electron Microscopy (SEM), Energy-dispersive spectroscopy (EDS), X-ray photoelectron spectroscopy (XPS)로 분석하였습니다.

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Preparation of Submicron Nickel Powders with Non-aqueous Solvent In Microwave-Assisted Reduction Method (비수계 용매를 사용하는 마이크로파 환원법에 의한 서브마이크론 니켈 분말의 합성)

  • Jeon, Seung Yup;Kim, Jae-Hwan;Park, Na Yi;Park, Hoy Yul;Lee, Gun-Dae;Hong, Seong-Soo;Park, Seong Soo
    • Applied Chemistry for Engineering
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    • v.18 no.4
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    • pp.320-325
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    • 2007
  • Nickel powders were prepared from an aqueous nickel acetate solution and hydrazine hydrate using diethanolamine as the nonaqueous organic solvent in the conventional and microwave synthetic method. It was investigated that microwave non-thermal effect and synthetic condition affect the preparation of nickel powders by means of X-ray diffractometry, scanning electron microscopy, thermal gravymetry analysis, and X-ray photoelectron spectroscopy analysis. Compared with the conventional synthetic method, less of aggregation, smaller particle size, and more uniform distribution of particle size were obtained in the microwave synthetic method due to the non-thermal effect of microwaves.

Optical and mechnical properties of ${Ta_2}{O_5}$ optical thin films by ion assisted deposition (이온 보조 증착한 ${Ta_2}{O_5}$ 광학 박막의 광학적 및 기계적 특성 분석)

  • 류태욱;김동진
    • Korean Journal of Optics and Photonics
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    • v.11 no.3
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    • pp.147-151
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    • 2000
  • We deposited the ion assisted ${Ta_2}{O_5}$ films and conventional thermal evaporated ${Ta_2}{O_5}$ films by using electron beam gun, and measured the optical properties and mechanical properties of the fabricated films according to the evaporation conditions. In the case of the TazOs films by oxygen ion assisted deposition with the anode voltage of 120 V, and current density of $50~500\muA/cm^2$, the refractive index exhibited 2.15 which was higher than the conventionally deposited film index 1.94 and the tensile stress exhibited $5.0\times10^8 dyne/cm^2$ which was lower than $7.0\times10^8 dyne/cm^2$. This properties coincided with the optical and mechanical properties of the films deposited at the elevated substrate temperature of $230^{\circ}C$. In the case of the argon ion assisted films the tensile stress was decreased but the absorption existed at the short wavelength in the visible spectral region. And all the fabricated films were found to be amorphous by the X-ray diffraction analysis. lysis.

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Scattering Measurement of Syringe Shield Used in PET/CT (PET/CT실에서 사용되는 주사기 차폐체의 산란선 측정)

  • Jang, Dong-Gun;Park, Cheol-Woo;Park, Eun-Tae
    • Journal of radiological science and technology
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    • v.43 no.5
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    • pp.375-382
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    • 2020
  • PET/CT is a medical equipment that detects 0.511 MeV of gamma rays. The radiation workers are inevitably exposed to ionizing radiation in the process of handling the isotope. Accordingly, PET/CT workers use syringe shields made of lead and tungsten to protect their hands. However, lead and tungsten are known to generate very high scattering particles by interacting with gamma rays. Therefore, in this study, we tried to find out the effect on the scattering particles emitted from the syringe shield. In the experiment, first, the exposure dose to the hand (Rod phantom) was evaluated according to the metal material (lead, tungsten, iron, stainless steel) using Monte Carlo simulation. The exposure dose was compared according to whether or not plastic is attached. Second, the exposure dose of scattering particles was measured using a dosimeter and lead. As a result of the experiment, the shielding rate of plastics using the Monte Carlo simulation showed the largest difference in dose of about 40 % in lead, and the lowest in iron, about 15 %. As a result of the dosimeter test, when the plastic tape was wound on lead, it was found that the reduction rate was about 15 %, 28 %, and 39 % depending on the thickness. Based on the above results, it was found that 0.511 MeV of gamma ray interacts with the shielding tool to emit scattered rays and has a very large effect on radiation exposure. However, it was considered that the scattering particles could be sufficiently removed with plastics with a low atomic number. From now on, when using high-energy radiation, the shielding tool and the skin should not be in direct contact, and should be covered with a material with a low atomic number.

PBMS (Particle Beam Mass Spectrometer)를 이용한 크기 분류시 발생하는 입자 확산현상 분석에 관한 연구

  • Mun, Ji-Hun;Sin, Yong-Hyeon;Gang, Sang-U;Kim, Tae-Seong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.232-232
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    • 2012
  • 반도체 공정에서 일반적으로 오염입자를 측정하는 방법은 테스트 웨이퍼를 ex-situ 방식인 surface scanner를 이용하여 분석하는 particle per wafer pass (PWP) 방식이 주를 이루고 있다. 이러한 오염입자는 반도체 수율에 결정적인 역할을 하는 것으로 알려져 있으며 반도체 선폭이 작아지면서 제어해야하는 오염입자의 크기도 작아지고 있다. 하지만, 현재 사용하는 PWP 방식은 실시간 분석이 불가능하기 때문에 즉각적인 대처가 불가능 하고 이는 수율향상에 도움이 되지 못하는 후처리 방식이다. 따라서 저압에서 오염입자를 실시간으로 측정할 수 있는 장비에 대한 요구가 늘어나고 있는 실정이다. 저압에서 나노입자를 측정할 수 있는 장비로 PBMS가 있다. PBMS는 electron gun을 이용하여 입자를 하전시킨 후 편향판을 이용하여 크기를 분류하고 Faraday cup으로 측정된 전류를 환산하여 입자의 농도를 측정하는 장비이다. 편향판에 의하여 Faraday cup으로 이동되는 입자들은 농도 차에 의한 확산현상이 발생한다. 본 연구에서는 Faraday cup 이동 시 발생하는 확산현상을 여러 크기의 Faraday cup과 polystyrene latex (PSL) 표준입자를 이용하여 분석하였다. Faraday cup을 고정 식이 아닌 이동 식으로 설계를 하여 축의 원점을 기준으로 이동시켜 가면서 입자 전류량을 측정하였으며, 이를 기준 (reference) Faraday cup의 측정량과 비교하여 효율을 계산하였다. PSL 표준 입자 100, 200 nm 크기에 대하여 cup의 크기를 바꿔 가면서 각각 평가 하였다. 그 결과 입자의 크기가 작을 수록 더 넓은 구간으로 확산되었고 크기가 작은 Faraday cup의 경우에 정밀한 결과를 얻을 수 있었다. 본 연구를 통하여 편향판을 지나면서 발생하는 입자의 확산현상에 대한 정량적 평가를 수행할 수 있었으며, 추후 PBMS 설계 시 Faraday cup 크기를 결정하고 Faraday cup array 기술을 적용하는데 유용하게 활용 될 수 있을 것으로 기대 된다.

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Synthesis and Photovoltaic Properties of Copolymers with Fluorinated Quinoxaline and Fluorene Moiety (Fluorine이 도입된 Quinoxaline과 Fluorene 골격을 가진 고분자의 합성 및 특성분석)

  • Song, Suhee;Choi, Hyo Il;Shin, In Soo;Park, Seong Soo;Lee, Gun Dae;Park, Sung Heum;Jin, Youngeup
    • Applied Chemistry for Engineering
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    • v.27 no.5
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    • pp.467-471
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    • 2016
  • New electron deficient moiety, 6,7-difluoro-2,3-dihexylquinoxaline, was developed for the push-pull type copolymer for organic photovoltaics (OPVs). The PFDTQxF with lower HOMO energy level was synthesized using fluorene and 6,7-difluoro- 2,3-dihexylquinoxaline by Suzuki polymerization. The PFDTQxF thin film shows two absorption peaks at 368 and 493 nm. The HOMO and LUMO energy levels of PFDTQxF are calculated -5.55 and -3.91 eV, respectively. The device comprising PFDTQxF showed a $V_{OC}$ value of 0.47 V, a $J_{SC}$ value of $4.48mA/cm^2$, and a FF of 0.32, which yielded PCE of 0.78%, under the illumination of AM 1.5.

The Effect of $C_2Cl_6$ Addition on Surface Ignition and Oxidation of Molten AM100A Mg alloy (마그네슘 합금 용탕 표면 산화 및 발화에 대한 $C_2Cl_6$의 영향)

  • Choi, Seung-Hwa;Kim, Dae-Hwan;Kim, Hee-Kyung;Shim, Sung-Young;Lim, Su-Gun
    • Journal of Korea Foundry Society
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    • v.30 no.6
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    • pp.231-234
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    • 2010
  • The effect of $C_2Cl_6$ for preventing to the surface oxidation and ignition of molten Mg alloy was studied with metallographic analysis, X-ray diffraction, scanning electron microscopy and energy dispersive spectroscopy. The alloy used for this study was AM100A Mg casting alloy with high strength. In order to investigate the surface protective characteristic of this molten alloy by $C_2Cl_6$ addition, we added them into molten AM100A alloy at $700^{\circ}C$ and then the melts were slowly cooled under a protective atmosphere of air containing Ar gas and $C_2Cl_6$ flux addition. The result found that the surface oxidation and ignition reaction of molten AM100A Mg alloy by adding $C_2Cl_6$ flux was more slowly occurred than that of the only a protective atmosphere of containing Ar gas with increasing time. This result was due to a dense protective film formed containing $MgCl_2$ on surface of molten Mg alloy during casting and solidification. The $MgCl_2$ was formed by a reaction of $C_2Cl_6$ with molten Mg.

Microstructures and Electrical Properties of Thick PZT Films with Thickness Variation Fabricated by Multi-coating Method (Multi-coating법으로 제조된 두꺼운 PZT막의 두께 변화에 따른 미세구조 및 전기적 특성)

  • Park, Jun-Sik;Jang, Yeon-Tae;Park, Hyo-Deok;Choe, Seung-Cheol;Gang, Seong-Gun
    • Korean Journal of Materials Research
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    • v.12 no.3
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    • pp.211-214
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    • 2002
  • Properties of 52/48 PZT films with various thicknesses for piezoelectric micro-electro mechanical systems (MEMS) devices fabricated by multi-coating method on $Pt(3500{\AA})/Ti(400{\AA})/SiO_2(3000{\AA})/Si$(525$\mu\textrm{m}$) substrates were investigated. PZT films were deposited by spin-coating process at 3500 rpm for 30 sec, followed by pyrolysis at 45$0^{\circ}C$ for 10 min producing the thickness of about 120nm. These processes were repeated 4, 8, 12, 16 and 20 times in order to have various thicknesses, respectively. Finally, they were crystallized at $650^{\circ}C$ for 30 min. All thick PZT films showed dense and homogeneous surface microstructures. Thick PZT films showed crystalline structures of random orientations with increasing thickness. Dielectric constants of thick PZT films were increased with increasing film thickness and reached 800 at 100kHz for 2.3$\mu\textrm{m}$ thick PZT film. $P_r\; and\; E_c$ of 2.3$\mu\textrm{m}$ thick PZT films were about 20$\mu$C/$\textrm{cm}^2$ and 63kV/cm. Depth profile analysis by Auger Electron Spectroscopy (AES) of 4800 $\AA$ thick PZT film showed the formation of the perovskite phase on Pt layer by Pb diffusion behavior. It was considered that Pb-Pt intermediate layer promoted PZT (111) columnar structures.

Effect of Milling Time on Pore Size and Distribution of Ti-Nb-Zr Biomaterials with Space Holder Consolidated by Spark Plasma Sintering

  • Kim, Dong-Gun;Woo, Kee-Do;Kang, Dong-Soo;Lee, Tack
    • Korean Journal of Materials Research
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    • v.24 no.2
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    • pp.111-115
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    • 2014
  • Titanium and its alloys are useful for implant materials. In this study, porous Ti-Nb-Zr biomaterials were successfully synthesized by powder metallurgy using a $NH_4HCO_3$ as space holder and $TiH_2$ as foaming agent. Consolidation of powder was accomplished by spark plasma sintering process(SPS) at $850^{\circ}C$ under 30 MPa condition. The effect of high energy milling time on pore size and distribution in Ti-Nb-Zr alloys with space holder($NH_4HCO_3$) was investigated by optical microscope(OM), scanning electron microscope(SEM) & energy dispersive spectroscopy(EDS) and X-ray diffraction(XRD). Microstructure observation revealed that, a lot of pores were uniformly distributed in the Ti-Nb-Zr alloys as size of about $30-100{\mu}m$ using mixed powder and milled powders. In addition, the pore ratio was found to be about 5-20% by image analysis, using an image analyzer(Image Pro Plus). Furthermore, the physical properties of specimens were improved with increasing milling time as results of hardness, relative density, compressive strength and Young's modulus. Particularly Young's modulus of the sintered alloy using 4h milled powder reached 52 GPa which is similar to bone elastic modulus.