• 제목/요약/키워드: electrode thickness

검색결과 847건 처리시간 0.027초

ZnO 압전박막을 이용한 FBAR의 주파수 응답특성 (Frequency Characteristics of a FBAR using ZnO Thin Film)

  • 도승우;장철영;최현철;이용현
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 제5회 영호남 학술대회 논문집
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    • pp.94-97
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    • 2003
  • This study uses ZnO thin film as a piezoelectric material and Pt as bottom electrode for FBAR (film bulk acoustic resonator) device. ZnO thin film and Pt were deposited by RF-magnetron sputtering method. ZnO thin film and Pt were oriented to c-axis. Top electrode Al was deposited by thermal evaporation. The membrane was formed of bulk micromachining. The FBAR was evaluated by XRD, SEM and electrical characterization. The resonant frequency was measured by HP 8753C Network Analyzer. A fabricated FBAR device exhibited a resonant frequency of 700 MHz ~ 1.5 GHz. When bottom electrode and top electrode thickness were fixed, the resonant frequency was increased as decreasing ZnO thin film thickness.

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물분해로부터 수소 제조를 위한 광촉매용 텅스텐 산화물 박막 제조 (Preparation of WO3 by using sol-gel method for photoelectrode and its application for PEC cell)

  • 홍은미;임동찬
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2015년도 춘계학술대회 논문집
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    • pp.101-101
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    • 2015
  • Photoelectrochemical water splitting is considered as a promising method of transforming solar energy into chemical energy stored in the type of hydrogen. An n-type $WO_3$ semiconductor is one of the most promising photoanodes for hydrogen production from water splitting. Films annealed at lower temperatures consisted of amorphous, whereas films annealed above $500^{\circ}C$ comprised solely of monoclinic $WO_3$. In this study, we observed photoactivity of $WO_3$ as increasing thickness of $WO_3$. And it shows good photoacivity as thickness increases. Also we tried to improve photoactivity through surface modification and bulk modification by using hydrogen treatment and conducting polymer. The photocurrent was measured in potentiostatic method with the three electrode system. A Pt wire and Ag / AgCl electrode were used as the counter electrode and the reference electrode, respectively. photocurrent-time (I-T) curve was measured at a bias potential of 0.79 V.

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PERFORMANCE OF MULTILAYER CERAMIC ACTUATOR BY CONSIDERING THE SHAPE EFFECT

  • 위상봉
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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    • pp.594-597
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    • 2003
  • In the present study, the piezoelectricity and polarization of multilayer ceramic actuator, being designed to stack PMN-PZ-PT ceramic layers and Ag-Pd electrode layers alternatively, were investigated under a consideration of geometric factor, the volume ratio of the ceramic to the electrode layers. The actuators were fabricated by tape casting of 0.2Pb(Mg1/3Nb2/3)O3-0.38PbZrO3-0.42PbTiO3 followed by lamination and burnout & co-firing processes. The actuators of 10 10 0.62 nm3 in size were formed in a way that 60 200 m thick ceramics were stacked alternatively with 5 m thick electrode layer. Increases in polarization and electric field-induced displacement with thickness of the ceramic layer were attributed to change of 90o/180o domain ratio, which was affected by interlayer internal stress. The piezoelectricity and actuation behaviors were found to depend upon the volume ratio (or thickness ratio) of ceramic to electrode layers.

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Fatigue Characteristics of PZT Thin Films Deposited by ECR-PECVD

  • Chung, Su-Ock;Lee, Won-Jong
    • Transactions on Electrical and Electronic Materials
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    • 제6권4호
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    • pp.177-185
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    • 2005
  • Fatigue characteristics of lead zirconate titanate (PZT) films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition (ECR-PECVD) were investigated. The fatigue characteristics were investigated with respect to PZT film thickness, domain structure, fatigue pulse height, temperature, electrode materials and electrode configurations. The used top and bottom electrode materials were Pt and $RuO_2$. In the fatigue characteristics with fatigue pulse height and PZT film thickness, the fatigue rates are independent of the applied fatigue pulse height at the electric field regions to saturate the P-E hysteresis and polarization $(P^*,\;P^A)$ characteristics. The unipolar and bipolar fatigue characteristics of PZT capacitors with four different electrode configurations $(Pt//Pt,\;Pt//RuO_2,\;RuO_2//Pt,\;and\;RuO_2//RuO_2)$ were also investigated. The polarization-shifts during the unipolar fatigue and the temperature dependence of fatigue rate suggest that the migration of charged defects should not be expected in our CVD-PZT films. It seems that the polarization degradations are attributed to the formation of charged defects only at the Pt/PZT interface during the domain switching. The charged defects pin the domain wall at the vicinity of Pt/PZT interface. When the top and bottom electrode configurations are of asymmetric $(Pt//RuO_2,\;RuO_2//Pt)$, the internal fields can be generated by the difference of charged defect densities between top and bottom interfaces.

방전드릴의 방전갭과 표면특성에 관한 연구 (A Study on the Relation Between Expansion and the Characteristics of Surface in the ED-Drilling)

  • 최종연;김경환
    • 한국기계가공학회지
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    • 제11권3호
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    • pp.73-79
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    • 2012
  • This paper describes the machining characteristics of the sintered carbide and die steel(STD-11) by electric discharge drilling with various tubular electrodes. Electrical discharge machining(EDM) removes material from the workpiece by a series of electrical sparks that cause localized temperatures high enough to melt or vapourize the vicinity of the charge. In the experiment. four types of electrode which have different diameter are used with the application of continuous direct current and axial electrode feed. The controlled factors include the dimension of the electrode. In drilling by EDM, the dielectric flushed down the interior of the rotating tube electrode, in order to order to facilitate the removal of machining debris the hole. The expansion increase with increasing the thickness of material and the diameter of electrode and the expansion of sintered carbide is 1.75 times large then that of die steel. The taper of machined hole decrease with increasing the thickness of material. The crater sixe of die steel is larger then thet of sintered carbide and the surface roughness of sintered carbide is 1.58 tims larger then that of die steel.

폐수중 티오시안산이온을 측정하기 위한 계면활성제를 이용한 고분자 막전극 (The Polymer Membrane Electrode by Surfactants for Measuring Continuously Thiocyanate Ion in Wastewater)

  • 최종석;안형환;강안수;우인성;황명환
    • 한국안전학회지
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    • 제6권4호
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    • pp.13-20
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    • 1991
  • Ion-selective electrode responsive to the thiocynate ion prepared by using the quaternary ammonium salts as a active material and PVC as a membrane matrix. The effect of chemical structure and composition of active material, and the membrane thickness on the linear response. the detection limit, and Nernstian slope of the electrode studied. Under the above optimum conditions of membrane, the effect of pH and the selectivity coefficients to various interfering anions were compared and investigated. It was concluded that the functions of thiocynate ion-selective electrode(ISE) were closely related to the chemical structure of the quaternary ammonium salts. The linear response, and the detection limit of the electrode potential increased with the increase of the carbon chain length of the alkyl group in the quaternary ammonium salts in the ascending order of Aliquat 336T, TOAT, TDAT, and TDDAT. The optimum membrane thickness was 0.3mm. The electrode characteristics was better with the decrease of the concentration of active material, and the best concentration was 3 weight percent. The membrane potential was independent of the pH variation in the region from pH 2 to 12. The order of the selectivity coefficients is as follows:Cl $O_4$$^{[-10]}$$I^{[-10]}$ >N $O_3$$^{[-10]}$ >B $r^{[-10]}$$F^{[-10]}$ >C $l^{[-10]}$ >O $A_{c}$ $^{[-10]}$ 〓S $O_4$$^{2-}$.

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유연 기판 기반 전기화학 센서 응용을 위한 레이저 유도 그래핀 전극 제작 및 전사 연구 (Fabrication and Transfer of Laser Induced Graphene (LIG) Electrode for Flexible Substrate-based Electrochemical Sensor Applicatins)

  • 김정대;김태헌;박정호
    • 전기학회논문지
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    • 제67권3호
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    • pp.406-412
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    • 2018
  • This paper describes the fabrication process of laser induced graphene (LIG) and its transfer method on to a flexible and stretchable PDMS substrate. By irradiating CO2 laser on a polyimide(PI) film surface, a localized high temperature is created, resulting in a three-dimensional porous graphene network structure with good conductivity. This LIG electrode is relatively easy to fabricate and since it is very weak the LIG electrode was transferred to a flexible PDMS substrate to increase the sturdiness as well as possible use in flexible applications. Sheet resistance, thickness, and electrochemical activity of the fabricated in-situ LIG electrodes have been examined and compared with the LIG electrodes after transferring to PDMS elastomer. The properties of the LIG electrodes were also examined depending on the $CO_2$ laser power. As the irradiated laser power increased, the LIG electrode resistance decreases and the LIG electrode thickness increased. At 4.8 W of laser power, the average sheet resistance and thickness of the fabricated LIG electrodes were approximately $31.7{\Omega}/{\Box}$ and $62.67{\mu}m$, respectively. Moreover, the electrochemical activity of the fabricated LIG electrode at 4.8 W of laser power showed a high oxidation current of $28.2{\mu}A$ after transferring to PDMS.

하이브리드 슈퍼커패시터의 음극 및 양극 설계에 따른 전기화학적 거동 (Electrochemical Behavior Depending on Designed-Anode and Cathodes of Hybrid Supercapacitors)

  • 신승일;이병관;하민우;안건형
    • 한국재료학회지
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    • 제29권12호
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    • pp.774-780
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    • 2019
  • The performance of Li-ion hybrid supercapacitors (asymmetric-type) depends on many factors such as the capacity ratio, material properties, cell designs and operating conditions. Among these, in consideration of balanced electrochemical reactions, the capacity ratio of the negative (anode) to positive (cathode) electrode is one of the most important factors to design the Li-ion hybrid supercapacitors for high energy storing performance. We assemble Li-ion hybrid supercapacitors using activated carbon (AC) as anode material, lithium manganese oxide as cathode material, and organic electrolyte (1 mol L-1 LiPF6 in acetonitrile). At this point, the thickness of the anode electrode is controlled at 160, 200, and 240 ㎛. Also, thickness of cathode electrode is fixed at 60 ㎛. Then, the effect of negative and positive electrode ratio on the electrochemical performance of AC/LiMn2O4 Li-ion hybrid supercapacitors is investigated, especially in the terms of capacity and cyclability at high current density. In this study, we demonstrate the relationship of capacity ratio between anode and cathode electrode, and the excellent electrochemical performance of AC/LiMn2O4 Li-ion hybrid supercapacitors. The remarkable capability of these materials proves that manipulation of the capacity ratio is a promising technology for high-performance Li-ion hybrid supercapacitors.

TiO2 Paste에 PEG 첨가에 따른 DSSC의 효율 특성 (DSSCs Efficiencies of PEG Additive In TiO2 Paste)

  • 권성열;양욱;장자항
    • 한국전기전자재료학회논문지
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    • 제27권11호
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    • pp.746-752
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    • 2014
  • Photo electrode is an important component of DSSC, so this paper did some research on it. Through the method of adding PEG additive into $TiO_2$ paste, the electrical characteristics and efficiencies of DSSCs with photo electrode surface area were studied. In the case of not adding PEG in $TiO_2$ paste, $26{\mu}m$ thickness $TiO_2$ photo electrode shows 5.081% efficiency. The highest short circuit current density was $10.476mA/cm2^$. The structure of porous $TiO_2$ film can be controlled through changing the PEG additive amount in $TiO_2$ paste and the molecular weight of PEG. When the additive amount of PEG 20,000 in $TiO_2$ paste reaches 5%, the peak efficiency with $26{\mu}m$ thickness $TiO_2$ photo electrode was 5.387% and its highest current density were $11.084mA/cm^2$.

디스크형 압전변압기의 전극 면적비에 따른 구동 메카니즘에 관한 연구 (A Study on the Mechanism with the Electrode Ratio of Driving and Generation Part of a Disk-Type Piezoelectric Transformer)

  • 이종필;채홍인;홍진웅
    • 조명전기설비학회논문지
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    • 제19권5호
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    • pp.17-22
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    • 2005
  • 본 연구에서는 직경이 50[mm], 두께가 4.5[mm]인 디스크형 압전 변압기의 구동부와 발전부의 전극 면적비를 각각 1.4:1, 2:1 및 3:1로 분할하여, 부하 저항을 변화(100${[\Omega]}\~70{[k\Omega]}$)시키면서 전기적 특성을 측정하고, 이를 토대로 한 압전변압기의 승압비에 관한 메카니즘을 정량적 및 정성적으로 해석하였다.