• Tribology and Lubricants
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• v.33 no.6
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• pp.282-287
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• 2017

SU-8 is an epoxy-type photoresist widely used for the fabrication of high-aspect-ratio (HAR) micro-structures in micro-electro-mechanical systems (MEMS). To fabricate highly integrated structures, chemical mechanical polishing (CMP) has emerged as the preferred manufacturing process for planarizing the MEMS structure. In SU-8 CMP, an oxidizer decomposes organic impurities and particles in the CMP slurry remove the chemically reacted surface of SU-8. To fabricate HAR microstructures using the CMP process, the adhesion between SU-8 and substrate material is important to avoid the delamination of the SU-8 film caused by the mechanical-dominant material removal characteristic. In this study, the friction force during the CMP process is measured with a CMP monitoring system to detect the delamination phenomenon and investigate the delamination of the SU-8 film from the silicon substrate under various pressure conditions. The increase in applied pressure causes an increase in the frictional force and wafer-edge stress concentration. The frictional force measurement shows that the friction force changes according to the delamination phenomenon of the SU-8 film, and that it is possible to monitor the delamination phenomenon during the SU-8 CMP process. The delamination at a high applied pressure is explained by the effect of stress distribution and pad deformation. Consequently, it is necessary to control the pressure of polishing, which can avoid the delamination in SU-8 CMP.

• Journal of Korean Society of Water and Wastewater
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• v.31 no.5
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• pp.373-381
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• 2017

$RuO_2$ is a common active component of Dimensionally Stable Anodes (DSAs) for chlorine evolution that can be used in wastewater treatment systems. The recent improvement of chlorine evolution using nanostructures of $RuO_2$ electrodes to increase the treatment efficiency and reduce the energy consumption of this process has received much attention. In this study, $RuO_2$ nanorod and nanosheet electrodes were simply fabricated using the sol-gel method with organic surfactants as the templates. The obtained $RuO_2$ nanorod and nanosheet electrodes exhibit enhanced electrocatalytic activities for chlorine evolution possibly due to the active surface areas, especially the outer active surface areas, which are attributed to the increase in mass transfers compared with a conventional nanograin electrode. The electrocatalytic activities for chlorine evolution were increased up to 20 % in the case of the nanorod electrode and 35% in the case of the nanosheet electrode compared with the nanograin electrode. The $RuO_2$ nanorod 80 nm in length and 20-30 nm in width and the $RuO_2$ nanosheet 40-60 nm in length and 40 nm in width are formed on the surface of Ti substrates. These results support that the templated $RuO_2$ nanorod and nanosheet electrodes are promising anode materials for chlorine evolution in future applications.

• KSII Transactions on Internet and Information Systems (TIIS)
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• v.6 no.11
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• pp.2901-2919
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• 2012

Recent research in MEMS (Micro-Electro-Mechanical Systems) and wireless communication has enabled tracking of continuous objects, including fires, nuclear explosions and bio-chemical material diffusions. This paper proposes an energy-efficient scheme that detects and tracks different dynamic shapes of a continuous object (i.e., the inner and outer boundaries of a continuous object). EBCO (Efficient Boundary detection and tracking of Continuous Objects in WSNs) exploits the sensing capabilities of sensor nodes by automatically adjusting the sensing range to be either a boundary sensor node or not, instead of communicating to its neighboring sensor nodes because radio communication consumes more energy than adjusting the sensing range. The proposed scheme not only increases the tracking accuracy by choosing the bordering boundary sensor nodes on the phenomenon edge, but it also minimizes the power consumption by having little communication among sensor nodes. The simulation result shows that our proposed scheme minimizes the energy consumption and achieves more precise tracking results than existing approaches.

• KIEE International Transaction on Electrical Machinery and Energy Conversion Systems
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• v.5B no.2
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• pp.118-122
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• 2005

Electro-chemo-mechanical devices or artificial muscles based on conducting polymers (CP) are presented as bilayers, CP/adhesive polymer, or as triple layers, CP/adhesive polymer/CP. Those soft and wet materials, working in aqueous solutions of a salt, mimic the composition of most organs from animals. Under electrochemical control, so working as new electrical machines, they produce continuous, reverse and elegant bending movements, mimicking those produce by animal muscles. By means of the current a perfect controls of the movement rate is attained giving soft and continuous movements. Muscles able to sense the chemical and mechanical conditions of work or muscle having tactile sense, as will be presented here, are being developed. All of them are founded on the non-stoichiometric nature of the soft and wet materials.

• 유체기계공업학회:학술대회논문집
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• 2000.12a
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• pp.366-372
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• 2000

In a power plant, it is generally accepted that a turbine governor system is necessary to control amount of steam supply toward the turbine system. There are many kinds of trouble at this governor system, which is recognized one of the most sensitive systems in the power plant. Especially we have experienced the internal leakage of motorization oil of servo valve. In the study, we investigated the mechanism of an internal leakage such as erosion by foreign materials and corrosion by chemical reaction between chloric healed oil and motorization oil. A precautionary measures is also performed to help the field service engineers.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.20 no.1
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• pp.86-95
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• 2011

Ultra-precision machining technology is the essential core technology in today's micro-electronics and electro-optical industries. The needs for processing systems to manufacture products to nanometer(nm) accuracy and sub-nanometer resolutions are increased recently. By using ion beam, it is possible to fabricate ultra-precision and ultra-fine products with nm accuracy and sub-nm resolution. In this paper, the basic research trends of ultra precision machining technology in domestic are surveyed, and the ways to reach to the world-leading level of basic research capabilities in the field of ultra-precision machining technology in domestic is suggested.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.460-465
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• 2003

The modeling of PEM (Proton Exchange Membrane) fuel cell system consisting of fuel cell stack and BOP (Balance of Plant) is presented in this paper. The effects of temperature, pressure (air, hydrogen), and humidity on the fuel cell system performance were mainly investigated using thermo-dynamical and electro-chemical equations. To understand the power distribution characteristics of fuel cell system, the effects of operating temperature and air pressure on maximum power and system power were also demonstrated. Through this study, we can get the basic insight into the fuel cell stack and BOP component sizing and it can be used effectively for the optimization of the practical fuel cell systems in purpose.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.57 no.9
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• pp.1563-1571
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• 2008

In this paper, dynamics modeling of a PEMFC is performed by electro-chemical equations. The developed PEMFC simulation model is implemented using MATLAB Simulink in order to design an optimal PCS for fuel cell systems. In addition, by use of the developed model as an input source of PCS, the validity of the proposed dynamic characteristic model of the PEMFC is verified by various simulation and experimental results.

• KSTLE International Journal
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• v.9 no.1_2
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• pp.10-12
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• 2008

Silicon micro-patterns were fabricated on Si (100) wafers using photolithography and DRIE (Deep Reactive Ion Etching) fabrication techniques. The patterned shapes included micro-pillars and micro-channels. After the fabrication of the patterns, the patterned surfaces were chemically modified by coating Z-DOL (perfluoropolyether, PFPE) thin films. The surfaces were then evaluated for their micro-friction behavior in comparison with those of bare Si (100) flat, Z-DOL coated Si (100) flat and uncoated Si patterns. Experimental results showed that the chemically treated (Z-DOL coated) patterned surfaces exhibited the lowest values of coefficient of friction when compared to the rest of the test materials. The results indicate that a combination of both the topographical and chemical modification is very effective in reducing the friction property. Combined surface treatments such as these could be useful for tribological applications in miniaturized devices such as Micro/Nano-Electro-Mechanical-Systems (MEMS/NEMS).

• Transactions of the Korean Society of Machine Tool Engineers
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• v.14 no.5
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• pp.35-40
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• 2005

An experimental Investigation of the basic characteristics of a micro-cantilever sensor was performed by inspecting the amplitude and frequency characteristics of a commercial tuning fork (TF). Application of acetone and ethanol with a volume of $1{\mu}l$ on the tine of a vibrating tuning fork causes immediate response in its amplitude and frequency characteristics. It has been shown that the tuning fork has ability to recognize a chemical agent with high sensitivity. The theoretical sensitivity of mass loading is in the range of $\~0.1Hz/ng$. Quartz tuning forks are routinely made using standard microfabrication process, thus suggesting the possibility of microfabrication of micro quart sensors.