A Study on Basic Research Trends of Ultra-Precision Machining Technology in Korea

우리나라 초정밀가공기술의 기초연구동향 분석 연구

  • 박원규 (한국연구재단 기초연구본부 공학기반단) ;
  • 이대명 (한국연구재단 기초연구본부 공학기반단) ;
  • 홍원화 (한국연구재단 기초연구본부 공학기반단)
  • Received : 2010.11.05
  • Accepted : 2010.12.21
  • Published : 2011.02.15

Abstract

Ultra-precision machining technology is the essential core technology in today's micro-electronics and electro-optical industries. The needs for processing systems to manufacture products to nanometer(nm) accuracy and sub-nanometer resolutions are increased recently. By using ion beam, it is possible to fabricate ultra-precision and ultra-fine products with nm accuracy and sub-nm resolution. In this paper, the basic research trends of ultra precision machining technology in domestic are surveyed, and the ways to reach to the world-leading level of basic research capabilities in the field of ultra-precision machining technology in domestic is suggested.

Keywords

References

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